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    • 3. 发明申请
    • Apparatus and method of avoiding bank conflict in single-port multi-bank memory system
    • 避免单端口多库存储系统存在冲突的装置和方法
    • US20090089551A1
    • 2009-04-02
    • US12071910
    • 2008-02-27
    • Kyoung-june MinChan-min ParkSuk-jin KimWon-jong LeeKwon-taek KwonHee-seok Kim
    • Kyoung-june MinChan-min ParkSuk-jin KimWon-jong LeeKwon-taek KwonHee-seok Kim
    • G06F9/40G06F9/30
    • G06F9/30043G06F9/3824G06F9/3836
    • Provided are a method and apparatus for avoiding bank conflict. A first instruction that is one of access instructions that are predicted to cause the bank conflict is replaced with a second instruction by changing an execute timing of the first instruction to a timing prior to the execute timing of the first instruction so as for the access instructions not to cause the bank conflict. Next, a load/store unit that is scheduled to access the bank according to the first instruction accesses the bank and reads out a data from the bank at an execute timing of the second instruction, and after that, the load/store unit is allowed to be inputted the read data at the execute timing of the first instruction. Accordingly, although the access instructions that are predicted to cause the bank conflict are allocated to the load/store units, the bank conflict can be prevented, so that it is possible to avoid deterioration in performance due the occurrence of the bank conflict.
    • 提供了一种避免银行冲突的方法和装置。 通过将第一指令的执行定时改变为在第一指令的执行定时之前的定时,以访问指令来替换作为预测导致存储体冲突的访问指令之一的第一指令, 不造成银行冲突。 接下来,根据第一指令被调度为访问存储体的加载/存储单元访问存储体,并在第二指令的执行定时从存储体读出数据,然后允许加载/存储单元 在第一指令的执行定时输入读数据。 因此,尽管预测导致银行冲突的访问指令被分配给加载/存储单元,但是可以防止银行冲突,使得可以避免由于银行冲突的发生导致的性能下降。
    • 4. 发明授权
    • Methods of forming isolated semiconductor device active regions
    • 形成隔离半导体器件有源区的方法
    • US5677234A
    • 1997-10-14
    • US665294
    • 1996-06-18
    • Bon-young KooByung-hong ChungHee-seok KimYun-gi Kim
    • Bon-young KooByung-hong ChungHee-seok KimYun-gi Kim
    • H01L21/316H01L21/32H01L21/76
    • H01L21/32
    • Methods of forming semiconductor device active regions include the steps of forming a buffer layer containing a material susceptible to oxidation, such as polycrystalline or amorphous silicon, on a semiconductor substrate. To inhibit any native oxide film on the buffer layer from facilitating the formation of field oxide isolation regions having bird's beaks, the native oxide film is converted to a nitrogen containing film, such as silicon oxynitride, by nitrating the native oxide film. The silicon oxynitride film can be formed by exposing the oxide film to a nitrogen containing plasma, implanting nitrogen ions into the oxide film or annealing the oxide film in a nitrogen containing atmosphere, for example. During the nitrating step, chemically active oxygen in the native oxide film becomes bound to the nitrogen incorporated therein. A top oxidation resistant layer containing silicon nitride can then be formed on the nitrated surface of the buffer layer and used as an oxidation mask during a subsequent step of oxidizing the buffer layer to form field oxide isolation regions. By binding chemically active oxygen to nitrogen during the nitrating step, lateral oxidation under the top oxidation resistant layer is inhibited by limiting the lateral transport of chemically active oxygen. The masking properties of the top oxidation resistant layer can therefore be enhanced and utilized to form field oxide isolation regions having short or nonexistent bird beak's.
