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1. 发明授权

US5457368A Mechanical/electrical displacement transducer 失效
标题翻译：机械/电气位移传感器
公开(公告)号：US5457368A
公开(公告)日：1995-10-10
申请号：US183280
申请日：1994-01-18
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01D1/18 , G01D5/14 , G01D5/165 , G01D5/18 , G01D5/241 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , H04R23/00 , G01R29/12 , H04R19/00
CPC分类号： G01B7/003 , G01D1/18 , G01D5/145 , G01D5/165 , G01D5/18 , G01D5/2412 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124 , H04R23/00
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes a sensor having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the area of the operative surface covered by an electrical/magnetic field producing member. The apparatus also includes an elongate, flexible band capable of producing an electric/magnetic field, where the band is attached at one end to the sensor to roll over and cover or unroll from over and uncover the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the area of the operative surface covered by the band and thus by the position and movement of the object.
摘要翻译：用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器和用于产生电输出信号的电路，该电输出信号的值取决于由电/磁场产生构件覆盖的操作表面的面积。该装置还包括能够产生电/磁场的细长的柔性带，其中带一端连接到传感器上，以便翻转并覆盖或展开作为其位移的物体的操作表面被测量被移动。因此，由电路产生的电输出信号的值取决于被带覆盖的操作表面的面积，并因此取决于物体的位置和移动。

2. 发明授权

US5394070A Sliding contact mechanical/electrical displacement transducer 失效
标题翻译：滑动接触机械/电位移传感器
公开(公告)号：US5394070A
公开(公告)日：1995-02-28
申请号：US990369
申请日：1993-03-24
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01B7/30 , G01D5/14 , G01D5/18 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , G01R29/12 , H04R19/00
CPC分类号： G01D5/145 , G01B7/003 , G01D5/18 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes an array of sensors having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the disposition of an electrical/magnetic field producing member along the sensor array. The field producing member is disposed to contact and slide over the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the position of the field producing member along the sensor array and thus by the position and movement of the object.
摘要翻译：用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器阵列和用于产生电输出信号的电路，该电输出信号的值取决于沿着传感器阵列的电场/磁场产生部件的布置。场产生部件设置成随着要测量其位移的物体移动而接触并滑动在操作表面上。因此，由电路产生的电输出信号的值取决于场产生部件沿着传感器阵列的位置，并因此取决于物体的位置和移动。

3. 发明授权

US5302886A Mechanical/electrical displacement transducer 失效
标题翻译：机械/电气位移传感器
公开(公告)号：US5302886A
公开(公告)日：1994-04-12
申请号：US28767
申请日：1993-03-09
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01D5/12 , G01D5/14 , G01D5/16 , G01D5/165 , G01D5/24 , G01D5/249 , G01D5/25 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , G01R29/12 , H04R19/00
CPC分类号： G01D5/14 , G01B7/003 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes a sensor having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the area of the operative surface covered by an electrical/magnetic field producing member. The apparatus also includes an elongate, flexible band capable of producing an electric/magnetic field, where the band is attached at one end to the sensor to roll over and cover or unroll from over and uncover the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the area of the operative surface covered by the band and thus by the position and movement of the object.
摘要翻译：用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器和用于产生电输出信号的电路，该电输出信号的值取决于由电/磁场产生构件覆盖的操作表面的面积。该装置还包括能够产生电/磁场的细长的柔性带，其中带一端连接到传感器上，以便翻转并覆盖或展开作为其位移的物体的操作表面被测量被移动。因此，由电路产生的电输出信号的值取决于被带覆盖的操作表面的面积，并因此取决于物体的位置和移动。

