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1. 发明授权

US08395462B2 Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body 失效
标题翻译：谐振器和振荡器，其具有在分层体的切口部分中的音叉振子
公开(公告)号：US08395462B2
公开(公告)日：2013-03-12
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H03H9/21 , H03H9/10 , H03B5/32 , H03L1/02
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

2. 发明申请

US20120206018A1 RESONATOR AND OSCILLATOR 失效
标题翻译：谐振器和振荡器
公开(公告)号：US20120206018A1
公开(公告)日：2012-08-16
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H01L41/053 , H01L41/18
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

3. 发明申请

US20100244628A1 PIEZOELECTRIC-DRIVEN MEMS ELEMENT 有权
标题翻译：压电驱动MEMS元件
公开(公告)号：US20100244628A1
公开(公告)日：2010-09-30
申请号：US12578664
申请日：2009-10-14
申请人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译：压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。

4. 发明授权

US08497672B2 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US08497672B2
公开(公告)日：2013-07-30
申请号：US12881765
申请日：2010-09-14
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： G01P15/00
CPC分类号： G01P15/097 , G01P15/0888 , G01P15/18 , G01P2015/0817 , G01P2015/0845
摘要： The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode. The first and second piezoelectric bending resonators extend on the both sides of the support beam and perform bending resonance motion in a direction perpendicular to the piezoelectric film. The comparison unit measures a difference of a resonance frequency between the first and second piezoelectric bending resonators. The calculation unit calculates an acceleration in a direction perpendicular to the extending direction of the support beam in the substrate surface from the difference of the resonance frequency.
摘要翻译：本实施例提供加速度传感器，其能够进行高精度的检测并具有非常紧凑的尺寸。本实施例的加速度传感器设置有基板，形成在基板上的锚固部分，支撑梁，其一端连接到锚定部分并且延伸穿过基板的空间，以及连接的检测质量块到支撑梁的另一端并且保持在与基板的空间上。加速度传感器还设置有第一和第二压电弯曲谐振器，比较单元和计算单元。第一和第二压电弯曲谐振器的一端连接到锚定部分，另一端连接到检测质量块或支撑梁，并且具有第一电极，第一压电膜和第二电极的堆叠。第一和第二压电弯曲谐振器在支撑梁的两侧延伸，并在垂直于压电薄膜的方向上进行弯曲共振运动。比较单元测量第一和第二压电弯曲谐振器之间的谐振频率的差。计算单元从谐振频率的差计算与基板表面中的支撑梁的延伸方向垂直的方向的加速度。

5. 发明授权

US08102098B2 Piezoelectric-driven MEMS element 有权
标题翻译：压电式MEMS元件
公开(公告)号：US08102098B2
公开(公告)日：2012-01-24
申请号：US12578664
申请日：2009-10-14
申请人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译：压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。

6. 发明授权

US08038890B2 Piezoelectric-driven MEMS device and method for manufacturing the same 失效
标题翻译：压电驱动MEMS器件及其制造方法
公开(公告)号：US08038890B2
公开(公告)日：2011-10-18
申请号：US12038568
申请日：2008-02-27
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： G01D15/00 , G11B5/127 , H01L21/00 , H01L21/302 , H01L21/461
CPC分类号： H01H57/00 , B81B3/0021 , H01G5/16 , H01G5/18 , H01H59/0009 , H01H2057/006 , H01L41/0933 , H01L41/094
摘要： A piezoelectric-driven MEMS device can be fabricated reliably and consistently. The piezoelectric-driven MEMS device includes: a movable flat beam having a piezoelectric film disposed above a substrate with a recessed portion such that the piezoelectric film is bridged over the recessed portion, piezoelectric drive mechanisms disposed at both ends of the piezoelectric film and configured to drive the piezoelectric film, and a first electrode disposed at the center of the substrate-side of the piezoelectric film, and a second electrode disposed on a flat part of the recessed portion of the substrate and facing the first electrode of the movable flat beam.
摘要翻译：可以可靠且一致地制造压电驱动的MEMS器件。压电驱动MEMS器件包括：可移动平板光束，其具有设置在具有凹部的基板上方的压电膜，使得压电膜桥接在凹部上，压电驱动机构设置在压电膜的两端并被配置为驱动所述压电膜，以及设置在所述压电膜的基板侧的中心的第一电极，以及设置在所述基板的所述凹部的平坦部分上并且面对所述可动平坦梁的所述第一电极的第二电极。

