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1. 发明授权

US08303719B2 Deposit removing method and substrate processing method 有权
标题翻译：沉积物去除方法和基板处理方法
公开(公告)号：US08303719B2
公开(公告)日：2012-11-06
申请号：US12389057
申请日：2009-02-19
申请人： Sungtae Lee , Yusuke Nakagawa , Jun Yashiro
发明人： Sungtae Lee , Yusuke Nakagawa , Jun Yashiro
IPC分类号： B08B9/08 , B08B5/00
CPC分类号： H01L21/67069
摘要： A deposit removing method that can reliably remove deposit produced in plasma processing using plasma produced from a process gas containing methane gas and oxygen gas. In a chamber in which an electrode to which radio frequency electrical power is supplied is disposed, plasma processing is carried out on a substrate using the plasma produced from the process gas containing methane gas and oxygen gas, and then a cleaning step is carried out in which plasma is produced from a mixed gas containing fluorinated compound gas containing hydrogen in the chamber.
摘要翻译：一种沉积物去除方法，其可以可靠地消除使用由含有甲烷气体和氧气的工艺气体产生的等离子体处理中产生的沉积物。在其中设置提供射频电力的电极的室中，使用由含有甲烷气体和氧气的处理气体产生的等离子体在基板上进行等离子体处理，然后进行清洁步骤该等离子体是由室内含有氢的含氟化合物气体的混合气体产生的。

2. 发明申请

US20090205678A1 DEPOSIT REMOVING METHOD AND SUBSTRATE PROCESSING METHOD 有权
标题翻译：沉积物去除方法和基板处理方法
公开(公告)号：US20090205678A1
公开(公告)日：2009-08-20
申请号：US12389057
申请日：2009-02-19
申请人： Sungtae LEE , Yusuke Nakagawa , Jun Yashiro
发明人： Sungtae LEE , Yusuke Nakagawa , Jun Yashiro
IPC分类号： B08B6/00
CPC分类号： H01L21/67069
摘要： A deposit removing method that can reliably remove deposit produced in plasma processing using plasma produced from a process gas containing methane gas and oxygen gas. In a chamber in which an electrode to which radio frequency electrical power is supplied is disposed, plasma processing is carried out on a substrate using the plasma produced from the process gas containing methane gas and oxygen gas, and then a cleaning step is carried out in which plasma is produced from a mixed gas containing fluorinated compound gas containing hydrogen in the chamber.
摘要翻译：一种沉积物去除方法，其可以可靠地消除使用由含有甲烷气体和氧气的工艺气体产生的等离子体处理中产生的沉积物。在其中设置提供射频电力的电极的室中，使用由含有甲烷气体和氧气的处理气体产生的等离子体在基板上进行等离子体处理，然后进行清洁步骤该等离子体是由室内含有氢的含氟化合物气体的混合气体产生的。

3. 发明申请

US20090294259A1 ELECTRIC OPERATING DEVICE OF VEHICLE SEAT 失效
标题翻译：汽车座椅电动操作装置
公开(公告)号：US20090294259A1
公开(公告)日：2009-12-03
申请号：US12515066
申请日：2007-10-12
申请人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
发明人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
IPC分类号： H01H9/00
CPC分类号： B60N2/0228 , H01H25/041 , H01H2025/043 , H01H2300/008
摘要： An electric operating device includes an operation member for operating to activate a plurality of electric functions provided at a vehicle seat. An operating structure for switching a pivoting position of the operation member is configured as a switching structure for selecting the electric function that is an operational object. Further, an operating structure for switching a slide position in a diametrical direction of the operation member is configured as an operation control structure by which the electric function selected as the operational object is operated to activate. Further, a pushing operation structure of the operation portion is configured as a switching structure for switching a category of an electric function group. The pushing operating structure of the operation member is provided with a return mechanism for returning the operation member operated to be pushed to an initial position taken before the pushing operation by urging the operation member.
摘要翻译：电动操作装置包括用于操作以激活设置在车辆座椅处的多个电功能的操作构件。用于切换操作构件的枢转位置的操作结构被配置为用于选择作为操作对象的电功能的切换结构。此外，用于切换操作构件的直径方向上的滑动位置的操作结构被配置为操作控制结构，通过该操作控制结构操作被选择作为操作对象的电功能以被激活。此外，操作部的按压操作结构被配置为用于切换电功能组的类别的开关结构。操作构件的按压操作结构设置有用于使被操作的操作构件通过推动操作构件而返回到在推动操作之前所采取的初始位置的返回机构。

