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    • 2. 发明授权
    • Transflective liquid crystal display panel and manufacturing method thereof
    • 半透射液晶显示面板及其制造方法
    • US08440482B2
    • 2013-05-14
    • US12969543
    • 2010-12-15
    • Sweehan J. H. YangPo-Sheng ShihChian-Chih HsiaoHsien-Tang HuTing-Chung Liu
    • Sweehan J. H. YangPo-Sheng ShihChian-Chih HsiaoHsien-Tang HuTing-Chung Liu
    • H01L33/16H01L33/46
    • G02F1/133555G02F2203/09H01L27/124
    • A method for manufacturing a transflective liquid crystal display panel includes providing an array substrate having a plurality of pixel regions, each of the pixel regions includes a device region, a transmission region and a reflection region defined therein; forming a first metal layer on the array substrate; patterning the first metal layer to simultaneously form a gate electrode in the device region and a plurality of metal bumps in the reflection region; forming a first insulating layer having a rough surface and covering the gate electrode and the metal bumps on the array substrate; forming a patterned semiconductor layer on the gate electrode; forming a reflective layer covering the first insulating layer and having a rough surface in the reflection region; and sequentially forming a patterned second insulating layer and a transparent pixel electrode on the array substrate.
    • 一种半透射反射型液晶显示面板的制造方法,其特征在于,具备具有多个像素区域的阵列基板,每个所述像素区域包括器件区域,透射区域和限定在其中的反射区域; 在阵列基板上形成第一金属层; 图案化第一金属层以在器件区域中同时形成栅电极和反射区域中的多个金属凸块; 形成具有粗糙表面并覆盖阵列基板上的栅电极和金属凸块的第一绝缘层; 在所述栅电极上形成图案化的半导体层; 形成覆盖所述第一绝缘层并且在所述反射区域中具有粗糙表面的反射层; 并且在阵列基板上依次形成图案化的第二绝缘层和透明像素电极。
    • 4. 发明授权
    • Image TFT array of a direct X-ray image sensor and method of fabricating the same
    • 直接X射线图像传感器的图像TFT阵列及其制造方法
    • US07791080B2
    • 2010-09-07
    • US12251430
    • 2008-10-14
    • Chian-Chih HsiaoChih-Chieh Lan
    • Chian-Chih HsiaoChih-Chieh Lan
    • H01L29/04
    • H01L27/14663H01L27/14603H01L27/14609H01L27/14676H01L27/14692
    • A method of fabricating an image TFT array of a direct X-ray image sensor includes forming a first transparent conductive layer on a substrate; forming a gate line including a gate electrode, a common line, and a common electrode jutting out from the common line; forming an insulation layer; forming a semiconducting island on the insulation layer in the transistor region; forming a first via hole for the common electrode; forming a data line and a source electrode and a drain electrode; forming a passivation layer and a second via hole penetrating the passivation layer for the source electrode; forming a second transparent conductive layer as a top electrode. The insulation layer is formed on the first transparent conductive layer to serve as a dielectric layer of a capacitor before the TFT structure formed and can be formed at a relatively high temperature.
    • 制造直接X射线图像传感器的图像TFT阵列的方法包括:在基板上形成第一透明导电层; 形成包括从公共线突出的栅电极,公共线和公共电极的栅极线; 形成绝缘层; 在所述晶体管区域中的所述绝缘层上形成半导体岛; 形成用于所述公共电极的第一通孔; 形成数据线和源极和漏电极; 形成钝化层和穿过源电极的钝化层的第二通孔; 形成第二透明导电层作为顶部电极。 绝缘层形成在第一透明导电层上,以在TFT结构形成之前用作电容器的电介质层,并且可以在较高温度下形成。
    • 6. 发明授权
    • Structure and manufacturing method of an image TFT array
    • 图像TFT阵列的结构和制造方法
    • US07439544B2
    • 2008-10-21
    • US10907998
    • 2005-04-25
    • Chin-Mao LinKei-Hsiung YangChian-Chih Hsiao
    • Chin-Mao LinKei-Hsiung YangChian-Chih Hsiao
    • H01L27/14
    • H01L27/14692H01L27/1255H01L27/1288H01L27/14658
    • The present invention provides a manufacturing method of an image TFT array, which includes providing a substrate including a thin film transistor region, a storage capacitor region, a pad region, and a common electrode region, forming a photoresist layer on the substrate, and performing a photolithographic and etching process by utilizing a half-tone mask to pattern the photoresist layer to define a position of a through hole on the storage capacitor region and form the photoresist layer of a first thickness on the thin film transistor region and the photoresist layer of a second thickness on the region between the thin film transistor region and the storage capacitor region, wherein the first thickness is greater than the second thickness.
