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1. 发明授权

US06564744B2 Plasma CVD method and apparatus 失效
公开(公告)号：US06564744B2
公开(公告)日：2003-05-20
申请号：US09978545
申请日：2001-10-18
申请人： Takahiro Nakahigashi , Akira Doi , Yoshihiro Izumi , Hajime Kuwahara
发明人： Takahiro Nakahigashi , Akira Doi , Yoshihiro Izumi , Hajime Kuwahara
IPC分类号： C23C1600
CPC分类号： C23C16/32 , C23C16/26 , C23C16/325 , C23C16/34 , C23C16/345 , C23C16/36 , C23C16/402 , C23C16/403 , C23C16/517 , H01J37/32082 , H01J37/32706
摘要： The present invention provides a plasma CVD method for forming a plasma from a deposition material gas by application of an electric power, and thereby forming a film on a deposition target object in the plasma, wherein the formation of the plasma from the material gas is performed by applying an RF power and a DC power, and the DC power is applied to an electrode carrying the deposition target object. The present invention also provides a plasma CVD apparatus for forming a plasma from a deposition material gas by applying an electric power from the power applying means, and thereby forming a film on a deposition target object by exposing the deposition target object to the plasma, wherein the power applying means includes RF power applying means and DC power applying means, and the DC power applying means applies an electric power to the electrode carrying the deposition target object.

2. 发明授权

US06656592B2 Carbon film and method of forming the same 失效
标题翻译：碳膜及其形成方法
公开(公告)号：US06656592B2
公开(公告)日：2003-12-02
申请号：US09977222
申请日：2001-10-16
申请人： Koji Miyake , Yasuo Murakami , Jo Takeuchi , Takahiro Nakahigashi , Kiyoshi Ogata
发明人： Koji Miyake , Yasuo Murakami , Jo Takeuchi , Takahiro Nakahigashi , Kiyoshi Ogata
IPC分类号： B32B900
CPC分类号： C23C16/26 , Y10T428/30
摘要： A carbon film C containing carbon as a main component, formed on the surface of a soft base material 4, characterized in that the film C is cracked A and divided into a plurality of regions B, and an average area of respective regions (blocks) surrounded by cracks A is 0.15×10−3 mm2 to 20×10−3 mm2.
摘要翻译：在软质基材4的表面形成有以碳为主要成分的碳膜C，其特征在于，膜C断裂A，分割成多个区域B，各区域（块）的平均面积被裂缝A包围在0.15×10 -3 mm 2至20×10 -3 mm 2之间。

3. 发明授权

US6023025A Electric wire and manufacturing method thereof 失效
标题翻译：电线及其制造方法
公开(公告)号：US6023025A
公开(公告)日：2000-02-08
申请号：US859362
申请日：1997-05-20
申请人： Takahiro Nakahigashi , Akira Doi
发明人： Takahiro Nakahigashi , Akira Doi
IPC分类号： C23C16/26 , C23C16/27 , C23C16/50 , H01B7/18 , H01B13/00 , H01B7/00
CPC分类号： H01B13/0026 , H01B7/18
摘要： An electric wire in which a carbon film having abrasion resistance and lubricity is formed on the outer surface of an insulation cover made from at least one kind of material selected from rubber and resin, and covering an electric wire body, and a manufacturing method of the electric wire.
摘要翻译：在由选自橡胶和树脂中的至少一种材料制成的覆盖电线体的绝缘盖的外表面上形成具有耐磨性和润滑性的碳膜的电线以及其制造方法电线。

4. 发明授权

US06838174B2 Object being in contact with human skin when used 失效
标题翻译：使用时对象与人体皮肤接触
公开(公告)号：US06838174B2
公开(公告)日：2005-01-04
申请号：US09971935
申请日：2001-10-09
申请人： Takahiro Nakahigashi
发明人： Takahiro Nakahigashi
IPC分类号： A47K3/12 , A61F5/042 , A61G5/00 , A61G7/057 , A61G7/10 , B32B9/00 , C08J7/06 , C23C16/26 , C23C16/27 , G02C5/00 , C23C14/06
CPC分类号： C23C16/26 , A61G7/057 , Y10S414/134 , Y10S623/924 , Y10T428/30
摘要： An object is provided, which has a portion to be in contact with a human's skin when used, and can suppress irritation of the human's skin. A skin-contact portion of the object to be in contact with the human's skin when used is coated with a carbon film. For example, the carbon-film-coated object is glasses having ear pieces of temples and node pads coated at least partially with carbon films having a function of suppressing skin irritation.

