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1. 发明授权

US11990362B2 Composite sintered body, electrostatic chuck member, electrostatic chuck device, and method for manufacturing composite sintered body 有权
公开(公告)号：US11990362B2
公开(公告)日：2024-05-21
申请号：US17612173
申请日：2020-05-21
申请人： SUMITOMO OSAKA CEMENT CO., LTD.
发明人： Nobuhiro Hidaka , Megumi Ootomo , Jun Arikawa
IPC分类号： H01L21/68 , C04B35/505 , C04B35/565 , C04B35/645 , H01J37/32 , H01L21/683 , H01L21/687
CPC分类号： H01L21/6833 , C04B35/505 , C04B35/565 , C04B35/645 , H01J37/32724 , H01L21/68757 , C04B2235/549 , H01J2237/334
摘要： A composite sintered body including: a metal oxide as a main phase; silicon carbide as a sub-phase; and silicate of a metal element that is included in the metal oxide, in which the average aggregation diameter of the silicate in the field of view of 600 μm2 at a magnification of 1000 times is 5 μm or lower.

2. 发明授权

US10703677B2 SiC sintered body, heater and method for producing SiC sintered body 有权
公开(公告)号：US10703677B2
公开(公告)日：2020-07-07
申请号：US16494852
申请日：2018-07-11
申请人： SUMITOMO OSAKA CEMENT CO., LTD.
发明人： Megumi Ootomo , Hiroaki Nagatomo , Kentaro Takahashi
IPC分类号： C04B35/565 , C04B35/575 , H05B3/14 , C04B35/584
摘要： Provided is a SiC sintered body which contains nitrogen atoms, wherein a ratio Rmax/Rave of a maximum volume resistivity Rmax of the sintered body to an average volume resistivity Rave of the sintered body is 1.5 or lower; a ratio Rmin/Rave of a minimum volume resistivity Rmin of the sintered body to the average volume resistivity Rave is 0.7 or higher; and a relative density of the sintered body is 98% or higher.

3. 发明授权

US10189745B2 Corrosion-resistant member and electrostatic chuck device 有权
公开(公告)号：US10189745B2
公开(公告)日：2019-01-29
申请号：US15027339
申请日：2014-10-15
申请人： Sumitomo Osaka Cement Co., Ltd.
发明人： Kentaro Takahashi , Yoshiaki Moriya , Megumi Ootomo
IPC分类号： C04B35/44 , H01L21/683 , C04B35/645 , H02N13/00 , H05K7/20 , H01L21/687 , C04B35/626
摘要： Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10−10 m or more.

4. 发明授权

US10147629B2 Electrostatic chuck device 有权
公开(公告)号：US10147629B2
公开(公告)日：2018-12-04
申请号：US15027026
申请日：2014-10-15
申请人： Sumitomo Osaka Cement Co., Ltd.
发明人： Kentaro Takahashi , Megumi Ootomo
IPC分类号： H01L21/683 , H01L21/67 , H02N13/00
摘要： Provided is an electrostatic chuck device in which breakdown between an electrostatic chuck portion and a cooling base portion can be prevented, voltage endurance can be improved, uniformity in the in-plane temperature of a mounting surface of the electrostatic chuck portion where a plate-shaped sample is mounted can be improved, and voltage endurance of a heating member can be improved by applying a uniform voltage between the electrostatic chuck portion and the cooling base portion. An electrostatic chuck device (10) includes: an electrostatic chuck portion (11) that includes a ceramic plate-shaped body and an internal electrode 18 for electrostatic adsorption; and a cooling base portion (12) that adjusts a temperature of the internal electrode (18) for electrostatic adsorption, in which a first insulating member (20) is adhered to a second main surface of the ceramic plate-shaped body through a first adhesive (19) so as to cover a periphery of the internal electrode for electrostatic adsorption (18), a second insulating member (14) is adhered to a top surface of the cooling base portion (12) through a second adhesive (13), a heating member (15) is provided on a top surface of the second insulating member (14), and the electrostatic chuck portion (11) and the cooling base portion (12) are adhered to each other and integrated through an organic adhesive layer (16).

