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    • 2. 发明申请
    • NONVOLATILE SEMICONDUCTOR MEMORY DEVICE AND METHOD FOR MANUFACTURING SAME
    • 非易失性半导体存储器件及其制造方法
    • US20120217571A1
    • 2012-08-30
    • US13402477
    • 2012-02-22
    • Fumitaka ARAISatoshi NagashimaHisataka MeguroHideto TakekidaKenta Yamada
    • Fumitaka ARAISatoshi NagashimaHisataka MeguroHideto TakekidaKenta Yamada
    • H01L29/792H01L21/76
    • H01L27/11524G11C16/0466H01L27/11551H01L29/66825H01L29/7881
    • Nonvolatile semiconductor memory device includes first memory cell array layer, first insulating layer formed thereabove, and second memory cell array layer formed thereabove. First memory cell array layer includes first NAND cell units each including plural first memory cells. The first memory cell includes first semiconductor layer, first gate insulating film formed thereabove, and first charge accumulation layer formed thereabove. The second memory cell array layer includes second NAND cell units each including plural second memory cells. The second memory cell includes second charge accumulation layer, second gate insulating film formed thereabove, and second semiconductor layer formed thereabove. Control gates are formed, via an inter-gate insulating film, on first-direction both sides of the first and second charge accumulation layers positioned the latter above the former via the first insulating layer. The control gates extend in a second direction perpendicular to the first direction.
    • 非易失性半导体存储器件包括第一存储单元阵列层,形成在其上的第一绝缘层和形成在其上的第二存储单元阵列层。 第一存储单元阵列层包括每个包括多个第一存储单元的第一NAND单元单元。 第一存储单元包括形成在其上的第一半导体层,第一栅极绝缘膜和在其上形成的第一电荷累积层。 第二存储单元阵列层包括每个包括多个第二存储单元的第二NAND单元单元。 第二存储单元包括第二电荷累积层,在其上形成的第二栅极绝缘膜,以及在其上形成的第二半导体层。 控制栅极经由栅极间绝缘膜,在第一和第二电荷累积层的第一方向两侧经由第一绝缘层位于前者之上。 控制门在垂直于第一方向的第二方向延伸。
    • 5. 发明授权
    • Nonvolatile semiconductor memory device and method for manufacturing same
    • 非易失性半导体存储器件及其制造方法
    • US08624317B2
    • 2014-01-07
    • US13402477
    • 2012-02-22
    • Fumitaka AraiSatoshi NagashimaHisataka MeguroHideto TakekidaKenta Yamada
    • Fumitaka AraiSatoshi NagashimaHisataka MeguroHideto TakekidaKenta Yamada
    • H01L29/792
    • H01L27/11524G11C16/0466H01L27/11551H01L29/66825H01L29/7881
    • Nonvolatile semiconductor memory device includes first memory cell array layer, first insulating layer formed thereabove, and second memory cell array layer formed thereabove. First memory cell array layer includes first NAND cell units each including plural first memory cells. The first memory cell includes first semiconductor layer, first gate insulating film formed thereabove, and first charge accumulation layer formed thereabove. The second memory cell array layer includes second NAND cell units each including plural second memory cells. The second memory cell includes second charge accumulation layer, second gate insulating film formed thereabove, and second semiconductor layer formed thereabove. Control gates are formed, via an inter-gate insulating film, on first-direction both sides of the first and second charge accumulation layers positioned the latter above the former via the first insulating layer. The control gates extend in a second direction perpendicular to the first direction.
    • 非易失性半导体存储器件包括第一存储单元阵列层,形成在其上的第一绝缘层和形成在其上的第二存储单元阵列层。 第一存储单元阵列层包括每个包括多个第一存储单元的第一NAND单元单元。 第一存储单元包括形成在其上的第一半导体层,第一栅极绝缘膜和在其上形成的第一电荷累积层。 第二存储单元阵列层包括每个包括多个第二存储单元的第二NAND单元单元。 第二存储单元包括第二电荷累积层,在其上形成的第二栅极绝缘膜,以及在其上形成的第二半导体层。 控制栅极经由栅极间绝缘膜,在第一和第二电荷累积层的第一方向两侧经由第一绝缘层位于前者之上。 控制门在垂直于第一方向的第二方向延伸。
    • 6. 发明授权
    • Nonvolatile semiconductor memory device and method of manufacturing the same
    • 非易失性半导体存储器件及其制造方法
    • US08466506B2
    • 2013-06-18
    • US13053924
    • 2011-03-22
    • Hideto Takekida
    • Hideto Takekida
    • H01L29/788
    • H01L27/11521
    • Nonvolatile semiconductor memory device includes; a first element isolation insulation layer within a first dummy cell region; a second element isolation insulation layer within a second dummy cell region; and a third element isolation insulation layer at boundary between the first and second dummy cell regions. Top surface of the first element isolation insulation layer is located lower than that of first floating electrode layers. Top surface of the second element isolation insulation layer is located at the same height as that of second floating electrode layers. The third element isolation insulation layer has a top surface. The end portion of the top surface adjoining the first floating electrode layer is located at a height lower than the top surface of the first floating electrode layer. The top surface of the third element isolation insulation layer has gradient ascending from the side surface of the first floating electrode layer toward that of the second floating electrode layer.
    • 非易失性半导体存储器件包括: 在第一虚拟细胞区域内的第一元件隔离绝缘层; 在第二虚拟单元区域内的第二元件隔离绝缘层; 以及在第一和第二虚拟单元区域之间的边界处的第三元件隔离绝缘层。 第一元件隔离绝缘层的顶表面位于比第一浮动电极层的顶表面更低的位置。 第二元件隔离绝缘层的顶表面位于与第二浮动电极层相同的高度。 第三元件隔离绝缘层具有顶表面。 邻接第一浮动电极层的顶表面的端部位于比第一浮动电极层的顶表面低的高度处。 第三元件隔离绝缘层的顶表面从第一浮动电极层的侧表面向第二浮动电极层的侧表面上升。
    • 8. 发明授权
    • Semiconductor storage device and control method thereof
    • 半导体存储装置及其控制方法
    • US08427876B2
    • 2013-04-23
    • US13188546
    • 2011-07-22
    • Hideto Takekida
    • Hideto Takekida
    • G11C16/04
    • G11C16/0483G11C16/10G11C16/3418
    • In one embodiment, there is provided a semiconductor storage device including: a memory cell array; a high voltage generator; and a controller that controls the high voltage generator. When a word line to is selected from word lines, the controller controls the high voltage generator to: apply a first read pass voltage to one or two first adjacent word lines adjacent to the selected word line; apply a second read pass voltage to a second adjacent word line adjacent to the first adjacent word lines, wherein the second read pass voltage is higher than the first read pass voltage; and apply a third read pass voltage to remaining word lines other than the selected word line, the first adjacent word line and the second adjacent word line, wherein the third read pass voltage is higher than the first read pass voltage and lower than the second read pass voltage.
    • 在一个实施例中,提供了一种半导体存储装置,包括:存储单元阵列; 高压发生器; 以及控制高电压发生器的控制器。 当从字线选择字线时,控制器控制高电压发生器:将第一读通过电压施加到与所选字线相邻的一个或两个第一相邻字线; 对与所述第一相邻字线相邻的第二相邻字线施加第二读取通过电压,其中所述第二读取通过电压高于所述第一读取通过电压; 对所选择的字线,所述第一相邻字线和所述第二相邻字线以外的剩余字线施加第三读取通过电压,其中所述第三读取通过电压高于所述第一读取通过电压且低于所述第二读取电流 通过电压。