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1. 发明授权

US07665951B2 Multiple slot load lock chamber and method of operation 有权
标题翻译：多槽加载锁定室和操作方法
公开(公告)号：US07665951B2
公开(公告)日：2010-02-23
申请号：US11421793
申请日：2006-06-02
申请人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
发明人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
IPC分类号： B65G49/07
CPC分类号： H01L21/67201 , C23C14/566 , H01L21/67109 , H01L21/67126 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67742 , H01L21/67751 , Y10S414/139
摘要： Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.
摘要翻译：本发明的实施例包括负载锁定室，具有负载锁定室的处理系统和用于在大气和真空环境之间传送衬底的方法。在一个实施例中，该方法包括将经处理的基板保持在形成在室主体中的传送空腔内用于两个排气循环。在另一个实施例中，该方法包括将基底从传递腔转移到形成在腔体中的加热腔，以及加热加热腔中的基底。在另一个实施例中，负载锁定室包括具有设置在传送腔中的衬底支撑件的室主体。衬底支撑件可在第一高度和第二高度之间移动。多个槽形成在传送腔的天花板或地板中的至少一个中，并且被配置为当位于第二高度时容纳衬底支撑件的至少一部分。

2. 发明授权

US08124907B2 Load lock chamber with decoupled slit valve door seal compartment 有权
标题翻译：加载锁定室与分离的狭缝阀门密封隔间
公开(公告)号：US08124907B2
公开(公告)日：2012-02-28
申请号：US11782267
申请日：2007-07-24
申请人： Jae-Chull Lee , Suhail Anwar , Shinichi Kurita
发明人： Jae-Chull Lee , Suhail Anwar , Shinichi Kurita
IPC分类号： B23K10/00
CPC分类号： H01L21/67126 , H01L21/67201
摘要： Embodiments of the invention include a load lock chamber having a decoupled slit valve door seal compartment. In one embodiment, a load lock chamber includes a main assembly, a first slit valve door seal compartment and a seal assembly. The main assembly has a substrate transfer cavity formed therein. Two substrate access ports are formed through the main assembly and fluidly couple to the cavity. The first slit valve door seal compartment has an aperture disposed adjacent to and aligned with one of the access ports. The first slit valve door seal compartment is decoupled from the main assembly. The seal assembly couples the first slit valve door seal compartment to the main assembly.
摘要翻译：本发明的实施例包括具有解耦的狭缝阀门密封隔室的装载锁定室。在一个实施例中，负载锁定室包括主组件，第一狭缝阀门密封室和密封组件。主组件具有形成在其中的衬底传送腔。两个基板通道端口通过主组件形成并且流体耦合到空腔。第一狭缝阀门密封隔室具有邻近并与其中一个进入口相对设置的孔。第一个狭缝阀门密封隔间与主组件分离。密封组件将第一狭缝阀门密封隔间连接到主组件。

3. 发明授权

US08061949B2 Multiple slot load lock chamber and method of operation 有权
标题翻译：多槽加载锁定室和操作方法
公开(公告)号：US08061949B2
公开(公告)日：2011-11-22
申请号：US12709713
申请日：2010-02-22
申请人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
发明人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
IPC分类号： B65G49/07
CPC分类号： H01L21/67201 , C23C14/566 , H01L21/67109 , H01L21/67126 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67742 , H01L21/67751 , Y10S414/139
摘要： Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.
摘要翻译：本发明的实施例包括负载锁定室，具有负载锁定室的处理系统和用于在大气和真空环境之间传送衬底的方法。在一个实施例中，该方法包括将经处理的基板保持在形成在室主体中的传送空腔内用于两个排气循环。在另一个实施例中，该方法包括将基底从传递腔转移到形成在腔体中的加热腔，以及加热加热腔中的基底。在另一个实施例中，负载锁定室包括具有设置在传送腔中的衬底支撑件的室主体。衬底支撑件可在第一高度和第二高度之间移动。多个槽形成在传送腔的天花板或地板中的至少一个中，并且被配置为当位于第二高度时容纳衬底支撑件的至少一部分。

