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1. 发明授权

US06906995B2 Information read/write medium 失效
标题翻译：信息读写介质
公开(公告)号：US06906995B2
公开(公告)日：2005-06-14
申请号：US10600768
申请日：2003-06-23
申请人： Takahiro Togashi , Masataka Yamaguchi , Yoichi Okumura
发明人： Takahiro Togashi , Masataka Yamaguchi , Yoichi Okumura
IPC分类号： G11B7/24 , G11B7/243 , G11B7/257 , G11B7/258 , G11B3/70
CPC分类号： G11B7/252 , G11B7/24038 , G11B7/243 , G11B7/258 , G11B7/259
摘要： A stack “0” having a recording layer serving to transmit a light beam includes a heat dissipating layer, a reflective layer, an enhanced layer, and the recording layer, which are formed in that order on an intermediate layer. The reflective layer is translucent to a light beam, while the heat dissipating layer has a thermal conductivity higher than that of the intermediate layer as well as a refractive index higher than or equal to that of the intermediate layer and less than or equal to a refractive index 3. The thickness of the heat dissipating layer is set to a value within the range of a predetermined condition defined in accordance with a refractive index, the wavelength of the light beam, and a given integer. Thus, an information read/write medium configured to enable information to be recorded/reproduced thereon/therefrom as well as to effectively cool a recording layer serving to transmit a light beam is provided.
摘要翻译：具有用于透射光束的记录层的堆叠“0”包括在中间层上依次形成的散热层，反射层，增强层和记录层。反射层对于光束是半透明的，而散热层的热导率高于中间层的热导率，以及折射率高于或等于中间层的折射率，并且小于或等于折射率指数3.散热层的厚度设定为在根据折射率，光束波长和给定整数定义的预定条件的范围内的值。因此，提供一种信息读/写介质，其被配置为使得能够/从其上记录/再现信息以及有效地冷却用于发送光束的记录层。

2. 发明授权

US06724716B2 Phase-change type optical storage medium having multiple recording layers 失效
标题翻译：具有多个记录层的相变型光存储介质
公开(公告)号：US06724716B2
公开(公告)日：2004-04-20
申请号：US10059129
申请日：2002-01-31
申请人： Masataka Yamaguchi , Takahiro Togashi , Yoichi Okumura
发明人： Masataka Yamaguchi , Takahiro Togashi , Yoichi Okumura
IPC分类号： G11B724
CPC分类号： G11B7/24
摘要： An information recording medium has a light transmissive layer, a first information recording layer, a transparent layer, and a second information recording layer sequentially stacked to reproduce information signals upon exposure of the light transmissive layer to laser light, wherein the first information recording layer comprises a first protective layer, a phase change recording film, and a second protective layer sequentially from the light transmissive layer, and the rate of power fluctuation between a reproducing light passing through a recorded region of the first information recording layer and that passing through an unrecorded region of the first information recording layer during reproduction of the information signals from the second information recording layer, are within 10%, whereby the information signals can be recorded/reproduced on/from the second information recording layer through the first information recording layer satisfactorily.
摘要翻译：信息记录介质具有顺序堆叠的光透射层，第一信息记录层，透明层和第二信息记录层，以便在将透光层暴露于激光时再现信息信号，其中第一信息记录层包括第一保护层，相变记录膜和第二保护层，以及通过第一信息记录层的记录区域的再现光和通过未记录的记录区域之间的功率波动率在来自第二信息记录层的信息信号再现期间的第一信息记录层的区域在10％以内，从而可以令人满意地通过第一信息记录层将信息信号记录/再现在第二信息记录层上。

3. 发明授权

US08289507B2 Method of apparatus for detecting particles on a specimen 有权
标题翻译：用于检测样品上的颗粒的装置的方法
公开(公告)号：US08289507B2
公开(公告)日：2012-10-16
申请号：US13118004
申请日：2011-05-27
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.
摘要翻译：通过检查其中形成有多个图案的样本的表面的样本来检测缺陷的方法和装置，通过从仰角不同的多个方向之一的细长形状的光束照射，根据要检测的缺陷的种类从照明光源发射的光束。通过用安装在不同仰角方向上的多个图像传感器捕获由细长形状光束照射的样本的多个光学图像，通过根据在照射细长的照射区域中在样品上形成的图案的密度来改变放大倍率形状光通量。通过处理由多个图像传感器捕获的图像来检测样本上的缺陷。

4. 发明申请

US20080007725A1 Method for detecting particles and defects and inspection equipment thereof 失效
公开(公告)号：US20080007725A1
公开(公告)日：2008-01-10
申请号：US11822330
申请日：2007-07-05
申请人： Takahiro Togashi , Shigeru Matsui
发明人： Takahiro Togashi , Shigeru Matsui
IPC分类号： G01N21/88
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/8861 , G01N2021/8874 , G01N2021/95676
摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.