    • 形成半导体器件有源区的方法包括在半导体衬底上形成含有易于氧化的材料(例如多晶或非晶硅)的缓冲层的步骤。 为了抑制缓冲层上的任何自然氧化膜促进形成具有鸟喙的场氧化物隔离区,通过硝化天然氧化物膜将天然氧化物膜转化成含氮膜如氮氧化硅。 氧氮化硅膜可以通过将氧化物膜暴露于含氮等离子体,将氮离子注入到氧化膜中或者在含氮气氛中退火氧化膜来形成。 在硝化步骤期间,天然氧化膜中的化学活性氧与结合在其中的氮结合。 然后可以在缓冲层的硝化表面上形成含有氮化硅的顶部耐氧化层,并且在随后的氧化缓冲层的步骤中用作氧化掩模以形成场氧化物隔离区。 通过在硝化步骤期间将化学活性氧与氮结合,通过限制化学活性氧的横向运输来抑制顶部抗氧​​化层下的侧向氧化。 因此,顶部抗氧化层的掩蔽性能可以被增强并且用于形成具有短或不存在的鸟喙的场氧化物隔离区。
    • 5. 发明授权
    • Method for manufacturing a highly integrated semiconductor device having
a capacitor of large capacitance
    • 制造具有大电容的电容器的高度集成的半导体器件的方法
    • US5227322A
    • 1993-07-13
    • US868725
    • 1992-04-14
    • Jae-hong KoHee-seok KimSung-tae Kim
    • Jae-hong KoHee-seok KimSung-tae Kim
    • H01L27/04H01L21/02H01L21/822H01L21/8242H01L27/10H01L27/108
    • H01L28/92
    • Disclosed is a method comprising forming a first electrode by forming a conductive layer on a semiconductor substrate, forming an etching mask on the conductive layer, etching the conductive layer and defining the conductive layer into cell units; and forming a dielectric film and a second electrode or the first electrode. Also disclosed is a method comprising forming a first electrode by forming a conductive structure on a semiconductor substrate, forming an etching mask on the conductive structure and etching the conductive structure; and forming a dielectric film and a second electrode on the first electrode. An insulating layer including pin holes such as a silicon nitride layer is formed on the conductive structure or the conductive layer; which is exposed under an oxidative atmosphere. The surface portion of the conductive structure or conductive layer is oxidized to form silicon oxide islands to be used as an etching mask. Since the method requires no specific process conditions, it is simple and extends the effective area of the cell capacitor, and is also applicable to various capacitor types.
    • 公开了一种方法,包括通过在半导体衬底上形成导电层形成第一电极,在导电层上形成蚀刻掩模,蚀刻导电层并将导电层限定为电池单元; 以及形成电介质膜和第二电极或第一电极。 还公开了一种方法,包括通过在半导体衬底上形成导电结构形成第一电极,在导电结构上形成蚀刻掩模并蚀刻导电结构; 以及在所述第一电极上形成电介质膜和第二电极。 在导电结构或导电层上形成包括诸如氮化硅层的针孔的绝缘层; 其在氧化气氛下暴露。 导电结构或导电层的表面部分被氧化以形成用作蚀刻掩模的氧化硅岛。 由于该方法不需要具体的工艺条件,简单且扩展了电池电容器的有效面积,也适用于各种电容器类型。
    • 6. 发明授权
    • Apparatus and method of avoiding bank conflict in single-port multi-bank memory system
    • 避免单端口多库存储系统存在冲突的装置和方法
    • US08214617B2
    • 2012-07-03
    • US12071910
    • 2008-02-27
    • Kyoung-june MinChan-min ParkSuk-jin KimWon-jong LeeKwon-taek KwonHee-seok Kim
    • Kyoung-june MinChan-min ParkSuk-jin KimWon-jong LeeKwon-taek KwonHee-seok Kim
    • G06F12/00
    • G06F9/30043G06F9/3824G06F9/3836
    • Provided are a method and apparatus for avoiding bank conflict. A first instruction that is one of access instructions that are predicted to cause the bank conflict is replaced with a second instruction by changing an execute timing of the first instruction to a timing prior to the execute timing of the first instruction so as for the access instructions not to cause the bank conflict. Next, a load/store unit that is scheduled to access the bank according to the first instruction accesses the bank and reads out a data from the bank at an execute timing of the second instruction, and after that, the load/store unit is allowed to be inputted the read data at the execute timing of the first instruction. Accordingly, although the access instructions that are predicted to cause the bank conflict are allocated to the load/store units, the bank conflict can be prevented, so that it is possible to avoid deterioration in performance due the occurrence of the bank conflict.
    • 提供了一种避免银行冲突的方法和装置。 通过将第一指令的执行定时改变为在第一指令的执行定时之前的定时,以访问指令来替换作为预测导致存储体冲突的访问指令之一的第一指令, 不造成银行冲突。 接下来,根据第一指令被调度为访问存储体的加载/存储单元访问存储体,并在第二指令的执行定时从存储体读出数据,然后允许加载/存储单元 在第一指令的执行定时输入读数据。 因此,尽管预测导致银行冲突的访问指令被分配给加载/存储单元,但是可以防止银行冲突,使得可以避免由于银行冲突的发生导致的性能下降。