5. 发明授权

US06652969B1 Carbon film method for formation thereof and article covered with carbon film and method for preparation thereof 失效
标题翻译：用于其形成的碳膜方法和用碳膜覆盖的制品及其制备方法
公开(公告)号：US06652969B1
公开(公告)日：2003-11-25
申请号：US09744985
申请日：2001-04-11
申请人： Yasuo Murakami , Takahiro Nakahigashi , Jo Takeuchi
发明人： Yasuo Murakami , Takahiro Nakahigashi , Jo Takeuchi
IPC分类号： B32B900
CPC分类号： C23C16/30 , C23C16/0245 , C23C16/26 , Y10T428/30
摘要： A carbon film containing fluorine and hydrogen, wherein a spectrum determined by FT-IR (Fourier Transform Infrared) spectrum analysis exhibits such a relationship that a ratio (IR.C—F)/(IR.C—H) between a peak area (IR.C—F) in a range from 1000 cm−1-1300 cm−1 resulting from C—F bonds and a peak area (IR.C—H) in a range from 2800 cm−1 to 3100 cm−1 resulting from C—H bonds is larger than 0, and a spectrum determined by XPS (X-ray photoelectron spectrum analysis) exhibits such a relationship that a ratio (F1S/C1S) between a peak intensity resulting from F1S and a peak intensity resulting from C1S is larger than 0 and smaller than 3. A carbon film containing hydrogen and nitrogen. A carbon film containing at least one of metal, metal compound, silicon and silicon compound.
摘要翻译：包含氟和氢的碳膜，其中通过FT-IR（傅立叶变换红外）光谱分析确定的光谱表现出这样的关系：峰面积（IR.CF）之间的比率（IR.CF）/（IR.CH）在由CF键产生的1000cm -1 -100cm -1 -1的范围内，由CH产生的峰面积（IR.CH）在2800cm -1至3100cm -1的范围内键大于0，通过XPS（X射线光电子能谱分析）确定的光谱表现出如下关系：由F1S产生的峰强度与C1S产生的峰强度之间的比（F1S / C1S）大于0 并且小于3.含有氢和氮的碳膜。含有金属，金属化合物，硅和硅化合物中的至少一种的碳膜。

6. 发明授权

US5935391A Method of manufacturing a tube having a film on its inner peripheral surface and apparatus for manufacturing the same 失效
标题翻译：在其内周面上具有膜的管的制造方法及其制造装置
公开(公告)号：US5935391A
公开(公告)日：1999-08-10
申请号：US381311
申请日：1995-01-31
申请人： Takahiro Nakahigashi , Hajime Kuwahara , Hiroshi Fujiyama
发明人： Takahiro Nakahigashi , Hajime Kuwahara , Hiroshi Fujiyama
IPC分类号： A61L29/08 , C03C17/00 , C23C14/04 , C23C14/35 , C23C16/04 , C23C16/503 , G21C3/20 , H01J37/32 , H01J37/34 , C23C14/34
CPC分类号： H01J37/3402 , A61L29/085 , C03C17/004 , C23C14/046 , C23C14/35 , C23C16/045 , C23C16/503 , G21C3/20 , H01J37/32532 , H01J37/32623 , H01J37/3266 , Y02E30/40
摘要： A rod-like electrode is disposed in a vacuum container, a ring-like electrode is disposed around the rod-like electrode, a tube to be processed is disposed such that the tube is substantially continuous to the ring-like electrode, an interior of the vacuum container is set to a predetermined degree of vacuum for deposition, a gas is introduced into a space between the electrodes, an electric power for forming plasma from the gas is applied while applying a magnetic field, and the plasma produced thereby is supplied into the tube. If the deposition material gas is used, the film is formed on the inner peripheral surface of the tube. If the plasma source gas for sputtering is used, a sputtering voltage is applied to a sputtering target disposed inside the tube, so that the film is formed on the inner peripheral surface of the tube by sputtering the target with ions in the plasma.
摘要翻译：杆状电极设置在真空容器中，环状电极设置在棒状电极周围，被处理管设置成使得管与环形电极基本连续，内部为将真空容器设定为预定的真空度用于沉积，将气体引入到电极之间的空间中，在施加磁场的同时施加用于从气体形成等离子体的电力，并且将由此产生的等离子体供应到管子。如果使用沉积材料气体，则在管的内周表面上形成膜。如果使用用于溅射的等离子体源气体，则将溅射电压施加到设置在管内的溅射靶，从而通过用等离子体中的离子溅射靶，从而在管的内周面上形成膜。

