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    • 3. 发明授权
    • Fine structure forming device
    • 精细结构成型装置
    • US5397420A
    • 1995-03-14
    • US935104
    • 1992-08-27
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • Nobuyoshi SakakibaraTakayuki TominagaMichio HisanagaTadashi HattoriYoshitaka GotohNaohito Mizuno
    • B23K10/00H05H1/30H05H1/00
    • H05H1/30B23K10/00
    • A micro machining apparatus forms a high-aspect structure having an optional depth in a workpiece at low cost. The apparatus applies high-frequency electric power to the workpiece and a machining electrode, to form a plasma zone in the vicinity of the leading end of the machining electrode. The apparatus guides a reactive gas into the plasma zone to activate the gas. The activated gas is adsorbed by the surface of the workpiece that faces the leading end of the machining electrode. The adsorbed gas reacts with the material of the workpiece and locally etches off the surface of the workpiece. A feed mechanism of the apparatus feeds the machining electrode toward the workpiece according to the progress of the etching, thereby forming a trench in the workpiece. Reaction products of the workpiece and reactive gas produced by the etching adhere to and deposit on the sidewall of the trench and form a protective film for protecting the sidewall from being etched, thereby providing the trench with a high aspect ratio.
    • 微加工装置以低成本形成在工件中具有可选深度的高方位结构。 该装置对工件和加工电极施加高频电力,以在加工电极的前端附近形成等离子体区域。 该装置引导反应气体进入等离子体区域以激活气体。 活性气体被工件的面向加工电极前端的表面吸附。 吸附的气体与工件的材料反应并局部地从工件的表面上蚀刻掉。 该装置的进给机构根据蚀刻的进行将加工电极朝向工件进给,从而在工件中形成沟槽。 工件的反应产物和通过蚀刻产生的反应性气体粘附并沉积在沟槽的侧壁上并形成保护膜,以保护侧壁不被蚀刻,从而为沟槽提供高纵横比。