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1. 发明授权

US5521706A System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system 失效
标题翻译：用于在旋转分析仪椭偏仪系统中补偿分散光学器件偏振相关灵敏度的系统和方法
公开(公告)号：US5521706A
公开(公告)日：1996-05-28
申请号：US265325
申请日：1994-06-24
申请人： Steven E. Green , Shakil A. Pittal , Blaine D. Johs , John A. Woollam , David W. Doerr , Reed A. Christenson
发明人： Steven E. Green , Shakil A. Pittal , Blaine D. Johs , John A. Woollam , David W. Doerr , Reed A. Christenson
IPC分类号： G01J3/28 , G01J3/36 , G01J3/447 , G01J4/00 , G01N21/21
CPC分类号： G01J3/36 , G01J3/447 , G01J4/00 , G01N21/211 , G01J2003/2866 , G01J3/0289
摘要： An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a rotating compensator, positioned between the analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.
摘要翻译：一种椭偏仪系统，其包括枢转分散光学器件，其被定位成从其分析器接收多色光，而不需要在从衬底系统反射之后进一步聚焦。此外，公开了一种旋转补偿器，其位于分析器和分散光学器件之间，其用于在与分散光学器件相互作用之后降低对入射到其上的光的检测器元件偏振相关敏感度。本发明的方法可以包括将数学校正因子应用于例如表征PSI和DELTA值的基底系统，或傅里叶ALPHA和BETA系数。

2. 发明授权

US5504582A System and method for compensating polarization-dependent sensitivity of dispersive optics in a rotating analyzer ellipsometer system 失效
标题翻译：用于在旋转分析仪椭偏仪系统中补偿分散光学器件偏振相关灵敏度的系统和方法
公开(公告)号：US5504582A
公开(公告)日：1996-04-02
申请号：US339834
申请日：1994-11-14
申请人： Blaine D. Johs , Shakil A. Pittal , Steven E. Green , John A. Woollam , David W. Doerr , Reed A. Christenson
发明人： Blaine D. Johs , Shakil A. Pittal , Steven E. Green , John A. Woollam , David W. Doerr , Reed A. Christenson
IPC分类号： G01J3/28 , G01J3/36 , G01J3/447 , G01J4/00 , G01N21/21
CPC分类号： G01J3/36 , G01J3/447 , G01J4/00 , G01N21/211 , G01J2003/2866 , G01J3/0289
摘要： An ellipsometer system which includes a pivotal dispersive optics positioned to receive polychromatic light from an analyzer thereof, without further focusing after reflection from a substrate system, is presented. In addition, a stationary compensator, positioned between an analyzer and the dispersive optics, which serves to reduce detector element polarization dependent sensitivity to light entering thereto after it interacts with the dispersive optics, is disclosed. The use of a light fiber to carry light from a source thereof, to a polarization state generator, is also disclosed. The method of the present invention can include application of mathematical correction factors to, for instance, substrate system characterizing PSI and DELTA values, or Fourier ALPHA and BETA coefficients.
摘要翻译：一种椭偏仪系统，其包括枢转分散光学器件，其被定位成从其分析器接收多色光，而不需要在从衬底系统反射之后进一步聚焦。此外，公开了一种位于分析仪和分散光学器件之间的固定补偿器，其用于在与分散光学器件相互作用之后降低对入射到其上的光的检测器元件偏振依赖的灵敏度。还公开了使用光纤将光从其源携带到偏振状态发生器。本发明的方法可以包括将数学校正因子应用于例如表征PSI和DELTA值的基底系统，或傅里叶ALPHA和BETA系数。

3. 发明授权

US5805285A Multiple order dispersive optics system and method of use 失效
标题翻译：多阶色散光学系统及其使用方法
公开(公告)号：US5805285A
公开(公告)日：1998-09-08
申请号：US818445
申请日：1997-03-17
申请人： Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
发明人： Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
IPC分类号： G01J3/28 , G01J3/36 , G01J3/447 , G01J4/00 , G01N21/21 , G01N21/47
CPC分类号： G01J3/36 , G01J3/447 , G01J4/00 , G01N21/211 , G01N21/4788 , G01J2003/2866 , G01J3/0289
摘要： Disclosed is a dispersive optics system, in the context of sample substrate system investigating spectroscopic reflectometer and the like systems, which, in use, produce a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light, over a larger range, than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders. Also disclosed is a quadrant detector means of dispersive optics alignment, and a compensator means for reducing the effect of detector element polarization state dependence.
摘要翻译：公开了一种分散光学系统，在样品衬底系统调查光谱反射计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。在使用中，基本上单个波长光束的多个“订单”的可用性允许在更大范围内同时测量更基本上单个波长的光束，而不仅仅是基本上单个波长束的“订单” 的光存在。存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。还公开了分散光学对准的象限检测器装置，以及用于减小检测器元件极化状态依赖性的影响的补偿器装置。