5. 发明申请

US20150340121A1 DIELECTRIC MATERIAL 有权
标题翻译：电介质材料
公开(公告)号：US20150340121A1
公开(公告)日：2015-11-26
申请号：US14760160
申请日：2014-01-14
申请人： SUMITOMO OSAKA CEMENT CO., LTD.
发明人： Megumi Ootomo , Yoshiki Yoshioka
IPC分类号： H01B3/12 , C04B35/505 , C04B35/584 , C04B35/10
CPC分类号： H01B3/12 , C04B35/10 , C04B35/117 , C04B35/505 , C04B35/584 , C04B35/587 , C04B35/593 , C04B35/62655 , C04B35/645 , C04B2235/3225 , C04B2235/3826 , C04B2235/5445 , C04B2235/5454 , C04B2235/5472 , C04B2235/6586 , C04B2235/80 , H01B3/004
摘要： A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 μm or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 μm or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.
摘要翻译：提供一种电介质材料，其能够在使用之前或在使用时检测绝缘击穿的迹象，并且因此能够预先预测绝缘击穿。这种介电材料由导电粒子分散在绝缘材料中的复合烧结体构成，其中在导电性粒子中，体积粒径分布中累积体积百分比为10体积％的粒径D10为累积体积百分比为90体积％的粒径D90为2μm以下，与颗粒的累积体积比为90体积％的粒径D90的比（D90 / D10）为0.2μm以下具有10体积％的累积体积百分比的直径D10为3.0以上，累积体积比为90体积％的粒径D90与具有累积体积百分比的粒径D50的比（D90 / D50） 50体积％为1.4以上。

6. 发明授权

US10497599B2 Corrosion-resistant member, member for electrostatic chuck, and process for producing corrosion-resistant member 有权
公开(公告)号：US10497599B2
公开(公告)日：2019-12-03
申请号：US15513107
申请日：2015-08-25
申请人： SUMITOMO OSAKA CEMENT CO., LTD.
发明人： Megumi Ootomo , Kentaro Takahashi , Nobuhiro Hidaka , Hironori Kugimoto
IPC分类号： H01L21/683 , C04B35/44 , C04B35/645 , C04B35/626 , C04B35/638
CPC分类号： H01L21/6833 , C04B35/44 , C04B35/6263 , C04B35/62655 , C04B35/638 , C04B35/645 , C04B35/6455 , C04B2235/3217 , C04B2235/3224 , C04B2235/5445 , C04B2235/662 , C04B2235/761 , C04B2235/77 , C04B2235/96 , C04B2235/9692
摘要： Provided are a corrosion-resistant member; a member for an electrostatic chuck; and a process for producing the corrosion-resistant member. The corrosion-resistant member includes an oxide which includes samarium and aluminum and has a perovskite type structure. The member for an electrostatic chuck includes the corrosion-resistant member. The process for producing a corrosion-resistant member includes: mixing aluminum oxide powder and samarium oxide powder with a solvent to prepare a slurry including the aluminum oxide powder and the samarium oxide powder; drying the slurry to prepare a mixed powder including the aluminum powder and the samarium oxide powder, and molding the mixed powder to prepare a green body; and calcinating the green body to prepare a sintered body.

