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    • 1. 发明授权
    • Semiconductor device
    • 半导体器件
    • US07135736B2
    • 2006-11-14
    • US10616917
    • 2003-07-11
    • Takashi NishikawaTakashi Ohtsuka
    • Takashi NishikawaTakashi Ohtsuka
    • H01L29/788
    • H01L21/28291H01L21/28273H01L29/78391
    • This specification relates to a semiconductor device that comprises a semiconductor substrate 11, a source region 12 and a drain region 13, which are formed on the semiconductor substrate 11 with a channel region 14 therebetween; a floating gate electrode 152 that is formed on the channel region 14 with a gate insulator film 151 therebetween; a ferroelectric film 154 that is formed on the floating gate electrode 152; and a control gate electrode 156 that is formed on the ferroelectric film 154, wherein intermediate insulator films 153 and 155 are formed between at least one of the pairs consisting of the floating gate electrode 152 and the ferroelectric film 154, and the ferroelectric film 154 and the control gate electrode 156, and the intermediate insulator films 153 and 155 are made of hafnium oxide that contains nitrogen atoms.
    • 本说明书涉及半导体器件,其包括在半导体衬底11上形成有沟道区域14的半导体衬底11,源极区12和漏极区13; 在沟道区域14上形成有栅极绝缘膜151的浮栅电极152; 形成在浮栅电极152上的铁电体膜154; 以及形成在铁电体膜154上的控制栅极电极156,其中,在由浮置栅极电极152和铁电体膜154构成的至少一对之间形成中间绝缘膜153,155,以及强电介质膜154和 控制栅电极156和中间绝缘膜153,155由含有氮原子的氧化铪构成。
    • 3. 发明授权
    • Nonvolatile flip-flop circuit and method of driving the same
    • 非易失性触发电路及其驱动方法
    • US07002388B2
    • 2006-02-21
    • US11080454
    • 2005-03-16
    • Takashi NishikawaKenji ToyodaTakashi Ohtsuka
    • Takashi NishikawaKenji ToyodaTakashi Ohtsuka
    • H03K3/289H03K3/356
    • H03K3/356008G11C11/22
    • The present invention provides a method of driving a nonvolatile flip-flop circuit comprising the following steps of: a data hold step of holding an input data signal D utilizing polarization of a ferroelectric material of a ferroelectric gate transistor (601) when the data signal D is input while a first clocked inverter (604), a second clocked inverter (603), and a third switching element (602) are turned on and a first switching element (605), a second switching element (607), and a third clocked inverter (608) are turned off; and a data output step of outputting an output signal Q (−Q) based on the held data signal D placing the first clocked inverter (604), the second clocked inverter (603), and the third switching element (602) in the OFF state and placing the first switching element (605), the second switching element (607), and the third clocked inverter (608) in the ON state so as to interrupt an input of a data signal and maintain a polarization state of the ferroelectric material of the ferroelectric gate transistor (601).
    • 本发明提供了一种驱动非易失性触发电路的方法,包括以下步骤:数据保持步骤,当数据信号D(D)被利用时,利用铁电栅极晶体管(601)的铁电材料的极化来保持输入数据信号D 在第一时钟反相器(604),第二时钟反相器(603)和第三开关元件(602)导通时,第一开关元件(605),第二开关元件(607)和第三开关元件 时钟反相器(608)关闭; 以及数据输出步骤,基于将第一时钟反相器(604),第二时钟反相器(603)和第三开关元件(602)放置在OFF中的保持数据信号D输出输出信号Q(-Q) 状态,并且将第一开关元件(605),第二开关元件(607)和第三时钟反相器(608)置于导通状态,以便中断数据信号的输入并保持铁电材料的极化状态 的铁电栅极晶体管(601)。
    • 4. 发明申请
    • Nonvolatile flip-flop circuit and method of driving the same
    • 非易失性触发电路及其驱动方法
    • US20050206421A1
    • 2005-09-22
    • US11080454
    • 2005-03-16
    • Takashi NishikawaKenji ToyodaTakashi Ohtsuka
    • Takashi NishikawaKenji ToyodaTakashi Ohtsuka
    • G11C11/22H03K3/356H03K3/289
    • H03K3/356008G11C11/22
    • The present invention provides a method of driving a nonvolatile flip-flop circuit comprising the following steps of: a data hold step of holding an input data signal D utilizing polarization of a ferroelectric material of a ferroelectric gate transistor (601) when the data signal D is input while a first clocked inverter (604), a second clocked inverter (603), and a third switching element (602) are turned on and a first switching element (605), a second switching element (607), and a third clocked inverter (608) are turned off; and a data output step of outputting an output signal Q (−Q) based on the held data signal D placing the first clocked inverter (604), the second clocked inverter (603), and the third switching element (602) in the OFF state and placing the first switching element (605), the second switching element (607), and the third clocked inverter (608) in the ON state so as to interrupt an input of a data signal and maintain a polarization state of the ferroelectric material of the ferroelectric gate transistor (601).
    • 本发明提供了一种驱动非易失性触发电路的方法,包括以下步骤:数据保持步骤,当数据信号D(D)被利用时,利用铁电栅极晶体管(601)的铁电材料的极化来保持输入数据信号D 在第一时钟反相器(604),第二时钟反相器(603)和第三开关元件(602)导通时,第一开关元件(605),第二开关元件(607)和第三开关元件 时钟反相器(608)关闭; 以及数据输出步骤,基于将第一时钟反相器(604),第二时钟反相器(603)和第三开关元件(602)放置在OFF中的保持数据信号D输出输出信号Q(-Q) 状态,并且将第一开关元件(605),第二开关元件(607)和第三时钟反相器(608)置于导通状态,以便中断数据信号的输入并保持铁电材料的极化状态 的铁电栅极晶体管(601)。