4. 发明授权

US5666201A Multiple order dispersive optics system and method of use 失效
标题翻译：多阶色散光学系统及其使用方法
公开(公告)号：US5666201A
公开(公告)日：1997-09-09
申请号：US530892
申请日：1995-09-20
申请人： Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
发明人： Blaine D. Johs , Ping He , Steven E. Green , Shakil A. Pittal , John A. Woollam
IPC分类号： G01J3/28 , G01J3/36 , G01J3/447 , G01J4/00 , G01N21/21 , G01N21/47
CPC分类号： G01J3/36 , G01J3/447 , G01J4/00 , G01N21/211 , G01N21/4788 , G01J2003/2866 , G01J3/0289
摘要： Disclosed is a dispersive optics system, in the context of ellipsometer or polarimeter and the like systems, which, in use, produces a plurality of "Orders" of essentially single wavelength beams of light from a polychromatic beam of light. In use the availability of more than one "Order" of essentially single wavelength beams of light allows simultaneous measurement of more essentially single wavelength beams of light than would be possible were only one "Order" of essentially single wavelength beams of light present. Filters are present to reduce the effects of stray light on detector elements and to allow separating the wavelengths in overlapping regions of adjacent Orders.
摘要翻译：公开了一种分散光学系统，在椭偏仪或偏振计等系统的背景下，其在使用中产生基本上来自多色光束的单波长光束的多个“订单”。在使用中，基本上单个波长光束的多于一个“顺序”的可用性允许同时测量更基本上单个波长光束的光，比仅存在基本上单个波长光束的“顺序”是可能的。存在滤光器以减少杂散光对检测器元件的影响，并允许在相邻订单的重叠区域中分离波长。

5. 发明授权

US5373359A Ellipsometer 失效
标题翻译：椭圆计
公开(公告)号：US5373359A
公开(公告)日：1994-12-13
申请号：US947430
申请日：1992-09-18
申请人： John A. Woollam , Blaine D. Johs , David W. Doerr , Reed A. Christenson
发明人： John A. Woollam , Blaine D. Johs , David W. Doerr , Reed A. Christenson
IPC分类号： G01J3/28 , G01J3/36 , G01J3/447 , G01J4/00 , G01N21/21
CPC分类号： G01N21/211 , G01J3/36 , G01J3/447 , G01J4/00 , G01J2003/2866 , G01J3/0289
摘要： To sense characteristics of a sample, an ellipsometer includes a pivotal diffraction grating positioned to receive white light from the analyzer without further focusing of the light after the light leaves the sample. The diffraction grating is focused on the sensor at a predetermined angle with a precision of at least plus or minus one-half degree using an alignment-sensing means positioned between the analyzer and diffraction grating. The sensor includes an aperture through which the incident beam of light is transmitted, light-sensitive areas on opposite sides of said sensor and a comparator for comparing the signal from said light-sensitive areas. Equality of the light from the light-sensitive areas indicates that the incident beam of light is perpendicular to the diffraction grating. A second diffraction grating and a second sensing means may receive the specularly reflected white light from a first diffraction grating and reflect it to another diffraction grating to investigate another spectrum of light. A spectroscopic ellipsometer uses a stacked photodiode in which the first photodiode and second photodiode have overlapping spectral ranges.
摘要翻译：为了感测样品的特征，椭偏仪包括枢转衍射光栅，其定位成在来自分析仪之后接收白光，而不会在光离开样品后进一步聚焦光。使用位于分析仪和衍射光栅之间的对准感测装置，衍射光栅以至少正或负半度的精度以预定角度聚焦在传感器上。传感器包括入射光束透过的孔，在所述传感器的相对侧上的感光区域和用于比较来自所述光敏区域的信号的比较器。来自感光区域的光的平等表示入射光束垂直于衍射光栅。第二衍射光栅和第二感测装置可以接收来自第一衍射光栅的镜面反射的白光，并将其反射到另一衍射光栅以研究另一光谱。光谱椭偏仪使用其中第一光电二极管和第二光电二极管具有重叠光谱范围的堆叠光电二极管。

