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1. 发明申请

US20120206018A1 RESONATOR AND OSCILLATOR 失效
标题翻译：谐振器和振荡器
公开(公告)号：US20120206018A1
公开(公告)日：2012-08-16
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H01L41/053 , H01L41/18
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

2. 发明申请

US20100244628A1 PIEZOELECTRIC-DRIVEN MEMS ELEMENT 有权
标题翻译：压电驱动MEMS元件
公开(公告)号：US20100244628A1
公开(公告)日：2010-09-30
申请号：US12578664
申请日：2009-10-14
申请人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
IPC分类号： H01L41/04 , H01L41/047
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译：压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。

3. 发明授权

US08395462B2 Resonator and oscillator with a tuning fork vibrator in a cut-out portion of a layered body 失效
标题翻译：谐振器和振荡器，其具有在分层体的切口部分中的音叉振子
公开(公告)号：US08395462B2
公开(公告)日：2013-03-12
申请号：US13422023
申请日：2012-03-16
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： H03H9/21 , H03H9/10 , H03B5/32 , H03L1/02
CPC分类号： H03H9/172 , H03H9/02338 , H03H9/2473 , H03H2009/02496 , H03H2009/241
摘要： A resonator according to the embodiment includes: a substrate; a flat layered body which is formed above the substrate and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; an anchor portion which fixes the layered body above the substrate; a cut-out portion inside the layered body; a tuning fork vibrator which is formed in the cut-out portion, has both ends supported by the layered body and is formed with at least a lower electrode, a piezoelectric film and an upper electrode; and an envelope which envelopes the layered body and the tuning fork vibrator in a noncontact fashion, and prevents an external force from being applied to the layered body and the tuning fork vibrator.
摘要翻译：根据实施例的谐振器包括：基板; 形成在基板的上方并形成有至少一个下电极，压电膜和上电极的平坦层状体; 锚定部，其将层叠体固定在基板的上方; 分层体内的切口部分; 形成在切口部分的音叉振动器具有由层叠体支撑的两端，并且至少形成有下电极，压电膜和上电极; 以及以非接触的方式包围层叠体和音叉振动器的信封，并且防止外力施加到层叠体和音叉振动器。

4. 发明授权

US08497672B2 Acceleration sensor 有权
标题翻译：加速度传感器
公开(公告)号：US08497672B2
公开(公告)日：2013-07-30
申请号：US12881765
申请日：2010-09-14
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki , Hiroshi Ono
IPC分类号： G01P15/00
CPC分类号： G01P15/097 , G01P15/0888 , G01P15/18 , G01P2015/0817 , G01P2015/0845
摘要： The present embodiments provide an acceleration sensor, which enables highly accurate detection and has an extremely compact size. The acceleration sensor of the present embodiments is provided with a substrate, a anchor portion formed on the substrate, a support beam, which has one end connected to the anchor portion and extends across a space from the substrate, and a proof mass which is connected to the other end of the support beam and held across a space from the substrate. The acceleration sensor is further provided with first and second piezoelectric bending resonators, a comparison unit, and a calculation unit. The first and second piezoelectric bending resonators have one end connected to the anchor portion and the other end connected to the proof mass or the support beam and have a stack of a first electrode, a first piezoelectric film, and a second electrode. The first and second piezoelectric bending resonators extend on the both sides of the support beam and perform bending resonance motion in a direction perpendicular to the piezoelectric film. The comparison unit measures a difference of a resonance frequency between the first and second piezoelectric bending resonators. The calculation unit calculates an acceleration in a direction perpendicular to the extending direction of the support beam in the substrate surface from the difference of the resonance frequency.
摘要翻译：本实施例提供加速度传感器，其能够进行高精度的检测并具有非常紧凑的尺寸。本实施例的加速度传感器设置有基板，形成在基板上的锚固部分，支撑梁，其一端连接到锚定部分并且延伸穿过基板的空间，以及连接的检测质量块到支撑梁的另一端并且保持在与基板的空间上。加速度传感器还设置有第一和第二压电弯曲谐振器，比较单元和计算单元。第一和第二压电弯曲谐振器的一端连接到锚定部分，另一端连接到检测质量块或支撑梁，并且具有第一电极，第一压电膜和第二电极的堆叠。第一和第二压电弯曲谐振器在支撑梁的两侧延伸，并在垂直于压电薄膜的方向上进行弯曲共振运动。比较单元测量第一和第二压电弯曲谐振器之间的谐振频率的差。计算单元从谐振频率的差计算与基板表面中的支撑梁的延伸方向垂直的方向的加速度。

