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1. 发明申请

US20100303334A1 PATTERN INSPECTION APPARATUS AND METHOD 有权
标题翻译：图案检查装置及方法
公开(公告)号：US20100303334A1
公开(公告)日：2010-12-02
申请号：US12852314
申请日：2010-08-06
申请人： Tadashi KITAMURA , Kazufumi KUBOTA , Shinichi NAKAZAWA , Neeti VOHRA , Masahiro YAMAMOTO , Toshiaki HASEBE
发明人： Tadashi KITAMURA , Kazufumi KUBOTA , Shinichi NAKAZAWA , Neeti VOHRA , Masahiro YAMAMOTO , Toshiaki HASEBE
IPC分类号： G06K9/00 , G06K9/48 , G06K9/62
CPC分类号： G06K9/2054 , G06K9/00 , G06K9/036 , G06K9/48 , G06K2209/19 , G06T7/0004 , G06T7/001 , G06T2207/30148 , H01J37/265 , H01J37/28 , H01J2237/2817
摘要： A fine pattern, such as a semiconductor integrated circuit (LSI), a liquid crystal panel, and a photomask (reticle) for the semiconductor or the liquid crystal panel, which are fabricated based on data for fabricating the fine pattern such as design data is inspected by a pattern inspection apparatus. The pattern inspection apparatus for inspecting a pattern to-be-inspected uses an image of the pattern to-be-inspected and data for fabricating the pattern to-be-inspected. The pattern inspection apparatus includes a reference pattern generation device configured to generate a reference pattern represented by one or more lines from the data, an image generation device configured to generate the image of the pattern to-be-inspected, a detecting device configured to detect an edge of the image of the pattern to-be-inspected, and an inspection device configured to inspect the pattern to-be-inspected by comparing edges of the image of the pattern to-be-inspected with the one or more lines of the reference pattern.
摘要翻译：基于用于制造诸如设计数据的精细图案的数据制造的诸如用于半导体或液晶面板的半导体集成电路（LSI），液晶面板和光掩模（掩模版））的精细图案是由图案检查装置检查。用于检查待检查图案的图案检查装置使用要检查的图案的图像和用于制造待检查图案的数据。图案检查装置包括参考图案生成装置，被配置为从数据生成由一行或多行表示的参考图案，被配置为生成待检查图案的图像的图像生成装置，被配置为检测要检查的图案的边缘;以及检查装置，其被配置为通过将待检查的图案的图像的边缘与所述待检查的图案的边缘进行比较来检查待检查的图案，参考模式。

2. 发明申请

US20110074485A1 SEMICONDUCTOR CIRCUIT 有权
标题翻译：半导体电路
公开(公告)号：US20110074485A1
公开(公告)日：2011-03-31
申请号：US12828816
申请日：2010-07-01
申请人： Masahiro YAMAMOTO
发明人： Masahiro YAMAMOTO
IPC分类号： H03L5/00
CPC分类号： H03K17/168
摘要： A semiconductor circuit is provided in which no error signal is generated even when the circuit is exposed to a transient voltage noise that occurs with a transition from a first state indicating a conduction of a high-potential side switching device to a second state indicating a non-conduction of the high potential side switching device, or vice versa. A high potential switching device drive circuit 1 includes short circuit devices 31 and 32 that are controlled by the second level shifted signals S6 and S7 simultaneously generated across the second load resistances 30 and 29, respectively, to thereby serving to prevent a signal from being generated at one of the output sections where the other one of the first level shifted signals S4 and S5 is to be generated, when either one of the first shifted signals S4 and S5 in level shift circuit ON and OFF sections is generated across first load resistance 28 or 27 in a level shift circuit 2.
摘要翻译：提供一种半导体电路，其中即使当电路暴露于从表示高电位侧开关装置的导通的第一状态向第二状态转变而发生的瞬态电压噪声时，也不产生误差信号， - 高电位侧开关装置的导通，反之亦然。高电位开关器件驱动电路1包括分别由跨第二负载电阻30和29产生的第二电平移位信号S6和S7控制的短路器件31和32，从而用于防止产生信号在要产生第一电平移位信号S4和S5中的另一个的输出部分中的一个时，当在第一负载电阻28中产生电平移位电路ON和OFF部分中的第一移位信号S4和S5中的任何一个时或27在电平移位电路2中。