7. 发明申请

US20160251265A1 CORROSION-RESISTANT MEMBER AND ELECTROSTATIC CHUCK DEVICE 审中-公开
标题翻译：耐腐蚀成员和静电切割装置
公开(公告)号：US20160251265A1
公开(公告)日：2016-09-01
申请号：US15027339
申请日：2014-10-15
申请人： SUMITOMO OSAKA CEMENT CO., LTD.
发明人： Kentaro Takahashi , Yoshiaki Moriya , Megumi Ootomo
IPC分类号： C04B35/44 , H05K7/20 , H01L21/683 , C04B35/645 , H02N13/00
CPC分类号： C04B35/44 , C04B35/6261 , C04B35/6262 , C04B35/62655 , C04B35/62675 , C04B35/645 , C04B2235/3217 , C04B2235/3222 , C04B2235/3224 , C04B2235/3225 , C04B2235/3227 , C04B2235/5436 , C04B2235/5445 , C04B2235/761 , C04B2235/764 , C04B2235/768 , C04B2235/77 , C04B2235/9669 , C04B2235/9684 , C04B2235/9692 , H01L21/6831 , H01L21/6833 , H01L21/68757 , H02N13/00 , H05K7/2039
摘要： Provided are a corrosion-resistant member and an electrostatic chuck device using the same, in which corrosion resistance to halogen corrosive gas such as fluorine corrosive gas or chlorine corrosive gas and plasma thereof is high, dielectric constant and volume resistivity are high, and dielectric loss is low. The corrosion-resistant member is formed of a composite oxide sintered compact containing aluminum, samarium, and a rare earth metal element other than samarium, in which the rare earth metal element other than samarium has an ionic radius of 0.88×10−10 m or more.
摘要翻译：提供一种耐蚀性构件和使用其的静电吸盘装置，其中对氟腐蚀性气体或氯气腐蚀性气体及其等离子体的卤素腐蚀性气体的耐腐蚀性高，介电常数和体积电阻率高，并且介电损耗低。耐腐蚀部件由含有钐，钐以外的稀土元素的复合氧化物烧结体形成，其中钐以外的稀土金属元素的离子半径为0.88×10 -10 m，或更多。

8. 发明授权

US09378862B2 Dielectric material 有权
标题翻译：介电材料
公开(公告)号：US09378862B2
公开(公告)日：2016-06-28
申请号：US14760160
申请日：2014-01-14
申请人： Sumitomo Osaka Cement Co., Ltd.
发明人： Megumi Ootomo , Yoshiki Yoshioka
IPC分类号： C04B35/00 , H01B3/12 , C04B35/10 , C04B35/505 , C04B35/584 , H01B3/00
CPC分类号： H01B3/12 , C04B35/10 , C04B35/117 , C04B35/505 , C04B35/584 , C04B35/587 , C04B35/593 , C04B35/62655 , C04B35/645 , C04B2235/3225 , C04B2235/3826 , C04B2235/5445 , C04B2235/5454 , C04B2235/5472 , C04B2235/6586 , C04B2235/80 , H01B3/004
摘要： A dielectric material which is able to detect a sign of insulation breakdown before use or while in use, and thus is able to predict the insulation breakdown in advance is provided. Such a dielectric material is made of a composite sintered compact in which conductive particles are dispersed in an insulating material, in which in the conductive particles, a particle diameter D10 having a cumulative volume percentage of 10% by volume in a volume particle size distribution is 0.2 μm or less, a particle diameter D90 having a cumulative volume percentage of 90% by volume is 2 μm or less, a ratio (D90/D10) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D10 having a cumulative volume percentage of 10% by volume is 3.0 or more, and a ratio (D90/D50) of the particle diameter D90 having a cumulative volume percentage of 90% by volume to the particle diameter D50 having a cumulative volume percentage of 50% by volume is 1.4 or more.
摘要翻译：提供一种电介质材料，其能够在使用之前或在使用时检测绝缘击穿的迹象，并且因此能够预先预测绝缘击穿。这种介电材料由导电粒子分散在绝缘材料中的复合烧结体构成，其中在导电性粒子中，体积粒径分布中累积体积百分比为10体积％的粒径D10为累积体积百分比为90体积％的粒径D90为2μm以下，与颗粒的累积体积比为90体积％的粒径D90的比（D90 / D10）为0.2μm以下具有10体积％的累积体积百分比的直径D10为3.0以上，累积体积比为90体积％的粒径D90与具有累积体积百分比的粒径D50的比（D90 / D50） 50体积％为1.4以上。

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