5. 发明授权

US08102098B2 Piezoelectric-driven MEMS element 有权
标题翻译：压电式MEMS元件
公开(公告)号：US08102098B2
公开(公告)日：2012-01-24
申请号：US12578664
申请日：2009-10-14
申请人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Hiroshi Ono , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/047 , H01L41/094
摘要： A piezoelectric-driven MEMS element includes a substrate, a beam, a fixed portion, a fixed electrode portion and a power source. The beam is provided with a lower electrode film, a lower piezoelectric film, a middle electrode film, an upper piezoelectric film and an upper electrode film. The fixed portion fixes one end of the beam onto the substrate so as to hold the beam with a gap above the substrate. The fixed electrode portion has a capacitive gap between the fixed electrode portion and the other end of the beam. In addition, at least one or two of the lower electrode film, the middle electrode film and the upper electrode film is thicker than the rest thereof.
摘要翻译：压电驱动MEMS元件包括基板，光束，固定部分，固定电极部分和电源。光束设置有下电极膜，下压电膜，中间电极膜，上压电膜和上电极膜。固定部分将光束的一端固定到基板上，以便在基板上方具有间隙地保持光束。固定电极部分在固定电极部分和光束的另一端之间具有电容性间隙。此外，下电极膜，中间电极膜和上电极膜中的至少一个或两个比其余部分厚。

6. 发明授权

US07847252B2 Infrared-detecting element and infrared image sensor using the same 失效
标题翻译：红外线检测元件和红外线图像传感器
公开(公告)号：US07847252B2
公开(公告)日：2010-12-07
申请号：US12207744
申请日：2008-09-10
申请人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
发明人： Takashi Kawakubo , Michihiko Nishigaki , Toshihiko Nagano , Yoshinori Iida , Ikuo Fujiwara , Hiroto Honda
IPC分类号： H01L27/14
CPC分类号： G01J5/40 , G01J5/02 , G01J5/023 , G01J5/024 , G01J5/34 , H01L37/00
摘要： An infrared-detecting element includes: a substrate; a laminated body; an anchor coupling a part of the laminated body with the substrate and supporting the laminated body with a gap above the substrate; and an amplifier provided on the substrate and connected to at least one of the lower electrode and the upper electrode. The laminated body has a lower electrode, an upper electrode, and a piezoelectric film made of aluminum nitride which is provided between the lower electrode and the upper electrode and in which a c-axis is oriented almost perpendicularly to a film plane. The amplifier has a circuit performing conversion into voltage according to a charge generated in the laminated body.
摘要翻译：红外线检测元件包括：基板; 层压体; 将所述层叠体的一部分与所述基板连接的支撑体，并且在所述基板的上方具有间隙地支撑所述层叠体; 以及设置在所述基板上并连接到所述下电极和所述上电极中的至少一个的放大器。层叠体具有下电极，上电极和由氮化铝制成的压电膜，该氮化铝设置在下电极和上电极之间，并且其中c轴几乎垂直于膜平面取向。放大器具有根据层叠体中产生的电荷而进行电压转换的电路。

7. 发明授权

US07830068B2 Actuator and electronic hardware using the same 失效
标题翻译：执行器和电子硬件使用相同
公开(公告)号：US07830068B2
公开(公告)日：2010-11-09
申请号：US12354182
申请日：2009-01-15
申请人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： H01H57/00 , B81B3/0021 , B81B2201/032 , H01G5/18 , H01H2057/006 , H01L41/094 , H01L41/0973
摘要： An actuator includes a first beam, a first fixed part, a second beam, a first connective part, and a first fixed electrode. The first beam extends from a first fixed end to a first connective end, and the first fixed part connects the first fixed end and the substrate and supports the first beam above a main surface of the substrate with a gap. The second beam extends from a second connective end to a first action end and is provided in parallel to the first beam, and has a first division part divided by a first slit extending from the first action end toward the second connective end. The first connective part connects the first connective end and the second connective end and holds the second beam above the main surface of the substrate with a gap. The first fixed electrode is provided on the main surface of the substrate being configured to be opposed to a part of the first division part on a side of the first action end.
摘要翻译：致动器包括第一光束，第一固定部分，第二光束，第一连接部分和第一固定电极。第一光束从第一固定端延伸到第一连接端，并且第一固定部分连接第一固定端和衬底，并且将第一光束以间隙支撑在衬底的主表面上方。第二光束从第二连接端部延伸到第一动作端部并且平行于第一光束提供，并且具有由从第一动作端向第二连接端部延伸的第一狭缝分割的第一分割部分。第一连接部分连接第一连接端和第二连接端，并且将第二光束以间隙保持在基板的主表面上方。第一固定电极设置在基板的主表面上，该主表面被配置为与第一动作端侧的第一分割部分的一部分相对。

