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    • 2. 发明授权
    • Washing device and method for fabricating the same
    • 洗涤装置及其制造方法
    • US09059222B2
    • 2015-06-16
    • US12318289
    • 2008-12-24
    • Tae Young OhGeon Yong KimEun Ha Lee
    • Tae Young OhGeon Yong KimEun Ha Lee
    • B08B3/12H01L21/677H01L21/67B08B3/00B08B5/02H01L21/02
    • H01L21/67051B08B3/003B08B3/12B08B5/023B22F2998/00H01L21/02054H01L21/02057H01L21/0206H01L21/02096B22F5/10
    • The present invention relates a washing device and a method for fabricating the same which has good chemical resistance and can prevent a scratch from forming on a substrate. The washing device includes a substrate entry guide for making a substrate to enter in a right direction from an outside of the washing device, a foreign matter removal unit for receiving the substrate from the substrate entry guide unit and removing foreign matters from the substrate, a foreign matter washing unit for receiving the substrate from the foreign matter removal unit and washing remained foreign matters from the substrate, and a position control unit for controlling a position of the substrate moving out of the foreign matter washing unit, wherein the substrate entry guide, the foreign matter removal unit, the foreign matter washing unit, and the position control unit are formed of metallic porous material.
    • 本发明涉及一种清洗装置及其制造方法,该清洗装置及其制造方法具有良好的耐化学性,并可防止在基板上形成划痕。 洗涤装置包括用于使基板从洗涤装置的外部向右方向进入的基板进入引导件,用于从基板入口引导单元接收基板并从基板除去异物的异物去除单元, 用于从异物去除单元接收衬底的异物洗涤单元和从衬底洗涤的异物保持异物;以及位置控制单元,用于控制移出异物洗涤单元的衬底的位置,其中衬底进入引导件, 异物去除单元,异物清洗单元和位置控制单元由金属多孔材料形成。
    • 3. 发明申请
    • Washing device and method for fabricating the same
    • 洗涤装置及其制造方法
    • US20100071728A1
    • 2010-03-25
    • US12318289
    • 2008-12-24
    • Tae Young OhGeon Yong KimEun Ha Lee
    • Tae Young OhGeon Yong KimEun Ha Lee
    • B08B3/04B22F3/02
    • H01L21/67051B08B3/003B08B3/12B08B5/023B22F2998/00H01L21/02054H01L21/02057H01L21/0206H01L21/02096B22F5/10
    • The present invention relates a washing device and a method for fabricating the same which has good chemical resistance and can prevent a scratch from forming on a substrate. The washing device includes a substrate entry guide for making a substrate to enter in a right direction from an outside of the washing device, a foreign matter removal unit for receiving the substrate from the substrate entry guide unit and removing foreign matters from the substrate, a foreign matter washing unit for receiving the substrate from the foreign matter removal unit and washing remained foreign matters from the substrate, and a position control unit for controlling a position of the substrate moving out of the foreign matter washing unit, wherein the substrate entry guide, the foreign matter removal unit, the foreign matter washing unit, and the position control unit are formed of metallic porous material.
    • 本发明涉及一种清洗装置及其制造方法,该清洗装置及其制造方法具有良好的耐化学性,并可防止在基板上形成划痕。 洗涤装置包括用于使基板从洗涤装置的外部向右方向进入的基板进入引导件,用于从基板入口引导单元接收基板并从基板除去异物的异物去除单元, 用于从异物去除单元接收衬底的异物洗涤单元和从衬底洗涤的异物保持异物;以及位置控制单元,用于控制移出异物洗涤单元的衬底的位置,其中衬底进入引导件, 异物去除单元,异物清洗单元和位置控制单元由金属多孔材料形成。
    • 4. 发明授权
    • Method of producing unsaturated acid in fixed-bed catalytic partial oxidation reactor with enhanced heat control system
    • 固定床催化部分氧化反应器生产不饱和酸的方法,采用增强型热控系统
    • US07262324B2
    • 2007-08-28
    • US11019363
    • 2004-12-23
    • Kyoung Su HaGeon Yong KimSeong Pil KangBoo Gon Woo
    • Kyoung Su HaGeon Yong KimSeong Pil KangBoo Gon Woo
    • C07C51/16B01J8/04
    • C07C45/35C07C51/252C07C47/22C07C57/04
    • The present invention provides a process of producing unsaturated acids from unsaturated aldehydes by fixed-bed catalytic partial oxidation in a shell-and-tube heat exchanger-type reactor, as well as a shell-and-tube heat exchanger-type reactor for use in the process. In the invention, second-stage reaction zone of mainly producing unsaturated acids by the catalytic vapor phase oxidation of an unsaturated aldehyde-containing gas mixture produced in a first-stage reaction zone with molecular oxygen is divided into two or more shell spaces by at least one partition. Each of the divided shell spaces is filled with a heat transfer medium, and the heat transfer medium in each shell space is maintained at isothermal temperature or a temperature difference of 0-5° C. Also, in order to protect catalyst layers from a highly exothermic reaction, the process is performed at a limited temperature difference between the temperature at a hot spot and the temperature of the heat transfer medium. Also, in order to facilitate the removal of heat generation at a location where the partition is placed, a reaction inhibition layer is disposed in that location. The improved heat control system for reactors provided according to the present invention can secure the heat stability of the catalyst layer, reduce the amount of byproducts, and increase the yield of a final product.