4. 发明授权

US5109701A Field-based movement sensor 失效
标题翻译：基于场的运动传感器
公开(公告)号：US5109701A
公开(公告)日：1992-05-05
申请号：US686608
申请日：1991-04-17
申请人： Stephen C. Jacobsen , John E. Wood
发明人： Stephen C. Jacobsen , John E. Wood
IPC分类号： G01L1/00 , G01L1/14 , G01L1/22
CPC分类号： G01L1/005 , G01L1/14 , G01L1/2293
摘要： A field-based movement sensor adapted for measuring strain along a certain axis in an object on which the sensor is attached. The sensor includes a substrate having a working surface and formed with a pair of fingers projecting from a first direction, and a third finger projecting from a direction oppposite the first direction, to a position between the pair of fingers. The pair of fingers and third finger extend generally perpendicular to the axis along which strain is to be measured, with the pair of fingers being moveable with respect to the third finger along the axis when the strain occurs. An electrically charged element for producing an electric field is disposed on the working surface of the third finger, and a pair of field-effect transistors (FETS) are each disposed on a working surface of a different one of the pair of fingers. As the object is subjected to strain causing the pair of fingers to move relative to the third finger, the variations in the strength of the electric field from the charged elements to the FETS is determined and this provides a measure of the variation in distance between the third finger and the pair of fingers and this, in turn, provides a measure of the strain in the object to which the substrate is attached.
摘要翻译：一种基于场的运动传感器，适用于测量传感器附着在物体上的特定轴线的应变。传感器包括具有工作表面并且形成有从第一方向突出的一对手指的基板和从与第一方向相反的方向突出的第三指状物到一对指状物之间的位置。一对指状物和第三指状物大体上垂直于待测应变的轴线延伸，当应变发生时，一对手指可相对于第三指状物沿轴线移动。用于产生电场的带电元件设置在第三手指的工作表面上，并且一对场效应晶体管（FETS）分别设置在一对指状物的不同的一个的工作表面上。当物体受到使一对手指相对于第三根手指移动的应变时，确定了从充电元件到FETS的电场强度的变化，并且这提供了第三手指和一对手指，这又提供了测量衬底附着到的物体中的应变。

5. 发明授权

US4767973A Systems and methods for sensing position and movement 失效
标题翻译：用于感测位置和运动的系统和方法
公开(公告)号：US4767973A
公开(公告)日：1988-08-30
申请号：US70349
申请日：1987-07-06
申请人： Stephen C. Jacobsen , Richard P. Phillips , John E. Wood
发明人： Stephen C. Jacobsen , Richard P. Phillips , John E. Wood
IPC分类号： G01B7/00 , G01B7/14 , G01D5/18 , G01D5/241 , G01R29/12 , G01V3/08 , G11B21/24 , H04R19/00 , H04R23/00
CPC分类号： G01D5/18 , H04R19/00 , H04R23/006
摘要： Sensor systems and methods for detecting the position and/or movement of an object in multiple degrees of freedom. The sensor system of the present invention comprises at least one field-effect transistor (FET), the geometrical configuration of the FET being selected so as to provide the desired sensitivity. The FET is preferably provided with a conductive gate adjacent to but insulated from the channel region of the FET. An object whose position and/or movement is to be detected is prepared such that an electric field emanates from the object.The FET is brought into the vicinity of the object, and the electric field emanating from the object interacts with the gate and/or channel region of the FET so as to modify the magnitude of the electrical current flowing through the channel region. The current through the channel region is detected and is used to obtain information about the position and movement of the object relative to the channel region of the FET. By positioning a plurality of substantially coplanar FETs in the vicinity of the object, the position and/or movement of the object in any desired number of degrees of freedom can be detected and monitored.
摘要翻译：用于以多个自由度检测物体的位置和/或运动的传感器系统和方法。本发明的传感器系统包括至少一个场效应晶体管（FET），选择FET的几何结构以提供期望的灵敏度。 FET优选地设置有与FET的沟道区域相邻但绝缘的导电栅极。准备要检测其位置和/或移动的物体，使得电场从物体发出。 FET被带到物体附近，并且从物体发出的电场与FET的栅极和/或沟道区相互作用，以便改变流过沟道区的电流的大小。检测通过通道区域的电流，并且用于获得关于物体相对于FET的沟道区域的位置和移动的信息。通过将多个基本上共面的FET定位在物体附近，可以检测和监视物体在任何所需数量的自由度中的位置和/或移动。

6. 发明授权

US5106455A Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography 失效
标题翻译：使用非平面曝光光刻法制造微结构的方法和装置
公开(公告)号：US5106455A
公开(公告)日：1992-04-21
申请号：US647659
申请日：1991-01-28
申请人： Stephen C. Jacobsen , David L. Wells , Clark Davis , John E. Wood
发明人： Stephen C. Jacobsen , David L. Wells , Clark Davis , John E. Wood
IPC分类号： B23K26/00 , B23K15/00 , B23K17/00 , B23K26/08 , B81B1/00 , B81C99/00 , G01P15/08 , G01P15/09 , G01P15/18 , G03F7/20 , G05B19/18 , G12B1/00 , H01L21/00 , H01L21/027 , H01L21/302 , H01L21/3065 , H01L21/48 , H01L21/68 , H01L41/09
CPC分类号： H01L21/67011 , B23K15/002 , B23K17/00 , B23K26/08 , B23K26/0884 , G01P15/08 , G01P15/0922 , G01P15/18 , G03F7/70691 , G05B19/186 , G12B1/00 , H01L21/4846 , H01L21/68
摘要： Apparatus for non-planar treatment of a workpiece utilizing exposure beam lithography includes a vacuum chamber, an exposure beam generator such as an electron beam generator disposed in the chamber for directing a beam towards a work location, a chuck disposed in the chamber for holding and positioning the workpiece at the work location, a rotary motorized stage disposed in the chamber and responsive to first control signals for selectively rotating the chuck, and thus the workpiece, to thereby expose different areas of the workpiece to the beam, and a linear motorized stage disposed in the chamber on which the rotary stage is mounted, said linear motor being responsive to second control signals for selectively moving the rotary stage and thus the chuck and workpiece in a linear direction which is generally parallel with the axis of rotation of the rotary stage. The workpiece is thus exposed over additional areas by operation of the linear stage. A controller supplies first and second control signals to the rotary stage and linear stage respectively to selectively effect the operation thereof.

