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1. 发明授权

US07427819B2 Film-bulk acoustic wave resonator with motion plate and method 有权
标题翻译：具有运动板和方法的膜 - 体声波谐振器
公开(公告)号：US07427819B2
公开(公告)日：2008-09-23
申请号：US11073345
申请日：2005-03-04
申请人： Storrs T. Hoen , Mark A. Unkrich , William R. Trutna , John D. Larson, III , Richard C Ruby , Graham M. Flower , Annette Grot
发明人： Storrs T. Hoen , Mark A. Unkrich , William R. Trutna , John D. Larson, III , Richard C Ruby , Graham M. Flower , Annette Grot
IPC分类号： H01L41/08 , G01R27/04
CPC分类号： G01P15/097 , G01L1/165
摘要： An apparatus and method for measuring a target environmental variable (TEV) that employs a film-bulk acoustic resonator with motion plate. The film-bulk acoustic resonator (FBAR) includes an acoustic reflector formed in an FBAR wafer and a surface. A first electrode is formed on the surface of the acoustic reflector and has a surface. A piezoelectric layer is formed on the surface of the first electrode and has a surface. A second electrode is formed on the surface of the piezoelectric layer. A motion plate is suspended in space at a predetermined distance relative to the surface of the second electrode and is capacitively coupled to the FBAR.
摘要翻译：一种用于测量采用具有运动板的膜 - 体声波谐振器的目标环境变量（TEV）的装置和方法。膜 - 体声波谐振器（FBAR）包括形成在FBAR晶片和表面中的声反射器。第一电极形成在声反射体的表面上并具有表面。在第一电极的表面上形成压电层并具有表面。第二电极形成在压电层的表面上。运动板相对于第二电极的表面以预定距离悬挂在空间中，并且电容耦合到FBAR。

2. 发明授权

US07795997B2 Apparatus and method for measuring an environmental condition 有权
标题翻译：用于测量环境条件的装置和方法
公开(公告)号：US07795997B2
公开(公告)日：2010-09-14
申请号：US11526948
申请日：2006-09-25
申请人： John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
发明人： John D. Larson, III , Storrs T. Hoen , Annette C. Grot , Richard C. Ruby , Graham M. Flower
IPC分类号： H03H9/00
CPC分类号： G01N29/022 , G01N29/036 , G01N2291/0253 , G01N2291/0256 , G01N2291/02845 , G01N2291/0426
摘要： A sensor senses an environmental condition. The sensor includes a film bulk acoustic resonator that includes a layer of material that causes resonant frequency and/or quality factor shifts of the film bulk acoustic resonator in response to changes in the environmental condition. The environmental condition may be relative humidity and the layer of material may be a moisture absorptive material.
摘要翻译：传感器感测环境条件。传感器包括膜体声波谐振器，其包括响应于环境条件的变化而引起膜体声波谐振器的谐振频率和/或质量因子偏移的材料层。环境条件可以是相对湿度，并且材料层可以是吸湿材料。

3. 发明授权

US07358651B2 Apparatus and method for detecting a target environmental variable that employs film-bulk acoustic wave resonator oscillators 有权
标题翻译：用于检测使用膜 - 体声波谐振器振荡器的目标环境变量的装置和方法
公开(公告)号：US07358651B2
公开(公告)日：2008-04-15
申请号：US11109108
申请日：2005-04-18
申请人： Richard C. Ruby , Graham M. Flower , John D. Larson, III , Mark A. Unkrich
发明人： Richard C. Ruby , Graham M. Flower , John D. Larson, III , Mark A. Unkrich
IPC分类号： H01L41/08
CPC分类号： G01K11/265 , G01L1/165 , G01L9/0025 , H03H9/0542
摘要： An apparatus and method for detecting a target environmental variable (TEV). A first film-bulk acoustic resonator (FBAR) oscillator that includes a first FBAR with a first response to the target environmental variable generates a first frequency. A second film-bulk acoustic resonator (FBAR) oscillator that includes a second FBAR with a second response to the target environmental variable generates a second frequency. A circuit that is coupled to the first FBAR oscillator and the second FBAR oscillator determines the target environmental variable (e.g., changes in the TEV) based on the first frequency and the second frequency.
摘要翻译：一种用于检测目标环境变量（TEV）的装置和方法。包括对目标环境变量具有第一响应的第一FBAR的第一薄膜体声波谐振器（FBAR）振荡器产生第一频率。包括具有对目标环境变量的第二响应的第二FBAR的第二薄膜 - 体声波谐振器（FBAR）振荡器产生第二频率。耦合到第一FBAR振荡器和第二FBAR振荡器的电路基于第一频率和第二频率来确定目标环境变量（例如，TEV的变化）。