5. 发明授权

US07369223B2 Method of apparatus for detecting particles on a specimen 失效
标题翻译：用于检测样品上的颗粒的装置的方法
公开(公告)号：US07369223B2
公开(公告)日：2008-05-06
申请号：US11086442
申请日：2005-03-23
申请人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira Hamamatsu , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： An apparatus for inspecting a pattern to detect a small pattern defect has an illuminating light source, as illuminating optical system having a plurality of illuminating portions for switching an optical path of illuminating light flux to a surface of board constituting the inspected object from a plurality of directions different from each other, a detecting optical system having a variable magnification using an object lens for condensing reflected diffracted light from the illuminated board, a focusing optical system having a variable magnification capable of focusing an optical image by converged reflected diffracted light with a desired focusing magnification and an optical detector for detecting the optical image focused by the focusing optical system to convert it into an image signal, an A/D converter for converting the image signal into a digital image signal, and an image signal processor for processing the digital image signal to detect the defect.
摘要翻译：用于检查图案以检测小图案缺陷的装置具有照明光源，作为具有多个照明部的照明光学系统，所述照明光学系统具有多个照明部分，用于将照明光束的光路从多个照明部分切换到构成被检查物体的板的表面方向不同的检测光学系统，使用用于聚焦来自照明板的反射衍射光的物镜具有可变放大倍数的检测光学系统，具有可变倍率的聚焦光学系统，其能够通过会聚的反射衍射光聚焦光学图像，具有期望的聚焦放大率和用于检测由聚焦光学系统聚焦的光学图像以将其转换成图像信号的光学检测器，用于将图像信号转换为数字图像信号的A / D转换器和用于处理数字图像信号的图像信号处理器图像信号来检测缺陷。

6. 发明申请

US20110032515A1 METHOD OF APPARATUS FOR DETECTING PARTICLES ON A SPECIMEN 有权
公开(公告)号：US20110032515A1
公开(公告)日：2011-02-10
申请号：US12907895
申请日：2010-10-19
申请人： Akira HAMAMATSU , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
发明人： Akira HAMAMATSU , Minori Noguchi , Yoshimasa Ohshima , Sachio Uto , Taketo Ueno , Hiroyuki Nakano , Takahiro Jingu , Hisashi Hatano , Yukihisa Mohara , Seiji Otani , Takahiro Togashi
IPC分类号： G01N21/00
CPC分类号： G01N21/956
摘要： A method and apparatus of detecting a defect by inspecting a specimen in which a surface of a specimen on which plural patterns are formed is illuminated with an elongated shape light flux from one of plural directions which are different in elevation angle by switching an optical path of the light flux emitted from an illuminating light source in accordance with a kind of defect to be detected. Plural optical images of the specimen illuminated by the elongated shape light flux are captured with plural image sensors installed in different elevation angle directions by changing an enlarging magnification in accordance with a density of the pattern formed on the sample in an area irradiated with the illuminating elongated shape light flux. A defect on the specimen is detected by processing the images captured by the plural image sensors.

7. 发明授权

US07456948B2 Method for detecting particles and defects and inspection equipment thereof 失效
标题翻译：检测颗粒和缺陷的方法及其检测设备
公开(公告)号：US07456948B2
公开(公告)日：2008-11-25
申请号：US11822330
申请日：2007-07-05
申请人： Takahiro Togashi , Shigeru Matsui
发明人： Takahiro Togashi , Shigeru Matsui
IPC分类号： G01N21/88 , G01N21/86
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/8861 , G01N2021/8874 , G01N2021/95676
摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
摘要翻译：一种方法和设备，其包括用于存储所示斑点内的照明分布的示出点照度分布数据表，并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径关于颗粒或缺陷以及所示的点光照度分布数据表。因此，即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下，检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算被检查可以提高准确度。