    • 本发明提供了一种在壳管式热交换器型反应器中通过固定床催化部分氧化由不饱和醛生成不饱和酸的方法,以及用于在管式热交换器型反应器中使用的管壳式热交换器型反应器 的过程。 在本发明中,通过在分子氧的第一阶段反应区中产生的不饱和醛的气体混合物的催化气相氧化主要生成不饱和酸的第二阶段反应区至少分成两个或更多个壳层空间 一个分区。 每个分开的壳体空间填充有传热介质,并且每个壳体空间中的传热介质保持在等温温度或0-5℃的温差。此外,为了保护催化剂层免受高温 放热反应,该过程在热点温度与传热介质的温度之间的有限温度差下进行。 此外,为了便于在隔离物的位置除去发热,在该位置设置反应抑制层。 根据本发明提供的用于反应器的改进的热控制系统可以确保催化剂层的热稳定性,减少副产物的量,并且提高最终产品的产率。
    • 6. 发明授权
    • Method of producing unsaturated aldehyde and unsaturated acid in fixed-bed catalytic partial oxidation reactor with enhanced heat control system
    • 固定床催化部分氧化反应器中增强热控系统的不饱和醛和不饱和酸的生产方法
    • US07238836B2
    • 2007-07-03
    • US10931034
    • 2004-09-01
    • Kyoung Su HaGeon Yong KimSeong Pil KangSeok Hwan ChoiBoo Gon Woo
    • Kyoung Su HaGeon Yong KimSeong Pil KangSeok Hwan ChoiBoo Gon Woo
    • C07C51/16C07C45/35B01J8/04
    • C07C51/252C07C57/04
    • The present invention provides a process of producing unsaturated aldehydes and unsaturated acids from olefins by fixed-bed catalytic partial oxidation in a shell-and-tube heat exchanger-type reactor. In this process, the reactor comprises a first-step reaction zone of mainly producing the unsaturated aldehydes, a second-step reaction zone of mainly producing the unsaturated acids, or both the two zones. The first-step reaction zone is divided into two or more zones by a partition. Each of the divided shell spaces is filled with a heat transfer medium, and the heat transfer medium in each shell space is maintained at isothermal temperature or a temperature difference of 0-5° C. The temperatures of the heat transfer media in each of the divided shell spaces are set to increase in the moving direction of reactants. In order to facilitate the removal of heat generation at a location where the partition is placed, a reaction inhibition layer is disposed in the first-step reaction zone. Also, in order to protect the catalyst layer from a highly exothermic reaction, the process is performed at a limited temperature difference between the temperature in a hot spot and the temperature of a molten salt. If the improved heat control system according to the present invention is used, the heat stability of the catalyst layer will be secured and the yields of intermediate and final products can be increased.
    • 本发明提供了一种在壳管式热交换器型反应器中通过固定床催化部分氧化从烯烃生产不饱和醛和不饱和酸的方法。 在该方法中,反应器包括主要产生不饱和醛的第一步反应区,主要产生不饱和酸的第二步反应区或两个区。 第一步反应区通过隔板分成两个或多个区域。 每个分隔的壳体空间填充有传热介质,并且每个壳体空间中的传热介质保持在等温温度或0-5℃的温差。传热介质的温度 分开的壳体空间被设置为在反应物的移动方向上增加。 为了便于在放置隔板的位置除去发热,反应抑制层设置在第一步反应区中。 此外,为了保护催化剂层免受高度放热的反应,该过程在热点温度与熔融盐的温度之间的有限温度差下进行。 如果使用根据本发明的改进的热控制系统,则将确保催化剂层的热稳定性,并且可以提高中间产品和最终产品的产率。