4. 发明申请

US20080297282A1 ACOUSTIC POWER TRANSFORMER INCLUDING LENS 有权
标题翻译：包括镜头的声音电力变压器
公开(公告)号：US20080297282A1
公开(公告)日：2008-12-04
申请号：US11755825
申请日：2007-05-31
申请人： John D. Larson, III , Michael L. Frank , Mark A. Unkrich , Stephen R. Gilbert
发明人： John D. Larson, III , Michael L. Frank , Mark A. Unkrich , Stephen R. Gilbert
IPC分类号： H03H9/00
CPC分类号： H01L41/107
摘要： An acoustic power transformer includes: an input port adapted to receive an input signal; a transmitting acoustic transducer coupled to the input port and adapted to transmit an acoustic wave in response to the input signal received at the input port; a receiving acoustic transducer adapted to receive the acoustic wave and in response thereto to produce an output signal; an output port adapted to output the output signal; and an acoustic medium disposed in an acoustic wave propagation path between the transmitting acoustic transducer and the receiving acoustic transducer. In one case, at least one of the transmitting acoustic transducer and receiving acoustic transducer includes a Fresnel lens. In another case, the transformer includes an acoustic lens disposed in the acoustic wave propagation path between the transmitting acoustic transducer and the receiving acoustic transducer.
摘要翻译：声功率变压器包括：适于接收输入信号的输入端口; 耦合到所述输入端口并且响应于在所述输入端口处接收的输入信号而发射声波的发射声学换能器; 适于接收声波并响应于此产生输出信号的接收声换能器; 输出端口，其适于输出所述输出信号; 以及声传播介质，布置在传声传感器和接收声换能器之间的声波传播路径中。在一种情况下，至少一个发射声换能器和接收声换能器包括菲涅尔透镜。在另一种情况下，变压器包括设置在传声换能器和接收声换能器之间的声波传播路径中的声透镜。

5. 发明授权

US07613076B2 Acoustic power transformer including lens 有权
标题翻译：声功率变压器包括镜头
公开(公告)号：US07613076B2
公开(公告)日：2009-11-03
申请号：US11755825
申请日：2007-05-31
申请人： John D. Larson, III , Michael L. Frank , Mark A. Unkrich , Stephen R. Gilbert
发明人： John D. Larson, III , Michael L. Frank , Mark A. Unkrich , Stephen R. Gilbert
IPC分类号： G01S13/00
CPC分类号： H01L41/107
摘要： An acoustic power transformer includes: an input port adapted to receive an input signal; a transmitting acoustic transducer coupled to the input port and adapted to transmit an acoustic wave in response to the input signal received at the input port; a receiving acoustic transducer adapted to receive the acoustic wave and in response thereto to produce an output signal; an output port adapted to output the output signal; and an acoustic medium disposed in an acoustic wave propagation path between the transmitting acoustic transducer and the receiving acoustic transducer. In one case, at least one of the transmitting acoustic transducer and receiving acoustic transducer includes a Fresnel lens. In another case, the transformer includes an acoustic lens disposed in the acoustic wave propagation path between the transmitting acoustic transducer and the receiving acoustic transducer.
摘要翻译：声功率变压器包括：适于接收输入信号的输入端口; 耦合到所述输入端口并且响应于在所述输入端口处接收的输入信号而发射声波的发射声学换能器; 适于接收声波并响应于此产生输出信号的接收声换能器; 输出端口，其适于输出所述输出信号; 以及声传播介质，布置在传声传感器和接收声换能器之间的声波传播路径中。在一种情况下，至少一个发射声换能器和接收声换能器包括菲涅尔透镜。在另一种情况下，变压器包括设置在传声换能器和接收声换能器之间的声波传播路径中的声透镜。