8. 发明申请

US20080218751A1 Inspection device and inspection method of an object to be inspected 审中-公开
标题翻译：检查对象的检查装置和检查方法
公开(公告)号：US20080218751A1
公开(公告)日：2008-09-11
申请号：US12073295
申请日：2008-03-04
申请人： Takahiro Togashi , Shigeru Matsui
发明人： Takahiro Togashi , Shigeru Matsui
IPC分类号： G01N21/00
CPC分类号： G01N21/9503 , G01N21/4738
摘要： An inspection device of an object, comprising: a laser beam source for oscillating a laser beam and irradiating the laser beam onto a surface of an object to be inspected, a rotary table for loading and rotating the object, a moving mechanism for moving the rotary table in a transfer direction of the object, a plurality of light receptors disposed above the object for receiving a scattering light scattered from the surface of the object when the laser beam irradiated from the laser beam source onto the surface of the object loaded on the rotary table, and a data processor for performing operations on the basis of received signals of the scattering light received by the plurality of light receptors and discriminating a boundary position between a flat plane area of the surface of the object which is irradiated with the laser beam and a predetermined area corresponding to an edge portion outside the plane area.
摘要翻译：一种物体的检查装置，包括：激光束源，用于振荡激光束并将激光束照射到待检查物体的表面上;旋转台，用于装载和旋转物体;移动机构，用于使旋转在物体的传送方向上设置多个光接收器，设置在物体上方的多个光接收器，用于当从激光束源照射到加载在旋转体上的物体的表面上时从物体的表面散射的散射光表和数据处理器，用于基于由多个光接收器接收的散射光的接收信号进行操作，并且识别被激光束照射的物体的表面的平面区域与边界位置之间的边界位置;以及对应于平面区域外的边缘部分的预定区域。

9. 发明授权

US08094298B2 Method for detecting particles and defects and inspection equipment thereof 有权
标题翻译：检测颗粒和缺陷的方法及其检测设备
公开(公告)号：US08094298B2
公开(公告)日：2012-01-10
申请号：US12574185
申请日：2009-10-06
申请人： Takahiro Togashi , Shigeru Matsui
发明人： Takahiro Togashi , Shigeru Matsui
IPC分类号： G01N21/00 , G03B242/02 , H01J37/304
CPC分类号： G01N21/9501 , G01N21/94 , G01N2021/8861 , G01N2021/8874 , G01N2021/95676
摘要： A method and equipment which includes an illustrated-spot illumination-distribution data table for storing an illumination distribution within an illustrated spot and which calculates a coordinate position for a particle or a defect and the diameter of the particle on the basis of detection light intensity data about the particle or defect and the illustrated-spot illumination-distribution data table. Thus, even when the illumination distribution within the illustrated spot based on an actual illumination optical system is not a Gaussian distribution, the calculation of the particle diameter of the detected particle or defect and the calculation of a coordinate position on the surface of an object to be inspected can be attained with an increased accuracy.
摘要翻译：一种方法和设备，其包括用于存储所示斑点内的照明分布的示出点照度分布数据表，并且基于检测光强度数据计算颗粒或缺陷的坐标位置和颗粒的直径关于颗粒或缺陷以及所示的点光照度分布数据表。因此，即使在基于实际的照明光学系统的所示光点内的照明分布不是高斯分布的情况下，检测出的粒子或缺陷的粒径的计算以及物体表面上的坐标位置的计算被检查可以提高准确度。

10. 发明授权

US07038382B2 Plasma display panel with offset discharge electrodes 失效
标题翻译：带偏置放电电极的等离子显示面板
公开(公告)号：US07038382B2
公开(公告)日：2006-05-02
申请号：US10831269
申请日：2004-04-26
申请人： Hirokazu Hashikawa , Takahiro Togashi
发明人： Hirokazu Hashikawa , Takahiro Togashi
IPC分类号： H01J17/49
CPC分类号： H01J11/32 , H01J11/12 , H01J11/24 , H01J2211/245 , H01J2211/323
摘要： First electrodes each having a first bus electrode extending in the row direction are arranged regularly in the column direction on the rear-facing face of a front glass substrate, and covered with a first dielectric layer. On the rear-facing face of the first dielectric layer, second electrodes each having a second electrode body extending in the column direction are arranged regularly in the row direction and covered with a second dielectric layer. A first transparent electrode projecting from the first bus electrode and a second transparent electrode projecting from the second electrode body face each other at a required interval when viewed from the front glass substrate. A recess is formed in a portion of the second dielectric layer covering the first transparent electrode and facing toward the discharge space.
摘要翻译：每个具有在行方向上延伸的第一总线电极的第一电极在前玻璃基板的背面上的列方向上规则地布置，并被第一介电层覆盖。在第一电介质层的背面上，具有沿列方向延伸的第二电极体的第二电极在行方向上规则地排列并被第二电介质层覆盖。从前玻璃基板观察时，从第一总线电极突出的第一透明电极和从第二电极体突出的第二透明电极以所需的间隔彼此面对。在覆盖第一透明电极并朝向放电空间的第二电介质层的一部分中形成凹部。

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