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    • 4. 发明授权
    • Optical device
    • 光学装置
    • US07627200B2
    • 2009-12-01
    • US11554924
    • 2006-10-31
    • Takashi ShiraishiTetsu HasegawaMasaharu DoiKazuhiro Tanaka
    • Takashi ShiraishiTetsu HasegawaMasaharu DoiKazuhiro Tanaka
    • G02F1/035
    • G02F1/0356
    • Optical waveguides (A) and (B) of a Mach-Zehnder modulator is normally formed on a −Z plane as an electric polarization non-inversion area. However, when the signal electrode 11 and the ground electrode 10 are provided asymmetrically on two waveguides, chirp occurs in output light, which is undesired. Therefore, these electrodes are provided symmetrically about the two waveguides. To effectively perform optical modulation, a part of the substrate in which an optical waveguide exists is to be electric polarization-inverted. As a result of the electric polarization inversion the optical waveguide is on the +Z plane. However, electric charge is accumulated on the +Z plane from unstable spontaneous electric polarization of an electric polarization inversion area, and has undesired influence on the performance of the optical modulator. Therefore, a conductive amorphous layer is formed on the surface of the electric polarization inversion area.
    • 马赫 - 曾德调制器的光波导(A)和(B)通常在-Z平面上形成为电极化反转区域。 然而,当信号电极11和接地电极10不对称地设置在两个波导上时,在输出光中发生啁啾,这是不期望的。 因此,这些电极围绕两个波导对称设置。 为了有效地进行光调制,存在光波导的基板的一部分被电极化反转。 作为电极化反转的结果,光波导在+ Z平面上。 然而,电荷从电极化反转区域的不稳定的自发电极化在+ Z平面上积累,并且对光调制器的性能具有不期望的影响。 因此,在电极化反转区域的表面上形成导电非晶层。