4. 发明授权

US07822324B2 Load lock chamber with heater in tube 有权
标题翻译：带加热器的加载锁定室
公开(公告)号：US07822324B2
公开(公告)日：2010-10-26
申请号：US11782290
申请日：2007-07-24
申请人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
发明人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
IPC分类号： F26B3/30
CPC分类号： H01L21/67115 , C23C16/54 , H01L21/67201
摘要： Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.
摘要翻译：本发明的实施例包括加热的负载锁定室。在一个实施例中，加热的负载锁定室包括具有至少部分地设置在其中的多个灯组件的室主体。每个灯组件包括容纳灯的透射管。透射管延伸到室主体中并提供将灯隔离到负载锁定室的内部空间的压力屏障。在另一个实施例中，透射管的开口端延伸穿过腔体的侧壁。透射管的封闭端被室主体的内部空间包围，并以间隔的关系支撑在腔室主体的顶部下方。管的开口端被密封到腔体的侧壁，使得管的内部对大气敞开。

5. 发明申请

US20100139889A1 Multiple Slot Load Lock Chamber and Method of Operation 有权
标题翻译：多槽负载锁定室和操作方法
公开(公告)号：US20100139889A1
公开(公告)日：2010-06-10
申请号：US12709713
申请日：2010-02-22
申请人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
发明人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
IPC分类号： H01L21/677 , F28F13/00
CPC分类号： H01L21/67201 , C23C14/566 , H01L21/67109 , H01L21/67126 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67742 , H01L21/67751 , Y10S414/139
摘要： Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.
摘要翻译：本发明的实施例包括负载锁定室，具有负载锁定室的处理系统和用于在大气和真空环境之间传送衬底的方法。在一个实施例中，该方法包括将经处理的基板保持在形成在室主体中的传送空腔内用于两个排气循环。在另一个实施例中，该方法包括将基底从传递腔转移到形成在腔体中的加热腔，以及加热加热腔中的基底。在另一个实施例中，负载锁定室包括具有设置在传送腔中的衬底支撑件的室主体。衬底支撑件可在第一高度和第二高度之间移动。多个槽形成在传送腔的天花板或地板中的至少一个中，并且被配置为当位于第二高度时容纳衬底支撑件的至少一部分。

6. 发明申请

US20080118236A1 LOAD LOCK CHAMBER WITH HEATER IN TUBE 有权
标题翻译：带加热器的管路箱
公开(公告)号：US20080118236A1
公开(公告)日：2008-05-22
申请号：US11782290
申请日：2007-07-24
申请人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
发明人： Suhail Anwar , Jae-Chull Lee , Shinichi Kurita
IPC分类号： H01L21/00 , H05B3/14 , H05B31/08
CPC分类号： H01L21/67115 , C23C16/54 , H01L21/67201
摘要： Embodiments of the invention include a heated load lock chamber. In one embodiment, a heated load lock chamber includes a chamber body having a plurality of lamp assembles disposed at least partially therein. Each lamp assembly includes a transmissive tube housing a lamp. The transmissive tube extends into the chamber body and provides a pressure barrier isolating the lamp from the interior volume of the load lock chamber. In another embodiment, an open end of the transmissive tube extends through a sidewall of the chamber body. A closed end of the transmissive tube is surrounded by the interior volume of the chamber body and is supported below a top of the chamber body in a spaced apart relation. The open end of the tube is sealed to the sidewall of the chamber body such that the interior of the tube is open to atmosphere.
摘要翻译：本发明的实施例包括加热的负载锁定室。在一个实施例中，加热的负载锁定室包括具有至少部分地设置在其中的多个灯组件的室主体。每个灯组件包括容纳灯的透射管。透射管延伸到室主体中并提供将灯隔离到负载锁定室的内部空间的压力屏障。在另一个实施例中，透射管的开口端延伸穿过腔体的侧壁。透射管的封闭端被室主体的内部空间包围，并以间隔的关系支撑在腔室主体的顶部下方。管的开口端被密封到腔体的侧壁，使得管的内部对大气敞开。

7. 发明授权

US07845891B2 Decoupled chamber body 有权
标题翻译：解耦室体
公开(公告)号：US07845891B2
公开(公告)日：2010-12-07
申请号：US11332781
申请日：2006-01-13
申请人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
发明人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
IPC分类号： H01L21/677
CPC分类号： H01L21/67201 , Y10S414/139
摘要： Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.
摘要翻译：本发明的实施例包括室主体，其具有从腔体的侧壁分离的顶部或底部中的至少一个。本发明适用于负载锁定室，基板传送室和真空处理室等。

