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1. 发明授权

US11631607B2 Carrier and jig 有权
公开(公告)号：US11631607B2
公开(公告)日：2023-04-18
申请号：US16782495
申请日：2020-02-05
申请人： TOKYO ELECTRON LIMITED
发明人： Toshiaki Toyomaki , Seiichi Kaise
IPC分类号： H01L21/683 , H01L21/3065 , H01L21/02 , H01L21/687 , H01L21/673
摘要： A carrier includes a jig and a case. The jig is configured to hold at least one consumable to be loaded into or unloaded from a container. The case is configured to store the jig and the consumable held by the jig.

2. 发明申请

US20150040950A1 PURGING APPARATUS AND PURGING METHOD FOR SUBSTRATE STORAGE CONTAINER 有权
标题翻译：基材储存容器的取料装置和清洗方法
公开(公告)号：US20150040950A1
公开(公告)日：2015-02-12
申请号：US14370306
申请日：2013-01-30
申请人： TOKYO ELECTRON LIMITED
发明人： Seiichi Kaise , Shigeki Amemiya , Genichi Nanasaki
IPC分类号： B08B9/093
CPC分类号： B08B9/093 , H01L21/67034 , H01L21/67389
摘要： Provided is a purging apparatus including an upper nozzle provided above an opening of the substrate storage container and configured to supply a dry gas obliquely downwardly to a side opposite to the substrate storage container and over the entire surface of the width of the opening; and a plurality of side nozzles provided at both sides of the opening of the substrate, respectively, and each configured to supply a dry gas towards the inside of the substrate storage container from an outside of the opening. The side nozzles are each longer than a height of the opening and formed with a plurality of supply holes supplying the dry gas at predetermined intervals in a vertical direction. The respective supply hole formed on one side nozzle and the respective supply holes formed on the other side nozzle are disposed alternately so as not to be located at the same height.
摘要翻译：本发明提供一种净化装置，其具有设置在所述基板收容容器的开口部的上方的上部喷嘴，所述清洗装置构成为向所述基板收容容器的相反侧向所述开口部的宽度方向倾斜地供给干燥气体，以及分别设置在所述基板的开口的两侧的多个侧面喷嘴，并且分别构造成从所述开口的外部朝向所述基板收容容器的内部供给干燥气体。所述侧喷嘴的长度大于所述开口的高度，并形成有在垂直方向上以预定间隔供给所述干燥气体的多个供给孔。形成在一侧喷嘴上的相应供应孔和形成在另一侧喷嘴上的各个供应孔交替设置成不位于相同的高度。

3. 发明授权

US11735448B2 Container, container partition plate, substrate processing system, and substrate transfer method 有权
公开(公告)号：US11735448B2
公开(公告)日：2023-08-22
申请号：US16809741
申请日：2020-03-05
申请人： TOKYO ELECTRON LIMITED
发明人： Toshiaki Toyomaki , Seiichi Kaise , Masahiro Numakura , Yuki Takeyama
IPC分类号： H01L21/67 , H01L21/673 , H01L21/687 , B65G47/90
CPC分类号： H01L21/6732 , B65G47/90 , H01L21/67167 , H01L21/67265 , H01L21/68707
摘要： A container for consumables includes multiple holding portions, a partition plate and a fixer. The multiple holding portions are configured to respectively accommodate the consumables, each of which is loaded into and unloaded from one direction. The partition plate includes a first portion formed to be disposed between a light emitting part and a light receiving part of a detector, and the partition plate is accommodated in one of the multiple holding portions. The fixer is configured to fix the container so that the consumables are arranged on a transfer path to be loaded into and unloaded from the multiple holding portions.

4. 发明授权

US10010913B2 Purging apparatus and purging method for substrate storage container 有权
公开(公告)号：US10010913B2
公开(公告)日：2018-07-03
申请号：US14370306
申请日：2013-01-30
申请人： TOKYO ELECTRON LIMITED
发明人： Seiichi Kaise , Shigeki Amemiya , Genichi Nanasaki
IPC分类号： B65G1/12 , B08B5/02 , B08B9/093 , H01L21/67 , H01L21/673
CPC分类号： B08B9/093 , H01L21/67034 , H01L21/67389
摘要： Provided is a purging apparatus including an upper nozzle provided above an opening of a substrate storage container and configured to supply a dry gas obliquely downwardly to a side opposite to the opening of the substrate storage container and over the entire surface of the width of the opening of the substrate storage container; and a plurality of side nozzles provided at both left and right sides of the opening of the substrate storage container, respectively, and each configured to supply the dry gas towards the inside of the substrate storage container from an outside of the opening of the substrate storage container. Each of the side nozzles is longer than a height of the opening of the substrate storage container and is provided with a plurality of supply holes formed thereon at predetermined intervals in a vertical direction.

5. 发明授权

US09305817B2 Method for purging a substrate container 有权
标题翻译：吹扫基材容器的方法
公开(公告)号：US09305817B2
公开(公告)日：2016-04-05
申请号：US13757954
申请日：2013-02-04
申请人： TOKYO ELECTRON LIMITED
发明人： Seiichi Kaise , Shigeki Amemiya , Shinobu Onodera , Hiroki Fujita , Masaru Nishino , Atsushi Rikukawa
IPC分类号： H01L21/677 , H01L21/673
CPC分类号： H01L21/67772 , H01L21/67393
摘要： A method for purging a substrate container which accommodates in multiple stages a plurality of substrates to be processed by a substrate processing apparatus, the method includes: mounting the substrate container on a mounting unit; connecting a gas supply port provided in the substrate container and a gas supply line provided in a mounting unit; starting supply of a dry gas into the substrate container from a gas supply line before opening a cover of the substrate container; opening the cover of the substrate container while keeping the supply of the dry gas; closing the cover of the substrate container upon completion of processing of the substrates in the substrate container; and stopping the supply of the dry gas after closing the cover of the substrate container.
摘要翻译：一种用于清洗基板容器的方法，所述方法包括：将所述基板容器安装在安装单元上，所述方法包括：将所述基板容器安装在基板处理装置上，连接设置在基板容器中的气体供给口和设置在安装单元中的气体供给管线; 在打开基板容器的盖之前，从气体供应管线开始供应干燥气体到基板容器中; 在保持供应干燥气体的同时打开基材容器的盖子; 在基板容器中的基板处理完成时封闭基板容器的盖子; 并且在关闭基板容器的盖子之后停止供应干燥气体。

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