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    • 6. 发明授权
    • Process for producing a vibration angular-velocity sensor
    • 振动角速度传感器的制造方法
    • US5802684A
    • 1998-09-08
    • US504725
    • 1995-07-20
    • Takamitsu FujiuShunji Watanabe
    • Takamitsu FujiuShunji Watanabe
    • G01C19/56G01P9/04G01P15/08H04R17/08H04R17/00
    • G01P15/0802G01C19/5642G01C19/5656H04R17/08Y10T29/42
    • A vibrator is formed on a silicon substrate to become a base by the silicon-processing procedure and a thin film of a piezoelectric material is formed on the substrate by a method matching with the silicon-processing procedure. When an ac field of a frequency near the resonance frequency of the transverse vibration of the vibrator is applied to the thin film of the piezoelectric material, the piezoelectric reverse effect excites characteristic vibration in the vibrator. If a rotational motion is generated along the axis of the beam in that state, the Coriolis' force is generated in a direction perpendicular to both the axial direction and the vibration direction of the beam. This force deforms the beam in that direction. Detecting inductive charges produced in another piezoelectric thin film fixed on the vibrator because of the piezoelectric normal effect due to the deformation, the rotational, angular velocity can be obtained.
    • 通过硅处理工序在硅衬底上形成振动器以成为基底,并通过与硅加工步骤匹配的方法在衬底上形成压电材料薄膜。 当振动器的横向振动的共振频率附近的交流场被施加到压电材料的薄膜时,压电反向效应激发振动器中的特征振动。 如果在该状态下沿着轴的轴线产生旋转运动,则在与梁的轴向和振动方向垂直的方向上产生科里奥利力。 该力使梁在该方向变形。 检测由于变形引起的压电正常效应,旋转角速度可以获得固定在振动器上的另一个压电薄膜产生的感应电荷。
    • 10. 发明授权
    • Method of phase transition, method for producing lead niobate-based
complex oxide utilizing said phase transition method, and lead
niobate-based complex oxide produced by said method
    • 相变方法,利用所述相变法生产铌酸铋基复合氧化物的方法,以及由所述方法生产的铌酸铅复合氧化物
    • US5192723A
    • 1993-03-09
    • US754015
    • 1991-09-03
    • Takamitsu FujiuAkira TanakaKenichi MuramatsuTetsuo Hattori
    • Takamitsu FujiuAkira TanakaKenichi MuramatsuTetsuo Hattori
    • C04B35/499
    • C04B35/499
    • A method for producing a lead niobate-based complex oxide with an elevated proportion of pervoskite phase and lead niobate-based complex oxide produced by such method enables manufacture of small actuator or capacitor with an elevated dielectric constant k. Treatment of a raw material represented by a general formula Pb(A.sub.1/3 Nb.sub.#)x(ZN.sub.1/3 Nb.sub.2/3) yO.sub.3 or Pb(Fe.sub.1/2 Nb.sub.1/2)x(Zn.sub.1/3 Nb.sub.2/3) yO.sub.3 (wherein A is Mg or Ni; x is an atomic ratio in a range of 0-1; and y is an atomic ratio in a range of 1-0, with a relation x+y=1) and containing pyrochlore phase, under a high temperature of 500.degree.-1300.degree. C. and a high pressure of 1000-4000 kg/cm.sup.2, causes transition of pyrochlore phase into perovskite phase, thereby increasing the proportion of perovskite phase. Also treatment of a raw material represented by a general formula uPb(.sub.1/3 Nb.sub.2/3)O.sub.3 -vPbTiO.sub.3 (wherein u is an atomic ratio in a range of 0.5-1; and v is an atomic ratio in a range of 0.5- 0, with a relation u+v=1) and containing pyrochlore phase, under a high temperature of 500.degree.-1300.degree. C. and a high pressure of 1000-4000 kg/cm.sup.2 causes transition of pyrochlore phase into perovskite phase, thereby increasing the proportion of pervoskite phase.
    • 通过这种方法生产的以铌酸酯相和以铌酸铅为主的复合氧化物的比例提高的生产铌酸铌基复合氧化物的方法使得能够制造具有升高的介电常数k的小型致动器或电容器。 由通式Pb(A1 / 3Nb#)x(ZN1 / 3Nb2 / 3)yO3或Pb(Fe1 / 2Nb1 / 2)x(Zn1 / 3Nb2 / 3)yO3表示的原料的处理(其中A是Mg或 Ni; x是0-1的范围内的原子比,Y是在1-0的范围内的原子比,x + y = 1),并且在500℃的高温下含有烧绿石相 -1300℃,高压1000-4000kg / cm2,引起烧绿石相转变为钙钛矿相,从而增加钙钛矿相的比例。 还可以处理由通式uPb(1 / 3Nb2 / 3)O3-vPbTiO3(其中u是0.5-1的范围内的原子比)表示的原料,v是0.5-0的范围内的原子比 ,具有关系u + v = 1)并且含有烧绿石相,在500℃-1300℃的高温和1000-4000kg / cm2的高压下引起烧绿石相转变成钙钛矿相,从而增加 渗透相的比例。