8. 发明申请

US20080087214A1 LOAD LOCK CHAMBER WITH DECOUPLED SLIT VALVE DOOR SEAL COMPARTMENT 有权
标题翻译：带锁紧阀门的门锁密封箱
公开(公告)号：US20080087214A1
公开(公告)日：2008-04-17
申请号：US11782267
申请日：2007-07-24
申请人： Jae-Chull Lee , Suhail Anwar , Shinichi Kurita
发明人： Jae-Chull Lee , Suhail Anwar , Shinichi Kurita
IPC分类号： C23C14/00
CPC分类号： H01L21/67126 , H01L21/67201
摘要： Embodiments of the invention include a load lock chamber having a decoupled slit valve door seal compartment. In one embodiment, a load lock chamber includes a main assembly, a first slit valve door seal compartment and a seal assembly. The main assembly has a substrate transfer cavity formed therein. Two substrate access ports are formed through the main assembly and fluidly couple to the cavity. The first slit valve door seal compartment has an aperture disposed adjacent to and aligned with one of the access ports. The first slit valve door seal compartment is decoupled from the main assembly. The seal assembly couples the first slit valve door seal compartment to the main assembly.
摘要翻译：本发明的实施例包括具有解耦的狭缝阀门密封隔室的装载锁定室。在一个实施例中，负载锁定室包括主组件，第一狭缝阀门密封室和密封组件。主组件具有形成在其中的衬底传送腔。通过主组件形成两个基板通道端口，并且流体耦合到空腔。第一狭缝阀门密封隔室具有邻近并与其中一个进入口相对设置的孔。第一个狭缝阀门密封隔间与主组件分离。密封组件将第一狭缝阀门密封隔间连接到主组件。

9. 发明申请

US20070280816A1 MULTIPLE SLOT LOAD LOCK CHAMBER AND METHOD OF OPERATION 有权
标题翻译：多槽式装载机和操作方法
公开(公告)号：US20070280816A1
公开(公告)日：2007-12-06
申请号：US11421793
申请日：2006-06-02
申请人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
发明人： Shinichi Kurita , Suhail Anwar , Jae-Chull Lee
IPC分类号： B65H1/00
CPC分类号： H01L21/67201 , C23C14/566 , H01L21/67109 , H01L21/67126 , H01L21/67167 , H01L21/67178 , H01L21/6719 , H01L21/67742 , H01L21/67751 , Y10S414/139
摘要： Embodiments of the invention include a load lock chamber, a processing system having a load lock chamber and a method for transferring substrates between atmospheric and vacuum environments. In one embodiment, the method includes maintaining a processed substrate within a transfer cavity formed in a chamber body for two venting cycles. In another embodiment, the method includes transferring a substrate from a transfer cavity to a heating cavity formed in the chamber body, and heating the substrate in the heating cavity. In another embodiment, a load lock chamber includes a chamber body having substrate support disposed in a transfer cavity. The substrate support is movable between a first elevation and a second elevation. A plurality of grooves are formed in at least one of a ceiling or floor of the transfer cavity and configured to receive at least a portion of the substrate support when located in the second elevation.
摘要翻译：本发明的实施例包括负载锁定室，具有负载锁定室的处理系统和用于在大气和真空环境之间传送衬底的方法。在一个实施例中，该方法包括将经处理的基板保持在形成在室主体中的传送空腔内用于两个排气循环。在另一个实施例中，该方法包括将基底从传递腔转移到形成在腔体中的加热腔，以及加热加热腔中的基底。在另一个实施例中，负载锁定室包括具有设置在传送腔中的衬底支撑件的室主体。衬底支撑件可在第一高度和第二高度之间移动。多个槽形成在传送腔的天花板或地板中的至少一个中，并且被配置为当位于第二高度时容纳衬底支撑件的至少一部分。

10. 发明申请

US20070166133A1 Decoupled chamber body 有权
标题翻译：解耦室体
公开(公告)号：US20070166133A1
公开(公告)日：2007-07-19
申请号：US11332781
申请日：2006-01-13
申请人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
发明人： Jae-Chull Lee , Shinichi Kurita , John M. White , Suhail Anwar
IPC分类号： H01L21/677 , H01L21/306 , C23C16/00 , B65H1/00
CPC分类号： H01L21/67201 , Y10S414/139
摘要： Embodiments of the invention include a chamber body having at least one of a top or bottom decoupled from the sidewalls of the chamber body. The invention is suitable for use as a load lock chamber, substrate transfer chamber and vacuum processing chambers, among others.
摘要翻译：本发明的实施例包括室主体，其具有从腔体的侧壁分离的顶部或底部中的至少一个。本发明适用于负载锁定室，基板传送室和真空处理室等。

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