8. 发明授权

US07816841B2 Piezoelectric driven MEMS apparatus and portable terminal 失效
标题翻译：压电驱动MEMS器件和便携式终端
公开(公告)号：US07816841B2
公开(公告)日：2010-10-19
申请号：US12133027
申请日：2008-06-04
申请人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
发明人： Takashi Kawakubo , Toshihiko Nagano , Michihiko Nishigaki
IPC分类号： H01L41/08
CPC分类号： H01G5/16 , H01H2057/006 , H01L41/094 , H01L41/0946
摘要： A piezoelectric driven MEMS apparatus includes: a substrate; a support part provided on the substrate; a fixed electrode provided on the substrate; and an actuator having a first electrode film, a piezoelectric film formed on the first electrode film, and a second electrode film formed on the piezoelectric film, a first end of the actuator being supported by the support part, a second end of the actuator being disposed so as to be opposed to the fixed electrode. The second end of the actuator is divided into a plurality of electrode parts by a plurality of slits which pass through the first electrode film, the piezoelectric film and the second electrode film, at least a part of each electrode part is linked to parts of adjacent electrode parts, and each electrode part is capable of generating bending deformation individually.
摘要翻译：压电驱动MEMS装置包括：基板; 设置在基板上的支撑部; 设置在基板上的固定电极; 以及致动器，其具有第一电极膜，形成在所述第一电极膜上的压电膜和形成在所述压电膜上的第二电极膜，所述致动器的第一端由所述支撑部支撑，所述致动器的第二端为被设置为与固定电极相对。致动器的第二端通过穿过第一电极膜，压电膜和第二电极膜的多个狭缝分成多个电极部分，每个电极部分的至少一部分连接到相邻部分电极部分，并且每个电极部分能够分别产生弯曲变形。

9. 发明授权

US07770274B2 Piezoelectric thin film device and method for manufacturing the same 失效
标题翻译：压电薄膜器件及其制造方法
公开(公告)号：US07770274B2
公开(公告)日：2010-08-10
申请号：US11946910
申请日：2007-11-29
申请人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
发明人： Kenya Sano , Ryoichi Ohara , Naoko Yanase , Takaaki Yasumoto , Kazuhiko Itaya , Takashi Kawakubo , Hiroshi Toyoda , Masahiko Hasunuma , Toshihiko Nagano , Kazuhide Abe , Michihiko Nishigaki , Hironobu Shibata
IPC分类号： H04R17/00
CPC分类号： H03H9/02015 , H01H2057/006 , H01L41/0477 , H01L41/094 , H01L41/316 , H01L41/319 , H03H3/02 , H03H9/02094 , H03H9/173 , H03H9/174 , H03H9/175 , H03H9/542 , H03H9/582 , H03H9/605 , H03H2003/021 , H03H2003/023 , H03H2003/025 , Y10T29/42 , Y10T29/435 , Y10T29/49002 , Y10T29/49005 , Y10T29/49117 , Y10T29/49155
摘要： A piezoelectric thin film device includes an amorphous metal film disposed on a substrate and a piezoelectric film disposed on the amorphous metal. One of crystal axis of the piezoelectric film is aligned in a direction perpendicular to a surface of the amorphous metal.
摘要翻译：压电薄膜器件包括设置在衬底上的非晶金属膜和设置在非晶态金属上的压电膜。压电膜的晶轴之一在垂直于非晶态金属表面的方向上排列。

10. 发明授权

US07732990B2 Piezoelectric driven MEMS device 失效
标题翻译：压电式MEMS器件
公开(公告)号：US07732990B2
公开(公告)日：2010-06-08
申请号：US11683755
申请日：2007-03-08
申请人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
发明人： Michihiko Nishigaki , Toshihiko Nagano , Takashi Miyazaki , Kazuhiko Itaya , Takashi Kawakubo
IPC分类号： H01L41/08
CPC分类号： B81B3/0072 , B81B2201/032 , H01G5/18 , H01H57/00 , H01H2057/006 , H01L41/094
摘要： A MEMS device includes: a first actuator having a first fixed end, including a stacked structure of a first lower electrode, a first piezoelectric film, and a first upper electrode, and being able to be operated by applying voltages to the first lower electrode and the first upper electrode; a second actuator having a second fixed end, being disposed in parallel with the first actuator, including a stacked structure of a second lower electrode, a second piezoelectric film, and a second upper electrode, and being able to be operated by applying voltages to the second lower electrode and the second upper electrode; and an electric circuit element having a first action part connected to the first actuator and a second action part connected to the second actuator.
摘要翻译： MEMS器件包括：第一致动器，具有第一固定端，包括第一下电极，第一压电膜和第一上电极的堆叠结构，并且能够通过向第一下电极施加电压而操作，第一上电极; 具有第二固定端的第二致动器，与所述第一致动器平行设置，包括第二下电极，第二压电膜和第二上电极的堆叠结构，并且能够通过向所述第二致动器施加电压而被操作第二下电极和第二上电极; 以及具有连接到第一致动器的第一作用部分和连接到第二致动器的第二作用部分的电路元件。

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