4. 发明授权

US08367949B2 Electric operating device of vehicle seat 失效
标题翻译：汽车座椅电动操作装置
公开(公告)号：US08367949B2
公开(公告)日：2013-02-05
申请号：US12515060
申请日：2007-10-12
申请人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
发明人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
IPC分类号： H01H9/26 , H01H13/72 , H01H13/76
CPC分类号： B60N2/0228 , H01H25/041 , H01H2025/043 , H01H2300/008
摘要： An electric operating device includes an operation member for operating to activate a plurality of electric functions provided at a vehicle seat. The operation member is disposed at a position outside of the vehicle seat allowing operation by a seated person seated on the vehicle seat. The operation member is constructed to be capable of operating to pivot about an axis and operating to move to slide in a diametrical direction. Further, an operation structure for pivoting about the axis for switching a pivoting position of the operation member is configured as an electric function mode switching structure for selecting the electric function as an operational object from the plurality of electric functions. Further, a slide moving operating structure for switching a slide position in the diametrical direction of the operation member is configured as an activation control structure for operating to activate the electric function selected as the operational object.
摘要翻译：电动操作装置包括用于操作以激活设置在车辆座椅处的多个电功能的操作构件。操作构件设置在车辆座椅外侧的位置，允许坐在车辆座椅上的就座者进行操作。操作构件被构造成能够操作以围绕轴线枢转并且操作以沿直径方向移动以滑动。此外，用于围绕用于切换操作构件的枢转位置的轴线枢转的操作结构被配置为用于从多个电功能中选择作为操作对象的电气功能的电功能模式切换结构。此外，用于切换操作构件的直径方向上的滑动位置的滑动移动操作结构被配置为用于操作以激活被选择为操作对象的电功能的启动控制结构。

5. 发明申请

US20100044202A1 ELECTRIC OPERATING DEVICE OF VEHICLE SEAT 失效
标题翻译：汽车座椅电动操作装置
公开(公告)号：US20100044202A1
公开(公告)日：2010-02-25
申请号：US12515060
申请日：2007-10-12
申请人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
发明人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
IPC分类号： H01H3/02
CPC分类号： B60N2/0228 , H01H25/041 , H01H2025/043 , H01H2300/008
摘要： An electric operating device includes an operation member for operating to activate a plurality of electric functions provided at a vehicle seat. The operation member is disposed at a position outside of the vehicle seat allowing operation by a seated person seated on the vehicle seat. The operation member is constructed to be capable of operating to pivot about an axis and operating to move to slide in a diametrical direction. Further, an operation structure for pivoting about the axis for switching a pivoting position of the operation member is configured as an electric function mode switching structure for selecting the electric function as an operational object from the plurality of electric functions. Further, a slide moving operating structure for switching a slide position in the diametrical direction of the operation member is configured as an activation control structure for operating to activate the electric function selected as the operational object.
摘要翻译：电动操作装置包括用于操作以激活设置在车辆座椅处的多个电功能的操作构件。操作构件设置在车辆座椅外侧的位置，允许坐在车辆座椅上的就座者进行操作。操作构件被构造成能够操作以围绕轴线枢转并且操作以沿直径方向移动以滑动。此外，用于围绕用于切换操作构件的枢转位置的轴线枢转的操作结构被配置为用于从多个电功能中选择作为操作对象的电气功能的电功能模式切换结构。此外，用于切换操作构件的直径方向上的滑动位置的滑动移动操作结构被配置为用于操作以激活被选择为操作对象的电功能的启动控制结构。