6. 发明授权

US5956145A System and method for improving data acquisition capability in spectroscopic rotatable element, rotating element, modulation element, and other ellipsometer and polarimeter and the like systems 失效
公开(公告)号：US5956145A
公开(公告)日：1999-09-21
申请号：US17423
申请日：1998-02-02
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam , Stephen P. Ducharme
IPC分类号： G01J3/28 , G01J4/00 , G01N21/21
CPC分类号： G01N21/211 , G01J4/00 , G01J2003/2866
摘要： Disclosed is a system and method for controlling polarization state determining parameters of a polarized beam of light in an ellipsometer or polarimeter and the like system, (eg. a modulation element ellipsometer system), so that they are in ranges wherein the sensitivity, (of a sample system characterizing PSI and DELTA value monitoring detector used to measure changes in said polarization state resulting from interaction with a "composite sample system," comprised of a sample system per se. and a beam polarization state determining variable retarder, to noise and measurement errors etc. therein), is reduced. The present invention allows determining sample system per se. characterizing PSI and DELTA values, from Composite Sample System characterizing PSI and DELTA values, by compensating for the presence of present invention components, (VR1) and/or VR2), added to an ellipsometer or polarimeter and the like system. The present invention also improves the ability of an ellipsometer or polarimeter and the like system fitted with present invention components (VR1) and/or (VR2) to provide usably accurate and precise sample system characterizing PSI and DELTA determining data values, wherein a sample system per se. investigating polarized beam of light is oriented at other than a Principal or Brewster Angle of Incidence thereto, the use of which Angle of Incidence would otherwise be difficult, if not impossible. Practice of the present invention also allows determination of the "Handedness" of a polarized beam of light, and of sample system Jones or Mueller Matrix component values. As well, the present invention provides means for making system components (VR1) and/or (VR2) added to an ellipsometer or polarimeter and the like system, essentially end user transparent when desired, without removal thereof from said ellipsometer or polarimeter system.

7. 发明授权

US5757494A System and method for improving data acquisition capability in spectroscopic ellipsometers 失效
标题翻译：用于提高光谱椭偏仪数据采集能力的系统和方法
公开(公告)号：US5757494A
公开(公告)日：1998-05-26
申请号：US422346
申请日：1995-04-14
申请人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
发明人： Steven E. Green , Craig M. Herzinger , Blaine D. Johs , John A. Woollam
IPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/21 , G01N23/20
CPC分类号： C23C14/54 , G01J3/447 , G01J4/00 , G01N21/211 , G01N23/20058
摘要： The present invention is applicable generally to Spectroscopic Rotatable and Rotating Element Ellipsometers which utilize a relatively large range of wavelengths. Disclosed is a system and method for controlling the polarization state of a polarized beam of light so that it is in a range where the sensitivity of a Polarization State Detector used to measure changes in said polarized beam of light resulting from interaction with a Sample System, to noise and measurement errors etc., is reduced. Exemplified is a system, and method of use, for simultaneously setting both measured ellipsometric ALPHA, and ellipsometric BETA parameter values, (or equivalents), within ranges, in which ranges the sensitivity of transfer functions, and mathematical regressions which utilize said ellipsometric ALPHA and ellipsometric BETA values in the calculation of sample system characterizing PSI and DELTA constant values, to noise and errors in measurement etc., is found to be negligible. The present invention allows obtaining accurate and precise sample system PSI and DELTA Values from an Ellipsometer System in which a polarized beam of light is oriented at other than a Principal of Brewster Angle of Incidence to a sample system, allows determination of DELTA values in ranges otherwise not impossible, allows determination of the "Handedness" of a polarized beam of light, and provides means for determining all of Stokes Vector and Mueller Matrix component values. The present invention also provides means for making all system components added to a conventional ellipsometer system essentially end user transparent when desired, without removal thereof from said ellipsometer system.
摘要翻译：本发明一般适用于使用相对较大波长范围的光谱可旋转和旋转元件椭偏仪。公开了一种用于控制偏振光束的偏振状态的系统和方法，使得其处于用于测量由与样品系统相互作用产生的所述偏振光束的变化的极化状态检测器的灵敏度，降噪，测量误差等。举例说明的是一种系统和使用方法，用于在范围内同时设置测量的椭圆偏振ALPHA和椭圆偏振BETA参数值（或等价物），其范围内的传递函数的灵敏度和使用所述椭圆偏振ALPHA的数学回归和发现表征PSI和DELTA常数值的样本系统的计算中的椭偏测量值BETA值，测量噪声和误差等都是可忽略的。本发明允许从椭圆偏振仪系统获得精确和精确的样本系统PSI和DELTA值，其中偏振光束定向在除了布鲁斯特发生角度的主体之外的样本系统，允许以其它方式确定范围的DELTA值不是不可能的，允许确定偏振光束的“携带”，并且提供用于确定所有斯托克斯矢量和米勒矩阵分量值的装置。本发明还提供了用于使得添加到常规椭偏仪系统的所有系统部件基本上使终端用户在需要时不透明的装置，而不从所述椭偏仪系统中移除。

