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    • 3. 发明申请
    • PLASMA PROCESSING APPARATUS AND PLASMA PROCESSING METHOD
    • 等离子体加工设备和等离子体处理方法
    • US20130017686A1
    • 2013-01-17
    • US13620497
    • 2012-09-14
    • Tadahiro OHMIKazuhide INOTakahiro ARAKAWA
    • Tadahiro OHMIKazuhide INOTakahiro ARAKAWA
    • H01L21/3065C23C16/511
    • H01L22/10H01J37/32192H01L21/67017H01L21/67069
    • A plasma processing apparatus for processing an object to be processed using a plasma. The apparatus includes a processing chamber defining a processing cavity for containing an object to be processed and a process gas therein, a microwave radiating antenna having a microwave radiating surface for radiating a microwave in order to excite a plasma in the processing cavity, and a dielectric body provided so as to be opposed to the microwave radiating surface, in which the distance D between the microwave radiating surface and a surface of the dielectric body facing away from the microwave radiating surface, which is represented with the wavelength of the microwave being a distance unit, is determined to be in the range satisfying the inequality 0.7×n/4≦D≦1.3×n/4 (n being a natural number).
    • 一种等离子体处理装置,用于使用等离子体处理待处理物体。 该装置包括:处理室,其限定用于容纳待处理物体和处理气体的处理腔;微波辐射天线,具有用于辐射微波的微波辐射表面,以激发处理空腔中的等离子;以及电介质 本体设置为与微波辐射表面相对,其中以微波的波长表示的微波辐射表面和远离微波辐射表面的电介质体的表面之间的距离D为距离 单位确定在满足不等式0.7×n / 4≦̸ D≦̸ 1.3×n / 4(n为自然数)的范围内。
    • 8. 发明申请
    • VACUUM TUBE AND VACUUM TUBE MANUFACTURING APPARATUS AND METHOD
    • 真空管和真空管制造设备和方法
    • US20130307404A1
    • 2013-11-21
    • US13934488
    • 2013-07-03
    • Tadahiro OHMIAkihiro MORIMOTO
    • Tadahiro OHMIAkihiro MORIMOTO
    • H01J9/395H01J21/00
    • H01J9/395H01J7/02H01J9/38H01J9/385H01J17/20H01J21/00H01J37/18H01J61/20H01J61/24
    • With respect to a vacuum tube having a reduced pressure vessel containing an electric discharge gas sealed therein, problems such as the lowering of discharge efficiency owing to an organic material, moisture or oxygen remaining in the reduced pressure vessel have taken place conventionally. It has been now found that the selection of the number of water molecules, the number of molecules of an organic gas and the number of oxygen molecules remaining in the reduced pressure vessel, in a relation with the number of molecules of a gas contributing the electric discharge allows the reduction of the adverse effect by the above-mentioned remaining gas. Specifically, the selection of the number of molecules of the above electric discharge gas being about ten times that of the above-mentioned remaining gas or more can reduce the adverse effect by the above-mentioned remaining gas.
    • 对于具有密封在其中的放电气体的减压容器的真空管,常规地发生诸如由于有机材料引起的排出效率降低,残留在减压容器中的水分或氧气的问题。 现在已经发现,选择水分子的数量,有机气体的分子数和残留在减压容器中的氧分子的数量与导致电气的气体的分子数的关系 放电允许通过上述剩余气体减少不利影响。 具体而言,选择上述放电气体的分子数为上述剩余气体的10倍以上的分子数量,可以减少上述剩余气体的不利影响。