7. 发明授权

US07719169B2 Micro-electromechanical device 失效
标题翻译：微机电装置
公开(公告)号：US07719169B2
公开(公告)日：2010-05-18
申请号：US11686731
申请日：2007-03-15
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/16 , H01G5/18 , H01L41/0946 , H01L41/0953
摘要： A micro-electromechanical device includes a first piezoelectric actuator and a second piezoelectric actuator. The first piezoelectric actuator includes a first beam fixed on a substrate and a second beam extended in parallel to the first beam from a first connecting end to a first working end. A second piezoelectric actuator includes a third beam, spaced from the first beam, fixed on the substrate and a fourth beam extended in parallel to the third beam from a second connecting end to a second working end. The second working end faces the first working end in a perpendicular direction to a surface of the substrate.
摘要翻译：微机电装置包括第一压电致动器和第二压电致动器。第一压电致动器包括固定在基板上的第一光束和从第一连接端到第一工作端平行于第一光束延伸的第二光束。第二压电致动器包括固定在基板上的与第一光束间隔开的第三光束和从第二连接端到第二工作端平行于第三光束延伸的第四光束。第二工作端在与基板的表面垂直的方向上面向第一工作端。

8. 发明申请

US20090322183A1 INERTIAL SENSOR AND INERTIAL DETECTING DEVICE 审中-公开
标题翻译：惯性传感器和惯性检测装置
公开(公告)号：US20090322183A1
公开(公告)日：2009-12-31
申请号：US12488691
申请日：2009-06-22
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： G01P15/09
CPC分类号： G01P15/09 , G01C19/5621 , G01C19/5628 , G01C19/5656 , G01P15/0922 , G01P15/18 , G01P2015/0817 , G01P2015/0828
摘要： An inertial sensor includes a first beam, a first proof mass section and a first upper surface stopper section. The first beam extends in a first direction in a plane parallel to a major surface of a substrate and is held with a spacing from the major surface of the substrate. The first beam has a first detecting section including a first upper side electrode, a first lower side electrode, and a first upper side piezoelectric film provided between the first upper side electrode and the first lower side electrode. The first beam has one end connected to the major surface of the substrate. The first proof mass section is connected to the other end of the first beam and held with a spacing from the major surface of the substrate. The first upper surface stopper section is provided on the opposite side of the first proof mass section from the substrate with a spacing from the first proof mass section.
摘要翻译：惯性传感器包括第一光束，第一检测质量部分和第一上表面阻挡部分。第一光束在与基板的主表面平行的平面中沿第一方向延伸，并且与基板的主表面保持间隔。第一光束具有包括设置在第一上侧电极和第一下侧电极之间的第一上侧电极，第一下侧电极和第一上侧压电膜的第一检测部。第一光束的一端连接到基板的主表面。第一检测质量部分连接到第一光束的另一端并且与衬底的主表面间隔保持。第一上表面止动部分设置在第一检验质量部分的与第一检验质量部分间隔开的基板的相对侧上。

9. 发明申请

US20090189487A1 ACTUATOR AND ELECTRONIC HARDWARE USING THE SAME 失效
标题翻译：使用其的执行器和电子硬件
公开(公告)号：US20090189487A1
公开(公告)日：2009-07-30
申请号：US12354182
申请日：2009-01-15
申请人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H02N2/00
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译：致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

10. 发明授权

US07567018B2 Micro-mechanical device, micro-switch, variable capacitor high frequency circuit and optical switch 失效
标题翻译：微机械装置，微动开关，可变电容高频电路和光开关
公开(公告)号：US07567018B2
公开(公告)日：2009-07-28
申请号：US11400407
申请日：2006-04-10
申请人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki
IPC分类号： H01L41/08
CPC分类号： B81B3/0021 , B81B2201/014 , B81B2201/045 , G02B26/0858 , H01G5/18 , H01G5/40 , H01H2057/006
摘要： A micro-mechanical device includes a first piezoelectric actuator including a piezoelectric film, and lower and upper electrodes interleaving the piezoelectric film, and extending from a first fixing part on a substrate to a first operating end, and a second piezoelectric actuator connected to the first piezoelectric actuator via a connecting part at the first operating end of the first piezoelectric actuator, and extending from the connecting part to a second operating end, the second piezoelectric actuator being shorter than the first piezoelectric actuator.
摘要翻译：微机械装置包括：第一压电致动器，其包括压电膜，下电极和上电极交错压电膜，并从衬底上的第一固定部分延伸到第一操作端;以及第二压电致动器，压电致动器经由第一压电致动器的第一操作端处的连接部分并且从连接部分延伸到第二操作端，第二压电致动器比第一压电致动器短。

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