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    • 5. 发明授权
    • Process for manufacturing a DRAM cell
    • 用于制造DRAM单元的工艺
    • US5043298A
    • 1991-08-27
    • US619666
    • 1990-11-28
    • Takashi YamadaFumio HoriguchiSatoshi InoueAkihiro NitayamaKazumasa Sunouchi
    • Takashi YamadaFumio HoriguchiSatoshi InoueAkihiro NitayamaKazumasa Sunouchi
    • H01L27/04H01L21/28H01L21/768H01L21/822H01L21/8242H01L27/10H01L27/108H01L29/417
    • H01L27/10808
    • When a semiconductor device having a multi-layered contact is fabaricated, the gate electrode is covered with a thick insulator film. A polycrystalline silicon film is formed in a state in which at least the gate electrode in the contact forming area is covered with a first oxidization-proof insulator film. An inter-layer insulator film is then formed in a state in which at least part of the polycrystalline silicon film is covered with a second oxidization-proof insulator film. A first contact hole is formed using the polycrystalline silicon film as an etching stopper, and the polycrystalline silicon film is then oxidized. Furthermore, a second contact hole is formed in the inter-layer insulator film on the upper surface of the second oxidization-proof insulator film using as the etching stopper the polycrystalline silicon film underlying the second oxidization-proof insulator film. Since the polycrystalline silicon film is formed under the inter-layer insulator film in the second contact forming area so as to cover the gate electrode, it acts as a stopper when the second contact is formed to thereby prevent a short circuit with the gate electrode even if there is no distance between the gate electrode and the second contact.
    • 当具有多层接触的半导体器件被制造时,栅电极被厚绝缘膜覆盖。 在至少形成接触形成区域中的栅电极被第一耐氧化绝缘膜覆盖的状态下形成多晶硅膜。 然后在至少部分多晶硅膜被第二防氧化绝缘膜覆盖的状态下形成层间绝缘膜。 使用多晶硅膜作为蚀刻阻挡层形成第一接触孔,然后将多晶硅膜氧化。 此外,在第二耐氧化绝缘膜的上表面上的层间绝缘膜中形成第二接触孔,使用作为蚀刻停止层的第二耐氧化绝缘膜的下面的多晶硅膜。 由于在第二接触形成区域中的层间绝缘体膜下方形成多晶硅膜以覆盖栅电极,所以当形成第二接触时,其作为阻挡体,从而防止栅电极的短路甚至 如果栅电极和第二触点之间没有距离。