7. 发明授权

US5562952A Plasma-CVD method and apparatus 失效
标题翻译：等离子体CVD法和装置
公开(公告)号：US5562952A
公开(公告)日：1996-10-08
申请号：US416477
申请日：1995-04-04
申请人： Takahiro Nakahigashi , Hiroshi Murakami , Satoshi Otani , Takao Tabata , Hiroshi Maeda , Hiroya Kirimura , Hajime Kuwahara
发明人： Takahiro Nakahigashi , Hiroshi Murakami , Satoshi Otani , Takao Tabata , Hiroshi Maeda , Hiroya Kirimura , Hajime Kuwahara
IPC分类号： C23C16/40 , C23C16/515 , C23C14/02
CPC分类号： H01J37/32146 , C23C16/405 , C23C16/409 , C23C16/515
摘要： In a plasma-CVD method and apparatus, plasma is formed from a film material gas in a process chamber and, in the plasma, a film is deposited on a substrate disposed in the process chamber. Formation of the plasma from the material gas is performed by application of an rf-power prepared by effecting an amplitude modulation on a basic rf-power having a frequency in a range from 10 MHz to 200 MHz. A modulation frequency of the amplitude modulation is in a range from 1/1000 to 1/10 of the frequency of the basic rf-power. Alternatively, the rf-power is prepared by effecting on the basic rf-power a first amplitude modulation at a frequency in a range from 1/1000 to 1/10 of the frequency of the basic rf-power, and additionally effecting a second amplitude modulation on the modulated rf-power. A modulation frequency of the second amplitude modulation is in a range from 1/100 to 100 times the modulation frequency of the first amplitude modulation.
摘要翻译：在等离子体CVD方法和装置中，等离子体由处理室中的膜材料气体形成，并且在等离子体中，在设置在处理室中的基板上沉积膜。通过施加通过对频率在10MHz至200MHz范围内的基本rf功率进行幅度调制而制备的rf功率来执行来自材料气体的等离子体的形成。幅度调制的调制频率在基本rf功率的频率的1/1000到1/10的范围内。或者，通过以基本rf功率的频率的1/1000〜1/10的频率对基本rf功率进行第一幅度调制来准备rf功率，并且另外实现第二振幅调制rf功率的调制。第二幅度调制的调制频率在第一幅度调制的调制频率的1/100到100倍的范围内。

8. 发明授权

US07607414B2 Member for internal combustion engine and production method thereof 失效
标题翻译：内燃机用及其制造方法
公开(公告)号：US07607414B2
公开(公告)日：2009-10-27
申请号：US11224300
申请日：2005-09-13
申请人： Seiji Kamada , Hiroshi Kumagai , Midori Kondou , Kenji Kikuchi , Takumaru Sagawa , Yutaka Mabuchi , Takahiro Nakahigashi
发明人： Seiji Kamada , Hiroshi Kumagai , Midori Kondou , Kenji Kikuchi , Takumaru Sagawa , Yutaka Mabuchi , Takahiro Nakahigashi
IPC分类号： C23C16/27
CPC分类号： F01L3/04 , F02B77/02 , F02F3/12 , Y10T29/49231 , Y10T29/49263
摘要： A member for an internal combustion engine, such as a piston, a valve and a fuel injection valve. The member includes a substrate. A carbon-based coating film is formed on the substrate to cover at least a part of a region of the substrate to which region fuel for the internal combustion engine is contactable. The carbon-based coating film contains fluorine and has a thickness of 10 μm or less.
摘要翻译：用于内燃机的构件，例如活塞，阀和燃料喷射阀。该构件包括基底。在基板上形成碳基涂膜，以覆盖基板的区域的至少一部分，内燃机的燃料可与该基板区域接触。碳基涂膜含有氟，厚度为10μm以下。

