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    • 4. 发明申请
    • Resonant sensor assembly
    • 谐振传感器组件
    • US20060170311A1
    • 2006-08-03
    • US10544755
    • 2004-02-05
    • Edward JonesNeil WhiteJohn TudorStephen Beeby
    • Edward JonesNeil WhiteJohn TudorStephen Beeby
    • H01L41/08
    • G01L1/162G01L9/0022
    • A triple beam resonator (10) is provided with three beams or tines (12, 14, 16) aligned in parallel alongside each other and joined at a decoupling zone (18) at each end, which is in turn connected to the surrounding material. The central beam (14) is twice the width of the two outer beams (12, 16). The resonating element has a length of 15.5 mm, a thickness of 0.25 mm and beam widths of 2 mm and 1 mm. The distance between the beams is 0.5 mm. Finite element analysis predicts the modal behavior with stress distribution and eigenfrequencies of the resonator (10). Thick-film PZT elements (20, 22) were printed on separate regions at each end of the central beam (14), where maximum stresses exist as the resonator (10) operates in its favored mode of vibration. The PZT element (20) at one end drives the vibrations, while the PZT element (22) at the other end detects them. Positioning the PZT driving and sensing elements (20,22) on the regions of maximum stresses maximizes the degree of mechanical coupling between the active piezoelectric layer and the resonator for generation of both driving forces and sensing signals. Very high quality factors of 3100 and higher have been experienced. Furthermore, the resonator can be manufactures by batch production techniques while maintaining high reliability and reproducibility.
    • 三光束谐振器(10)设置有三个沿着彼此并联对准并且在每个端部处的去耦区域(18)处并入的三个光束或尖齿(12,14,16),所述去耦区域又连接到周围的材料。 中心梁(14)是两个外梁(12,16)的宽度的两倍。 谐振元件的长度为15.5mm,厚度为0.25mm,波束宽度为2mm和1mm。 梁之间的距离为0.5 mm。 有限元分析预测了谐振器(10)的应力分布和本征频率的模态行为。 厚膜PZT元件(20,22)印刷在中心光束(14)的每个端部的分开的区域上,当谐振器(10)以其有利的振动模式工作时,存在最大应力。 一端的PZT元件(20)驱动振动,另一端的PZT元件(22)检测它们。 将PZT驱动和感测元件(20,22)定位在最大应力区域上使得有源压电层和谐振器之间的机械耦合程度最大化,以产生驱动力和感测信号。 3100及以上的非常高品质因素得到了体验。 此外,谐振器可以通过批量生产技术制造,同时保持高可靠性和再现性。