6. 发明授权

US07312675B2 Vertically separated acoustic filters and resonators 失效
标题翻译：垂直分离的声学滤波器和谐振器
公开(公告)号：US07312675B2
公开(公告)日：2007-12-25
申请号：US11373355
申请日：2006-03-09
申请人： Richard C. Ruby , John D. Larson, III
发明人： Richard C. Ruby , John D. Larson, III
IPC分类号： H03H9/54
CPC分类号： H03H9/605 , H03H9/587 , H03H9/60 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
摘要翻译：公开了一种包括垂直分离的声谐振器的装置。该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。由于谐振器在另一个上方垂直分离，所以实现谐振器所需的总面积减小，从而实现了芯片尺寸和成本的节省。垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。

7. 发明授权

US06946928B2 Thin-film acoustically-coupled transformer 有权
标题翻译：薄膜声耦合变压器
公开(公告)号：US06946928B2
公开(公告)日：2005-09-20
申请号：US10699481
申请日：2003-10-30
申请人： John D. Larson, III , Richard C. Ruby
发明人： John D. Larson, III , Richard C. Ruby
IPC分类号： H03H9/17 , H03H9/13 , H03H9/60 , H03H9/54 , H03H9/205
CPC分类号： H03H9/605 , H01L2224/48091 , H01L2224/49175 , H03H9/132 , H03H9/584 , H03H9/587 , Y10T29/42 , H01L2924/00014
摘要： The acoustically-coupled transformer includes first and second stacked bulk acoustic resonators (SBARs), each having a stacked pair of film bulk acoustic resonators (FBARs) with an acoustic decoupler between them. In one embodiment, the acoustic decoupler comprises a layer of decoupling material has having a nominal thickness equal to an odd integral multiple of one quarter of the wavelength of an acoustic wave having a frequency equal to the transformer's center frequency. In another embodiment, the acoustic decoupler comprises a Bragg stack. Each FBAR has opposed planar electrodes with piezoelectric material between them. The transformer additionally has first terminals, second terminals, a first electrical circuit connecting one FBARs of the first SBAR to one FBAR of the second SBAR and the first terminals, and a second electrical circuit connecting the other FBAR of the first SBAR to the other FBAR of the second SBAR and the second terminals.
摘要翻译：声耦合变压器包括第一和第二堆叠的体声波谐振器（SBAR），每个具有堆叠的一对薄膜体声共振器（FBAR），在它们之间具有声耦合器。在一个实施例中，声学解耦器包括去耦材料层具有等于频率等于变压器中心频率的声波波长四分之一的奇数整数倍的标称厚度。在另一个实施例中，声分离器包括布拉格堆叠。每个FBAR都具有与它们之间的压电材料的平面电极。变压器还具有第一端子，第二端子，将第一SBAR的一个FBAR与第二SBAR的一个FBAR和第一端子连接的第一电路，以及将第一SBAR的另一个FBAR连接到另一个FBAR的第二电路的第二个SBAR和第二个终端。