9. 发明授权

US06893720B1 Object coated with carbon film and method of manufacturing the same 失效
标题翻译：涂覆有碳膜的物体及其制造方法
公开(公告)号：US06893720B1
公开(公告)日：2005-05-17
申请号：US09589225
申请日：2000-06-08
申请人： Takahiro Nakahigashi , Akira Doi , Yoshihiro Izumi , Hajime Kuwahara
发明人： Takahiro Nakahigashi , Akira Doi , Yoshihiro Izumi , Hajime Kuwahara
IPC分类号： B32B9/00 , C08J7/06 , C23C16/02 , C23C16/26 , F04B43/00
CPC分类号： C08J7/06 , C23C16/0245 , C23C16/26 , F04B43/0054 , F05C2203/0808 , F05C2253/12 , Y10T428/30
摘要： An object such as an automobile part, an image forming apparatus part, a bicycle part, other machine parts, a sport article or its part, a toy or its part, or a rain article or its part has a portion to be in contact with a contact object. The contact portion is made of at least one kind of material selected from a group including polymer material such as resin or rubber as well as glass, and the contact portion has a surface entirely or partially coated with a carbon film (typically, a DLC film) having a wear resistance as well as at least one of a lubricity, a water repellency and a gas barrier property. The carbon film is formed on the object with a good adhesion.
摘要翻译：诸如汽车部件，图像形成装置部件，自行车部件，其他机器部件，运动用品或其部件，玩具或其部件或雨制品或其部件的物体具有与联系对象。接触部分由选自树脂或橡胶等聚合物材料以及玻璃的组中的至少一种材料制成，接触部分具有完全或部分涂覆有碳膜（通常为DLC膜）的表面）具有耐磨性以及润滑性，拒水性和阻气性中的至少一种。在具有良好粘合性的物体上形成碳膜。

10. 发明授权

US06503579B1 Plasma CVD method, plasma CVD apparatus, and electrode 失效
标题翻译：等离子体CVD法，等离子体CVD装置和电极
公开(公告)号：US06503579B1
公开(公告)日：2003-01-07
申请号：US09403772
申请日：1999-11-02
申请人： Yasuo Murakami , Takahiro Nakahigashi
发明人： Yasuo Murakami , Takahiro Nakahigashi
IPC分类号： H05H146
CPC分类号： H01J37/32532 , C23C16/26 , C23C16/509 , H01J37/32 , H01J37/32009
摘要： The invention provides a plasma CVD method and device which can form a uniform or substantially uniform film on an outer surface of an object independently of the shape of the object, and also provides an electrode used in the method and device. More specifically, a plasma is formed from a deposition material gas by supplying an electric power to the gas, and a film is formed on the outer surface of a hollow object having an opening under the plasma. The electrodes for supplying the electric power for forming the gas plasma include an internal electrode arranged in an inner space of the hollow object and an external electrode arranged outside the object. The internal electrode can selectively have a reduced form allowing passage of the electrode through the opening of the hollow object and an enlarged form predetermined in accordance with the volume and shape of the inner space of the object.
摘要翻译：本发明提供了一种等离子体CVD方法和装置，其能够独立于物体的形状在物体的外表面上形成均匀或基本均匀的膜，并且还提供了用于该方法和装置的电极。更具体地，通过向气体供给电力，由沉积材料气体形成等离子体，并且在等离子体下具有开口的中空物体的外表面上形成膜。用于供应用于形成气体等离子体的电力的电极包括布置在中空物体的内部空间中的内部电极和布置在物体外部的外部电极。内部电极可以选择性地具有减小的形状，允许电极通过中空物体的开口，并且根据物体的内部空间的体积和形状预定的放大形式。

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