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1. 发明授权

US5751469A Method and apparatus for an improved micromechanical modulator 失效
公开(公告)号：US5751469A
公开(公告)日：1998-05-12
申请号：US565453
申请日：1996-02-01
申请人： Susanne C. Arney , Dennis Stanley Greywall , James A. Walker , Bernard Yurke
发明人： Susanne C. Arney , Dennis Stanley Greywall , James A. Walker , Bernard Yurke
IPC分类号： G02B26/00 , G02B26/02 , H03C7/02
CPC分类号： G02B26/02 , G02B26/001
摘要： An improved modulator and methods for making the modulator are disclosed. A membrane, preferably circular in shape, is formed over a region of a substrate in such a way that a gap results between the membrane and substrate forming a modulator cavity. The membrane forms a continuous surface over the cavity. In particular, the membrane is not supported by discrete support arms, but rather extends beyond the modulator cavity. Preferably, holes are formed in the membrane to aid in damping its motion and to allow access to underlying layers during modulator formation. According to the method, the modulator is formed by forming a means for creating a gap between the substrate and the membrane, forming a membrane, forming a lateral conduit to aid in removing the means for creating the gap and, finally, by removing the means for creating the gap.

2. 发明授权

US06483619B1 Optical-interference microphone 有权
标题翻译：光干扰话筒
公开(公告)号：US06483619B1
公开(公告)日：2002-11-19
申请号：US09133028
申请日：1998-08-12
申请人： Dennis Stanley Greywall
发明人： Dennis Stanley Greywall
IPC分类号： H04B1000
CPC分类号： H04R23/008
摘要： An optical-interference microphone having a high sensitivity and bandwidth, and that is suitable to be manufactured by micromachining techniques. The microphone includes a back member, a diaphragm and an air gap formed between the back member and diaphragm. Further, the diaphragm includes a plurality of holes. The microphone utilizes optical interference to sense the sound-induced motion of the diaphragm. A light source and detector can be included as components of the microphone or can be at a remote location and connected to the microphone with an optical fiber.
摘要翻译：具有高灵敏度和带宽的光学干涉麦克风，并且适合于通过微加工技术制造。麦克风包括后部构件，隔膜和形成在后部构件和隔膜之间的气隙。此外，隔膜包括多个孔。麦克风利用光学干涉来感测隔膜的声音引起的运动。光源和检测器可以被包括在麦克风的组件中，或者可以在远程位置并且用光纤连接到麦克风。

3. 发明授权

US06351329B1 Optical attenuator 有权
标题翻译：光衰减器
公开(公告)号：US06351329B1
公开(公告)日：2002-02-26
申请号：US09415281
申请日：1999-10-08
申请人： Dennis Stanley Greywall
发明人： Dennis Stanley Greywall
IPC分类号： G02B2600
CPC分类号： G02B26/0825 , G02B6/266 , G02B6/3516 , G02B6/3518 , G02B6/352 , G02B6/357 , G02B6/3594 , G02B26/001
摘要： An optical attenuator having a structure in which a membrane covers a cavity formed on a substrate is disclosed. The membrane covering the cavity formed in the substrate is movable relative to the bottom surface of the cavity constituting a deformable mirror. Movement of the membrane relative to the bottom surface of the cavity attenuates optical signals impinging on the surface thereof. The movement of the membrane relative to the bottom surface of the cavity attenuates impinging optical signals by controlling the angle at which such impinging optical signals are reflected from the membrane surface.
摘要翻译：公开了具有膜覆盖形成在基板上的空腔的结构的光衰减器。覆盖形成在基板中的空腔的膜可相对于构成可变形反射镜的空腔的底面移动。膜相对于腔的底表面的运动衰减了照射在其表面上的光信号。膜相对于腔的底表面的运动通过控制这种入射光信号从膜表面反射的角度来衰减入射光信号。

4. 发明授权

US06201631B1 Process for fabricating an optical mirror array 有权
标题翻译：制造光学镜阵列的方法
公开(公告)号：US06201631B1
公开(公告)日：2001-03-13
申请号：US09559216
申请日：2000-04-26
申请人： Dennis Stanley Greywall
发明人： Dennis Stanley Greywall
IPC分类号： G02F103
CPC分类号： G02B26/0841 , Y10S359/904
摘要： An electro-optic device which includes a mirror array attached to a base substrate is disclosed. The mirror array comprises a substrate having a plurality of spaced-apart mirrors with underlying cavities (each having a diameter at least about the same size as that of the overlying mirror) formed therein. The base substrate includes a plurality of electrodes as well as a plurality of electrical interconnections. The mirror array is attached to the base substrate so that each mirror of the array as well as a cavity are supported above a set of electrodes. Each mirror of the mirror array rotates relative to the major plane of the substrate in response to an electrical signal. The application of an electrical potential to each mirror relative to at least one electrode of the set of electrodes causes the desired rotation (depending on the magnitude of the electrical potential) up to an angle of about 20 degrees.
摘要翻译：公开了一种包括附接到基底基板的反射镜阵列的电光装置。反射镜阵列包括具有多个间隔开的反射镜的基板，该反射镜具有在其中形成的下面的空腔（每个具有至少大致与上覆镜的尺寸相同的直径）。基底基板包括多个电极以及多个电互连。反射镜阵列附接到基底基板，使得阵列的每个反射镜以及空腔被支撑在一组电极上。反射镜阵列的每个反射镜响应于电信号相对于基板的主平面旋转。相对于该组电极中的至少一个电极向每个反射镜施加电势导致高达大约20度的角度的所需旋转（取决于电位的大小）。

5. 发明授权

US06356689B1 Article comprising an optical cavity 有权
标题翻译：文章包括光学腔
公开(公告)号：US06356689B1
公开(公告)日：2002-03-12
申请号：US09536344
申请日：2000-03-25
申请人： Dennis Stanley Greywall
发明人： Dennis Stanley Greywall
IPC分类号： G02B626
CPC分类号： G01J3/26 , G02B26/001 , G02B26/02
摘要： An article comprising an optical cavity includes two mirrors, at least one of which is advantageously movable, that are spaced from and parallel to one another. In some embodiments, both mirrors are formed from unstressed single crystal silicon. The single crystal silicon used in some embodiments is advantageously sourced from single crystal silicon-on-insulator (“SOI”) wafers. In a method in accordance with the present invention, a first mirror is patterned in the thin silicon layer of a first SOI wafer. A standoff is disposed on the thin silicon layer near the first mirror. The thin silicon layer of a second SOI wafer is attached to the standoff such that there is a gap between the two, spaced, thin silicon layers. The thin silicon layer of the second SOI wafer is released forming a movable mirror by removing the thick layer of silicon and the buried oxide from that wafer.
摘要翻译：包括光学腔的物品包括两个反射镜，其中至少一个有利地是可移动的，它们彼此间隔开并且彼此平行。在一些实施例中，两个反射镜由无应力单晶硅形成。在一些实施例中使用的单晶硅有利地来自单晶硅绝缘体（“SOI”）晶片。在根据本发明的方法中，在第一SOI晶片的薄硅层中构图第一反射镜。在第一反射镜附近的薄硅层上设置间隔。第二SOI晶片的薄硅层附接到支座，使得在两个间隔开的薄硅层之间存在间隙。通过从该晶片去除厚的硅层和埋入的氧化物，第二SOI晶片的薄硅层被释放形成可移动反射镜。

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