3. 发明申请

US20080247110A1 UNDERVOLTAGE LOCKOUT CIRCUIT 有权
标题翻译：欠压锁定电路
公开(公告)号：US20080247110A1
公开(公告)日：2008-10-09
申请号：US12049811
申请日：2008-03-17
申请人： Masahiro YAMAMOTO
发明人： Masahiro YAMAMOTO
IPC分类号： H02H3/24
CPC分类号： H02H3/24 , H02H3/44
摘要： An objective is to provide a highly-reliable undervoltage lockout circuit which can block and permit normal gate-driver output even when a supply voltage steeply increases. The undervoltage lockout circuit includes a reference-voltage circuit for outputting a reference voltage, a monitor-voltage circuit for outputting a monitor voltage, and a comparator for outputting, the reference voltage and the monitor voltage being inputted thereinto, a high/low signal, according to a comparison result of the reference voltage and the monitor voltage, in which the time constant of the monitor-voltage circuit for determining an increasing rate of the monitor voltage is set higher than that of the reference-voltage circuit for determining that of the reference voltage.
摘要翻译：目的是提供一种高度可靠的欠压锁定电路，即使当电源电压急剧上升时，它也可以阻塞并允许正常的栅极驱动器输出。所述欠压锁定电路包括用于输出参考电压的基准电压电路，用于输出监视电压的监视电压电路，以及用于输出所述参考电压和所述监视电压的比较器，用于输出高/低信号，根据参考电压和监视电压的比较结果，其中用于确定监视电压的增加率的监视电压电路的时间常数被设置为高于用于确定监视电压的基准电压电路的时间常数参考电压。

4. 发明申请

US20110097184A1 PARALLEL LINK ROBOT 有权
标题翻译：平行机器人
公开(公告)号：US20110097184A1
公开(公告)日：2011-04-28
申请号：US12837532
申请日：2010-07-16
申请人： Satoshi KINOSHITA , Tomoaki NAGAYAMA , Masahiro YAMAMOTO , Hidenori KUREBAYASHI , Katsumi FUJIMOTO , Tokitaka UEMURA
发明人： Satoshi KINOSHITA , Tomoaki NAGAYAMA , Masahiro YAMAMOTO , Hidenori KUREBAYASHI , Katsumi FUJIMOTO , Tokitaka UEMURA
IPC分类号： B25J9/10
CPC分类号： B25J17/0266 , B25J9/0051 , Y10T74/20207 , Y10T74/20305 , Y10T74/20329
摘要： A parallel link robot (10) provided with a base (11), a moving part (12), three links (20a to 20c) coupling the base and the moving part and having respectively single degrees of freedom with respect to the base, and three actuators (13a to 13c) respectively driving the links, each of the links comprised of a drive link (21a to 21c) coupled with the base and two driven links (22a to 22c, 23a to 23c) coupling the drive link and the moving part and parallel to each other, and further provided with a posture changing mechanism (15) which changes a posture of an element (19) attached to the moving part, an additional actuator (13d to 13f) arranged between the two driven links of at least one link in parallel to these driven links, and a power transmission shaft (39) which extends coaxially from the additional actuator and transmits rotational drive force to the posture changing mechanism. Due to this, it is possible to increase the degrees of freedom without reducing the possible region of operation and the acceleration/deceleration performance.
摘要翻译：一种平行连杆机器人（10），其具有底座（11），移动部件（12），将基座与移动部件相连并且相对于基座分别具有单独自由度的三个连杆（20a至20c），以及分别驱动连杆的三个致动器（13a至13c），每个链节包括与基座联接的驱动连杆（21a至21c）和联接驱动连杆的两个从动连杆（22a至22c，23a至23c）和移动并且还设置有改变附接到移动部件的元件（19）的姿势的姿势改变机构（15），设置在两个从动连杆之间的附加致动器（13d至13f）与这些从动链路平行的至少一个连杆，以及与附加致动器同轴地延伸的传动轴（39），并将旋转驱动力传递到姿势改变机构。由此，可以在不减少可能的操作区域和加速/减速性能的情况下增加自由度。

