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    • 5. 发明授权
    • Semiconductor light emitting device
    • 半导体发光器件
    • US06815727B2
    • 2004-11-09
    • US10601755
    • 2003-06-24
    • Takahisa KurahashiTetsurou MurakamiShouichi OhyamaHiroshi Nakatsu
    • Takahisa KurahashiTetsurou MurakamiShouichi OhyamaHiroshi Nakatsu
    • H01L2906
    • H01L33/105
    • A resonant cavity type light emitting diode has a first DBR made of n-type AlAs or Al0.5Ga0.5As, a quantum well active layer, a second DBR made of p-type (Al0.2Ga0.6)0.5In0.5P or Al0.5In0.5P, and an n-type current constriction layer on an n-type GaAs substrate. The first DBR and the second DBR form a resonator. The quantum well active layer is formed in a position of an antinode of a standing wave inside the resonator. Between the second DBR and the current constriction layer, there is provided a p-type GaP etching protection layer that has a value obtained by dividing resistivity by thickness being 1×103 &OHgr; or more. Since a current in a current flow pass formed in the current constriction layer hardly diffuses to the outside of the current flow pass, there is generated few region with low current density that causes deterioration of responsespeed in a quantum well layer. Thus, the light emitting diode has an excellent high-speed response.
    • 谐振腔型发光二极管具有由n型AlAs或Al0.5Ga0.5As制成的第一DBR,量子阱活性层,由p型(Al 0.2 Ga 0.6)0.5 In 0.5 P制成的第二DBR或 Al 0.5 In 0.5 P,n型GaAs衬底上的n型电流收缩层。 第一DBR和第二DBR形成谐振器。 量子阱有源层形成在谐振器内的驻波的波腹的位置。 在第二DBR和电流收缩层之间,提供了一种p型GaP蚀刻保护层,其具有通过将电阻率除以1×10 -3Ω或更大的厚度获得的值。 由于形成在电流收缩层中的电流流动中的电流几乎不扩散到电流流通的外部,所以产生的电流密度低的区域导致量子阱层中的响应速度降低。 因此,发光二极管具有优异的高速响应。