6. 发明授权

US08410379B2 Electric operating device of vehicle seat 失效
标题翻译：汽车座椅电动操作装置
公开(公告)号：US08410379B2
公开(公告)日：2013-04-02
申请号：US12515066
申请日：2007-10-12
申请人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
发明人： Satoru Kuno , Toshihide Azuma , Hisato Shimomura , Jun Yashiro , Yukio Kanzaki
IPC分类号： H01H9/00
CPC分类号： B60N2/0228 , H01H25/041 , H01H2025/043 , H01H2300/008
摘要： An electric operating device includes an operation member for operating to activate a plurality of electric functions provided at a vehicle seat. An operating structure for switching a pivoting position of the operation member is configured as a switching structure for selecting the electric function that is an operational object. Further, an operating structure for switching a slide position in a diametrical direction of the operation member is configured as an operation control structure by which the electric function selected as the operational object is operated to activate. Further, a pushing operation structure of the operation portion is configured as a switching structure for switching a category of an electric function group. The pushing operating structure of the operation member is provided with a return mechanism for returning the operation member operated to be pushed to an initial position taken before the pushing operation by urging the operation member.
摘要翻译：电动操作装置包括用于操作以激活设置在车辆座椅处的多个电功能的操作构件。用于切换操作构件的枢转位置的操作结构被配置为用于选择作为操作对象的电功能的切换结构。此外，用于切换操作构件的直径方向上的滑动位置的操作结构被配置为操作控制结构，通过该操作控制结构操作被选择作为操作对象的电功能以被激活。此外，操作部的按压操作结构被配置为用于切换电功能组的类别的开关结构。操作构件的按压操作结构设置有用于使被操作的操作构件通过推动操作构件而返回到在推动操作之前所采取的初始位置的返回机构。

7. 发明申请

US20070284337A1 Etching method, plasma processing system and storage medium 有权
标题翻译：蚀刻方法，等离子体处理系统和存储介质
公开(公告)号：US20070284337A1
公开(公告)日：2007-12-13
申请号：US11730197
申请日：2007-03-29
申请人： Ryou Mochizuki , Jun Yashiro
发明人： Ryou Mochizuki , Jun Yashiro
IPC分类号： C23F1/00 , B44C1/22
CPC分类号： H01L21/31144 , H01J37/3244 , H01J2237/334 , H01L21/0337 , H01L21/0338 , H01L21/31116 , H01L21/31122 , H01L21/31138 , H01L21/76816 , Y10S438/947
摘要： Disclosed is a method of etching a substrate having a layered structure in which a photoresist mask with a pattern, a coating film made of silicon oxide, and an organic film are laminated in that order from the top. Before etching the coating film of silicon oxide, a deposit is deposited on the photoresist mask by using plasma generated from a hydrocarbon gas such as CH4 gas so as to narrow the size of openings in the pattern of the photoresist mask. The pattern of the photoresist mask is well transferred to the organic film through the coating film, and a pattern with openings having a high aspect ratio can be formed in the organic film and toppling of the pattern in the organic film can be prevented. The organic film with the transferred pattern is used as an etch mask for etching the underlying layer.
摘要翻译：公开了一种蚀刻具有层叠结构的基板的方法，其中具有图案的光致抗蚀剂掩模，由氧化硅制成的涂层和有机膜从顶部依次层压。在蚀刻氧化硅的涂膜之前，通过使用由诸如CH 4气体的烃气体产生的等离子体，在光致抗蚀剂掩模上沉积沉积物，以便缩小其中的开口尺寸光刻胶掩模光致抗蚀剂掩模的图案通过涂膜良好地转移到有机膜，并且可以在有机膜中形成具有高纵横比的开口的图案，并且可以防止有机膜中的图案的倒角。将具有转印图案的有机膜用作用于蚀刻下层的蚀刻掩模。