8. 发明授权

US07304737B1 Rotating or rotatable compensator system providing aberation corrected electromagnetic raadiation to a spot on a sample at multiple angles of a incidence 有权
标题翻译：旋转或可旋转的补偿器系统以多个入射角对样品上的斑点提供畸变校正的电磁辐射
公开(公告)号：US07304737B1
公开(公告)日：2007-12-04
申请号：US11497920
申请日：2006-08-03
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01N21/211 , G01N2021/212 , G01N2021/213 , G01N2021/215
摘要： Spectroscopic ellipsometer systems which include polarizer and analyzer elements which remain fixed in position during data acquisition while at least one continuously rotating or step-wise rotatable compensator imposes a continuously variable or plurality of sequentially discrete polarization states on a beam of electromagnetic radiation, including a system of mirrors and refractive elements for correcting aberation while directing a beam of electromagnetic radiation to a spot on a sample at a multiple different angles-of-incidence.
摘要翻译：光谱椭偏仪系统包括在数据采集期间保持固定在位的偏振器和分析器元件，而至少一个连续旋转或逐步旋转的补偿器在电磁辐射束上施加连续可变或多个顺序离散的极化状态，包括系统的反射镜和折射元件，用于校正像差，同时以多个不同的入射角将电磁辐射束引导到样品上的斑点。

9. 发明授权

US07327456B1 Spectrophotometer, ellipsometer, polarimeter and the like systems 有权
标题翻译：分光光度计，椭偏仪，偏光计等系统
公开(公告)号：US07327456B1
公开(公告)日：2008-02-05
申请号：US11145470
申请日：2005-06-06
申请人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
发明人： John A. Woollam , Steven E. Green , Ping He , Blaine D. Johs , Craig M. Herzinger , Galen L. Pfeiffer , Brian D. Guenther , Martin M. Liphardt , Gerald T. Cooney
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J1/02 , G01J1/0266 , G01J3/0202 , G01J3/0224 , G01J3/0235 , G01J3/0237 , G01J3/0289 , G01J3/04 , G01J3/18 , G01J4/00 , G01N21/211
摘要： Disclosed are improvements in ellipsometer and the like systems capable of operating in the Vacuum-Ultra-Violet (VUV) to Near Infrared (NIR) wavelength range, and methodology of use.
摘要翻译：公开了能够在真空 - 紫外（VUV）至近红外（NIR）波长范围内操作的椭偏仪等系统的改进以及使用方法。

10. 发明授权

US07245376B2 Combined spatial filter and relay systems in rotating compensator ellipsometer/polarimeter 有权
标题翻译：旋转补偿器椭圆计/偏振计中的组合空间滤波器和继电器系统
公开(公告)号：US07245376B2
公开(公告)日：2007-07-17
申请号：US11284213
申请日：2005-11-22
申请人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
发明人： Martin M. Liphardt , Blaine D. Johs , Jeffrey S. Hale , Craig M. Herzinger , Steven E. Green , Ping He , John A. Woollam
IPC分类号： G01J4/00
CPC分类号： G01J3/02 , G01J3/0208 , G01J3/021 , G01J3/0229 , G01J3/0243 , G01J4/00 , G01N21/21 , G01N21/211 , G01N2021/213 , G02B17/008
摘要： Low aberration relay systems modified to perform as spatial filters in rotating compensator ellipsometer, polarimeter and the like systems.
摘要翻译：改进的低像差继电器系统在旋转补偿器椭圆偏振器，偏振计等系统中作为空间滤波器。

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