8. 发明授权

US06424237B1 Bulk acoustic resonator perimeter reflection system 有权
标题翻译：体声共振器周边反射系统
公开(公告)号：US06424237B1
公开(公告)日：2002-07-23
申请号：US09746525
申请日：2000-12-21
申请人： Richard C. Ruby , John D. Larson, III , Paul D. Bradley
发明人： Richard C. Ruby , John D. Larson, III , Paul D. Bradley
IPC分类号： H03H915
CPC分类号： H03H9/173 , H03H9/0211 , H03H9/02118 , H03H9/132 , Y10T29/42
摘要： A bulk acoustic resonator having a high quality factor is formed on a substrate having a depression formed in a top surface of the substrate. The resonator includes a first electrode, a piezoelectric material and a second electrode. The first electrode is disposed on the top surface of the substrate and extends beyond the edges of the depression by a first distance to define a first region therebetween. The piezoelectric material is disposed on the top surface of the substrate and over the first electrode, and the second electrode is disposed on the piezoelectric material. The second electrode includes a portion that is located above the depression. The portion of the second electrode that is located over the depression has at least one edge that is offset from a corresponding edge of the depression by a second distance to define a second region therebetween. The first and second regions have different impedances, as a result of the different materials located in the two regions. In addition, the first and second distances are approximately equal to a quarter-wavelength of a sound wave travelling laterally across the respective region, such that reflections off of the edges of the regions constructively interfere to maximize the reflectivity of the resonator.
摘要翻译：具有高质量因素的体声波谐振器形成在具有形成在基板的顶表面中的凹陷的基板上。谐振器包括第一电极，压电材料和第二电极。第一电极设置在衬底的顶表面上并且延伸超过凹陷的边缘第一距离以限定它们之间的第一区域。压电材料设置在基板的顶表面上并在第一电极上方，第二电极设置在压电材料上。第二电极包括位于凹部上方的部分。位于凹部上方的第二电极的部分具有至少一个边缘，该边缘与凹陷的对应边缘偏移第二距离，以限定它们之间的第二区域。由于位于两个区域的不同材料，第一和第二区域具有不同的阻抗。此外，第一和第二距离近似等于横过各个区域横向移动的声波的四分之一波长，使得区域边缘的反射构造地干扰以最大化谐振器的反射率。

9. 发明授权

US07841055B2 Method of manufacturing vertically separated acoustic filters and resonators 失效
标题翻译：制造垂直分离的声学滤波器和谐振器的方法
公开(公告)号：US07841055B2
公开(公告)日：2010-11-30
申请号：US11373451
申请日：2006-03-09
申请人： Richard C. Ruby , John D. Larson, III
发明人： Richard C. Ruby , John D. Larson, III
IPC分类号： H01L41/22
CPC分类号： H03H9/605 , H03H9/587 , H03H9/60 , Y10T29/42 , Y10T29/49005 , Y10T29/49155
摘要： An apparatus including vertically separated acoustic resonators are disclosed. The apparatus includes a first acoustic resonator on a substrate and a second acoustic resonator vertically separated above the first acoustic resonator. Because the resonators are vertically separated above another, total area required to implement the resonators is reduced thereby savings in die size and cost are realized. The vertically separated resonators are supported by standoffs that are fabricated on the substrate, or on a resonator.
摘要翻译：公开了一种包括垂直分离的声谐振器的装置。该装置包括在基板上的第一声谐振器和在第一声谐振器之上垂直分离的第二声谐振器。由于谐振器在另一个上方垂直分离，所以实现谐振器所需的总面积减小，从而实现了芯片尺寸和成本的节省。垂直分离的谐振器由制造在衬底上或在谐振器上的支座支撑。

10. 发明授权

US06550664B2 Mounting film bulk acoustic resonators in microwave packages using flip chip bonding technology 有权
公开(公告)号：US06550664B2
公开(公告)日：2003-04-22
申请号：US09733704
申请日：2000-12-09
申请人： Paul Bradley , John D. Larson, III , Richard C. Ruby
发明人： Paul Bradley , John D. Larson, III , Richard C. Ruby
IPC分类号： B23K3102
CPC分类号： H03H9/1014 , H01L2924/0002 , Y10T29/42 , H01L2924/00
摘要： A device includes a die that contains a filter circuit. The filter is implemented using film bulk acoustic resonators. A package contains the die. The package includes a base portion. Signal paths are incorporated in the base portion. Solder joints attach the die to the base portion. The solder joints electrically connect pads on the die to the signal paths in the base portion. The solder joints do not include, and are used instead of, wire bonds.

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