    • 本发明提供了一种图像TFT阵列的制造方法,其包括提供包括薄膜晶体管区域,保持电容器区域,焊盘区域和公共电极区域的衬底,在衬底上形成光致抗蚀剂层,并且执行 通过利用半色调掩模来对光致抗蚀剂层进行图案化以定义存储电容器区域上的通孔的位置并在薄膜晶体管区域和光致抗蚀剂层上形成第一厚度的光致抗蚀剂层的光刻和蚀刻工艺 在薄膜晶体管区域和存储电容器区域之间的区域上的第二厚度,其中第一厚度大于第二厚度。
    • 8. 发明申请
    • Image TFT array of a direct X-ray image sensor and method of fabricating the same
    • 直接X射线图像传感器的图像TFT阵列及其制造方法
    • US20090032892A1
    • 2009-02-05
    • US12251430
    • 2008-10-14
    • Chian-Chih HsiaoChih-Chieh Lan
    • Chian-Chih HsiaoChih-Chieh Lan
    • H01L27/14
    • H01L27/14663H01L27/14603H01L27/14609H01L27/14676H01L27/14692
    • A method of fabricating an image TFT array of a direct X-ray image sensor includes forming a first transparent conductive layer on a substrate; forming a gate line including a gate electrode, a common line, and a common electrode jutting out from the common line; forming an insulation layer; forming a semiconducting island on the insulation layer in the transistor region; forming a first via hole for the common electrode; forming a data line and a source electrode and a drain electrode; forming a passivation layer and a second via hole penetrating the passivation layer for the source electrode; forming a second transparent conductive layer as a top electrode. The insulation layer is formed on the first transparent conductive layer to serve as a dielectric layer of a capacitor before the TFT structure formed and can be formed at a relatively high temperature.
    • 制造直接X射线图像传感器的图像TFT阵列的方法包括:在基板上形成第一透明导电层; 形成包括从公共线突出的栅电极,公共线和公共电极的栅极线; 形成绝缘层; 在晶体管区域的绝缘层上形成半导体岛; 形成用于所述公共电极的第一通孔; 形成数据线和源极和漏电极; 形成钝化层和穿过源电极的钝化层的第二通孔; 形成第二透明导电层作为顶部电极。 绝缘层形成在第一透明导电层上,以在TFT结构形成之前用作电容器的电介质层,并且可以在较高温度下形成。
    • 9. 发明授权
    • Image TFT array of a direct X-ray image sensor and method of fabricating the same
    • 直接X射线图像传感器的图像TFT阵列及其制造方法
    • US07452782B2
    • 2008-11-18
    • US11164402
    • 2005-11-21
    • Chian-Chih HsiaoChih-Chieh Lan
    • Chian-Chih HsiaoChih-Chieh Lan
    • H01L21/20
    • H01L27/14663H01L27/14603H01L27/14609H01L27/14676H01L27/14692
    • A method of fabricating an image TFT array of a direct X-ray image sensor includes forming a first transparent conductive layer on a substrate; forming a gate line including a gate electrode, a common line, and a common electrode jutting out from the common line; forming an insulation layer; forming a semiconducting island on the insulation layer in the transistor region; forming a first via hole for the common electrode; forming a data line and a source electrode and a drain electrode; forming a passivation layer and a second via hole penetrating the passivation layer for the source electrode; forming a second transparent conductive layer as a top electrode. The insulation layer is formed on the first transparent conductive layer to serve as a dielectric layer of a capacitor before the TFT structure formed and can be formed at a relatively high temperature.
    • 制造直接X射线图像传感器的图像TFT阵列的方法包括:在基板上形成第一透明导电层; 形成包括从公共线突出的栅电极,公共线和公共电极的栅极线; 形成绝缘层; 在晶体管区域的绝缘层上形成半导体岛; 形成用于所述公共电极的第一通孔; 形成数据线和源极和漏电极; 形成钝化层和穿过源电极的钝化层的第二通孔; 形成第二透明导电层作为顶部电极。 绝缘层形成在第一透明导电层上,以在TFT结构形成之前用作电容器的电介质层,并且可以在较高温度下形成。
    • 10. 发明申请
    • Image TFT array of a direct X-ray image sensor and method of fabricating the same
    • 直接X射线图像传感器的图像TFT阵列及其制造方法
    • US20070114625A1
    • 2007-05-24
    • US11164402
    • 2005-11-21
    • Chian-Chih HsiaoChih-Chieh Lan
    • Chian-Chih HsiaoChih-Chieh Lan
    • H01L27/14
    • H01L27/14663H01L27/14603H01L27/14609H01L27/14676H01L27/14692
    • A method of fabricating an image TFT array of a direct X-ray image sensor includes forming a first transparent conductive layer on a substrate; forming a gate line including a gate electrode, a common line, and a common electrode jutting out from the common line; forming an insulation layer; forming a semiconducting island on the insulation layer in the transistor region; forming a first via hole for the common electrode; forming a data line and a source electrode and a drain electrode; forming a passivation layer and a second via hole penetrating the passivation layer for the source electrode; forming a second transparent conductive layer as a top electrode. The insulation layer is formed on the first transparent conductive layer to serve as a dielectric layer of a capacitor before the TFT structure formed and can be formed at a relatively high temperature.
    • 制造直接X射线图像传感器的图像TFT阵列的方法包括:在基板上形成第一透明导电层; 形成包括从公共线突出的栅电极,公共线和公共电极的栅极线; 形成绝缘层; 在晶体管区域的绝缘层上形成半导体岛; 形成用于所述公共电极的第一通孔; 形成数据线和源极和漏电极; 形成钝化层和穿过源电极的钝化层的第二通孔; 形成第二透明导电层作为顶部电极。 绝缘层形成在第一透明导电层上,以在TFT结构形成之前用作电容器的电介质层,并且可以在较高温度下形成。