5. 发明申请

US20110052182A1 LENS BARRIER DEVICE 有权
标题翻译：镜头障碍装置
公开(公告)号：US20110052182A1
公开(公告)日：2011-03-03
申请号：US12868143
申请日：2010-08-25
申请人： Noboru UCHIDA , Shigeru YOKOTA , Masahiro YAMAMOTO
发明人： Noboru UCHIDA , Shigeru YOKOTA , Masahiro YAMAMOTO
IPC分类号： G03B17/00
CPC分类号： G03B17/00
摘要： A lens barrier device 10 includes a pair of lens bather members 12, 12 having a pair of toggle-lever engagement bosses 12e, 12e, a ring 14 having a pair of recesses 14d, 14d formed on its outer circumferential part, a pair of toggle levers 15, 15 having a pair of triangular cam part 15d, 15d and a base frame 17 supporting the toggle levers 15, 15, and a pair of torsion springs 16, 16 engaged with the toggle levers 15, 15 and the base frame 17. In assembling, the toggle-lever engagement bosses 12e, 12e are freely fitted into the recesses 14d, 14d, respectively. With forward-reverse rotating of the ring 14, by allowing the toggle-lever engagement bosses 12e, 12e to slide along the triangular cam part 15d, 15d while pressing the bosses 12e, 12e through respective ends of the recesses 14d, 14d, the pair of lens bather members 12, 12 are held in their closed or opened condition by the toggle levers 15, 15 and the torsion springs 16, 16.
摘要翻译：透镜屏障装置10包括一对具有一对肘杆接合凸起部12e，12e的透镜沐浴部件12,12，具有形成在其外周部上的一对凹部14d，14d的环14，一对肘节具有一对三角形凸轮部分15d，15d和支撑肘节杆15,15的底座17以及与肘节杆15,15和基座17接合的一对扭力弹簧16,16的杠杆15,15。在组装时，肘节杆接合凸台12e，12e分别自由地装配到凹槽14d，14d中。通过环14的正向反转，通过使肘杆接合凸台12e，12e沿着三角形凸轮部15d，15d滑动，同时通过凹部14d，14d的各个端部按压凸台12e，12e，该对透镜沐浴器12,12由肘节杆15,15和扭簧16,16保持在关闭或打开的状态。

6. 发明申请

US20090291399A1 COATING/DEVELOPING APPARATUS AND METHOD 有权
标题翻译：涂料/开发设备和方法
公开(公告)号：US20090291399A1
公开(公告)日：2009-11-26
申请号：US12392338
申请日：2009-02-25
申请人： Masahiro YAMAMOTO
发明人： Masahiro YAMAMOTO
IPC分类号： G03F7/00 , G03B27/52
CPC分类号： G03B27/52 , G03F7/162 , G03F7/3021 , H01L21/6715 , H01L21/67207 , H01L21/67253
摘要： A coating/developing apparatus includes a first storage section that stores data comprising correlations of different pattern information units including at least a line width of the resist pattern, different values of a film thickness of the underlying film, and different light information profiles. The apparatus further includes a mechanism configured to use a film thickness distribution to obtain an estimated film thickness of the underlying film at a light-irradiation area on the surface of the substrate, and to check the estimated film thickness and a light information profile obtained at the light-irradiation area against the data to determine pattern information at the light-irradiation area.
摘要翻译：涂层/显影装置包括第一存储部分，其存储包括不同图案信息单元的相关性的数据，所述不同图案信息单元至少包括抗蚀剂图案的线宽，底层膜的膜厚度的不同值和不同的光信息轮廓。该装置还包括一种机构，其被配置为使用膜厚分布来获得基板表面上的光照射区域处的基底膜的估计膜厚度，并且检查估计的膜厚度和在相对于数据的光照射区域以确定光照射区域的图案信息。

7. 发明申请

US20090107129A1 COGENERATION SYSTEM 有权
标题翻译：加工系统
公开(公告)号：US20090107129A1
公开(公告)日：2009-04-30
申请号：US12257756
申请日：2008-10-24
申请人： Nobuyuki YURI , Masahiro YAMAMOTO
发明人： Nobuyuki YURI , Masahiro YAMAMOTO
IPC分类号： F01N5/02
CPC分类号： F24D11/009 , F01P7/165 , F02G5/00 , F24D11/005 , F24D2200/26 , F24D2220/06 , F24D2220/08 , F24H2240/02 , Y02E20/14 , Y02P80/15 , Y02T10/166
摘要： A cogeneration system includes a first cooling device disposed in a cooling water circulation path extending between an engine and a waste-heat heat exchanger, and a second cooling device disposed in a hot water circulation pipe extending between a hot water storage tank and a hot air heater. The first cooling device is activated to cool cooling water when the temperature of hot water stored in the hot water storage tank exceeds a first predetermined value, and the second cooling device is activated to cool the hot water when the temperature of hot air inside the hot air heater exceeds a second predetermined value.
摘要翻译：热电联产系统包括设置在发动机和废热交换器之间延伸的冷却水循环路径中的第一冷却装置和设置在热水循环管道之间的第二冷却装置，所述热水循环管道在热水储存箱和热空气之间延伸加热器。当储存在热水储罐中的热水的温度超过第一预定值时，第一冷却装置被激活以冷却冷却水，并且当热的热空气的温度在热的时候，第二冷却装置被激活以冷却热水空气加热器超过第二预定值。