8. 发明授权

US5494522A Plasma process system and method 失效
标题翻译：等离子体工艺系统和方法
公开(公告)号：US5494522A
公开(公告)日：1996-02-27
申请号：US214282
申请日：1994-03-17
申请人： Shuji Moriya , Masahiro Ogasawara , Jun Yashiro , Yoshifumi Tahara , Satoru Kawakami , Susumu Tanaka
发明人： Shuji Moriya , Masahiro Ogasawara , Jun Yashiro , Yoshifumi Tahara , Satoru Kawakami , Susumu Tanaka
IPC分类号： C23C16/44 , C23C16/455 , C23C16/458 , C23C16/505 , H01J37/32 , C23C16/00
CPC分类号： C23C16/45568 , C23C16/4401 , C23C16/4586 , C23C16/505 , H01J37/32082 , H01J37/3244 , H01J37/32706 , H01J2237/022 , H01J2237/184
摘要： A plasma process system for producing gas plasma in an air-tight chamber by high frequency power to process a substrate with the gas plasma comprising a lower electrode on which the substrate to be plasma-processed is mounted, an upper electrode arranged above the lower electrode, a plasma generator circuit for generating plasma between the upper and the lower electrode, a power source for supplying high frequency power to the plasma generator circuit, and bias generator for generating negative voltage in the upper or lower electrode when high frequency power is supplied from the power source to the upper or lower electrode, wherein the plasma generator circuit includes transformer for supplying a part of high frequency power, which is supplied from the power source, to the bias generator.
摘要翻译：一种用于通过高频功率在气密室中产生气体等离子体的等离子体处理系统，其中包括安装有待等离子体处理的衬底的下电极的气体等离子体处理衬底;布置在下电极上方的上电极用于在上下电极之间产生等离子体的等离子体发生器电路，用于向等离子体发生器电路提供高频电力的电源，以及当从高电源供应高频电力时在上电极或下电极产生负电压的偏置发生器电源到上电极或下电极，其中等离子体发生器电路包括用于将从电源提供的一部分高频电力提供给偏置发生器的变压器。

9. 发明授权

US08177990B2 Etching method, plasma processing system and storage medium 有权
标题翻译：蚀刻方法，等离子体处理系统和存储介质
公开(公告)号：US08177990B2
公开(公告)日：2012-05-15
申请号：US11730197
申请日：2007-03-29
申请人： Ryou Mochizuki , Jun Yashiro
发明人： Ryou Mochizuki , Jun Yashiro
IPC分类号： H01L21/302
CPC分类号： H01L21/31144 , H01J37/3244 , H01J2237/334 , H01L21/0337 , H01L21/0338 , H01L21/31116 , H01L21/31122 , H01L21/31138 , H01L21/76816 , Y10S438/947
摘要： Disclosed is a method of etching a substrate having a layered structure in which a photoresist mask with a pattern, a coating film made of silicon oxide, and an organic film are laminated in that order from the top. Before etching the coating film of silicon oxide, a deposit is deposited on the photoresist mask by using plasma generated from a hydrocarbon gas such as CH4 gas so as to narrow the size of openings in the pattern of the photoresist mask. The pattern of the photoresist mask is well transferred to the organic film through the coating film, and a pattern with openings having a high aspect ratio can be formed in the organic film and toppling of the pattern in the organic film can be prevented. The organic film with the transferred pattern is used as an etch mask for etching the underlying layer.
摘要翻译：公开了一种蚀刻具有层叠结构的基板的方法，其中具有图案的光致抗蚀剂掩模，由氧化硅制成的涂层和有机膜从顶部依次层压。在蚀刻氧化硅的涂膜之前，通过使用由诸如CH 4气体的烃气体产生的等离子体在光致抗蚀剂掩模上沉积沉积物，以便缩小光致抗蚀剂掩模图案中的开口尺寸。光致抗蚀剂掩模的图案通过涂膜良好地转移到有机膜，并且可以在有机膜中形成具有高纵横比的开口的图案，并且可以防止有机膜中的图案的倒角。将具有转印图案的有机膜用作用于蚀刻下层的蚀刻掩模。

10. 发明授权

US06441325B2 Multidirectional input device 失效
标题翻译：多向输入设备
公开(公告)号：US06441325B2
公开(公告)日：2002-08-27
申请号：US09800617
申请日：2001-03-07
申请人： Kisaburo Takahashi , Jun Yashiro
发明人： Kisaburo Takahashi , Jun Yashiro
IPC分类号： H01H1920
CPC分类号： G06F3/0362 , H01H25/008 , H01H25/06 , H01H2019/146
摘要： A multidirectional input device is disclosed wherein one rotary electric part and two first and second push-switches are operated by one operating member. In comparison with the prior art, a larger number of electric parts can be operated and thus the multidirectional input device is suitable for use in a portable electronic device for which various functions are required.
摘要翻译：公开了一种多向输入装置，其中一个旋转电气部件和两个第一和第二按压开关由一个操作部件操作。与现有技术相比，可以操作更多的电气部件，因此多向输入装置适用于需要各种功能的便携式电子装置。

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