8. 发明申请

US20130073069A1 SCHEDULING METHOD AND RECORDING MEDIUM HAVING SCHEDULING PROGRAM RECORDED THEREON FOR SUBSTRATE TREATING APPARATUS 审中-公开
标题翻译：具有基板处理装置记录的调度程序的调度方法和记录介质
公开(公告)号：US20130073069A1
公开(公告)日：2013-03-21
申请号：US13608414
申请日：2012-09-10
申请人： Masahiro YAMAMOTO , Hiroyuki ARAKI
发明人： Masahiro YAMAMOTO , Hiroyuki ARAKI
IPC分类号： G06F19/00
CPC分类号： G06Q10/06
摘要： A scheduling method suitable for a single-substrate type substrate treating apparatus is provided. In the scheduling method, a controller provided in the substrate treating apparatus prepares schedule defining performances of the substrate treating apparatus having a single-substrate type treating unit in a time sequential order. The method comprises the steps of: a step for preparing a plurality of tentative timetables for a plurality of respective substrates, each of the tentative timetables combining a plurality of blocks in a time sequential order, each of the blocks defining a treatment content for one of the substrates; and a scheduling step for preparing a total schedule by acquiring the blocks from the plurality of tentative timetables to dispose the acquired blocks in a time sequential order.
摘要翻译：提供适用于单基板型基板处理装置的调度方法。在调度方法中，设置在基板处理装置中的控制器准备以时间顺序确定具有单基板型处理单元的基板处理装置的性能的时间表。该方法包括以下步骤：准备多个相应基板的多个暂定时间表的步骤，每个临时时间表以时间顺序组合多个块，每个块定义用于基材; 以及调度步骤，用于通过从所述多个临时时间表中获取所述块来准备总计划，以按时间顺序排列所获取的块。

9. 发明申请

US20090139853A1 SPUTTERING APPARATUS AND SPUTTERING METHOD 有权
标题翻译：溅射装置和喷射方法
公开(公告)号：US20090139853A1
公开(公告)日：2009-06-04
申请号：US12272834
申请日：2008-11-18
申请人： Masahiro YAMAMOTO , Takeshi KOIWASAKI , Isao MURAGISHI , Hitoshi YAMANISHI
发明人： Masahiro YAMAMOTO , Takeshi KOIWASAKI , Isao MURAGISHI , Hitoshi YAMANISHI
IPC分类号： C23C14/35
CPC分类号： C23C14/35 , H01J37/3408 , H01J37/3452
摘要： The present invention is to provide a sputtering apparatus and a sputtering method, specifically, a magnetron sputtering apparatus having a magnetron electrode capable of generating plasma in a wide region near the surface of a target, and a sputtering method using the apparatus. Thereby, a magnetic field shape enabling to generate plasma in a wide region near the surface of a target is realized, the use efficiency of the target material is increased, and dusts and abnormal electric discharges may be prevented. Magnetic circuit 10 of a magnetron electrode is set as “magnetic circuit 10 in which center perpendicular magnet 101, inside parallel magnet 103, outside parallel magnet 104, and perimeter perpendicular magnet 102 are arranged” from the central part of target 2 toward the perimeter part, and inside parallel magnet 103 is brought close to target 2.
摘要翻译：本发明提供一种溅射装置和溅射方法，特别是具有能够在靶表面附近的宽范围内产生等离子体的磁控管电极的磁控管溅射装置和使用该装置的溅射方法。由此，能够实现能够在目标表面附近的宽范围内产生等离子体的磁场形状，能够提高目标材料的使用效率，并且可以防止灰尘和异常放电。将磁控管电极的磁路10设定为从目标2的中心部向周方向排列有“中心垂直磁铁101，内侧平行磁铁103，外侧平行磁铁104，外周垂直磁铁102”的磁路10 并且使内侧平行磁铁103靠近目标2。

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