7. 发明授权

US5621318A Mechanical/electrical displacement transducer 失效
标题翻译：机械/电气位移传感器
公开(公告)号：US5621318A
公开(公告)日：1997-04-15
申请号：US473717
申请日：1995-06-07
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01D1/18 , G01D5/14 , G01D5/165 , G01D5/18 , G01D5/241 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , H04R23/00 , G01B7/14 , H03M1/22
CPC分类号： G01B7/003 , G01D1/18 , G01D5/145 , G01D5/165 , G01D5/18 , G01D5/2412 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124 , H04R23/00
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes a sensor having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the area of the operative surface covered by an electrical/magnetic field producing member. The apparatus also includes an elongate, flexible band capable of producing an electric/magnetic field, where the band is attached at one end to the sensor to roll over and cover or unroll from over and uncover the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the area of the operative surface covered by the band and thus by the position and movement of the object.
摘要翻译：用于测量物体的位移和移动的位移测量装置包括具有操作表面的传感器和用于产生电输出信号的电路，该电输出信号的值取决于由电/磁场产生构件覆盖的操作表面的面积。该装置还包括能够产生电/磁场的细长的柔性带，其中带一端连接到传感器上，以便翻转并覆盖或展开作为其位移的物体的操作表面被测量被移动。因此，由电路产生的电输出信号的值取决于被带覆盖的操作表面的面积，并因此取决于物体的位置和移动。

8. 发明授权

US4995261A Field-based movement sensing apparatus 失效
标题翻译：基于场的运动感测装置
公开(公告)号：US4995261A
公开(公告)日：1991-02-26
申请号：US424406
申请日：1989-10-20
申请人： Stephen C. Jacobsen , John E. Wood
发明人： Stephen C. Jacobsen , John E. Wood
IPC分类号： G01L1/00 , G01L1/14 , G01L1/22
CPC分类号： G01L1/14 , G01L1/005 , G01L1/2293
摘要： A transducer for measuring strain in an object on which the transducer is placed includes a flexible, generally planar frame member for placement on the object. The frame member, in turn, includes a pair of generally parallel beams, one of which is moveable with respect to the other when the object is subjected to strain, and a plurality of spaced-apart laterally flexible connecting beams extending between the pair of beams. The transducer also includes a force field emitter disposed on the one moveable beam for producing a force field which diminishes in strength with distance from the force field emitter. A spacer plate is disposed on the other of said parallel beams and a substrate is disposed on the spacer plate so as to be be positioned above, but spaced from the frame member. A detection element is disposed on the underside of the substrate generally above the force field emitter for detecting the presence of the force field and for producing signals representing force field strength and thus the distance of the detecting element from the force field emitter.
摘要翻译：用于测量放置换能器的物体中的应变的换能器包括用于放置在物体上的柔性大体平面的框架构件。框架构件又包括一对大致平行的梁，当物体受到应变时，其一个可相对于另一个移动;以及多个间隔开的横向柔性的连接梁，该连接梁在该对梁。换能器还包括设置在一个可移动梁上的力场发射器，用于产生强力场，该力场随距离力场发射器的距离而减小。间隔板设置在所述平行光束的另一个上，并且衬底设置在间隔板上，以便被定位在框架构件的上方但与框架构件隔开。检测元件通常位于力场发射器的上方，用于检测力场的存在并用于产生表示力场强度的信号，从而产生检测元件距离力场发射器的距离。

9. 发明授权

US5557185A Mechanical/electrical displacement transducer 失效
公开(公告)号：US5557185A
公开(公告)日：1996-09-17
申请号：US488068
申请日：1995-06-07
申请人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
发明人： Stephen C. Jacobsen , Michael G. Mladejovsky , John E. Wood
IPC分类号： G01B7/00 , G01D1/18 , G01D5/14 , G01D5/165 , G01D5/18 , G01D5/241 , G01D5/34 , G01L1/00 , G01P15/093 , G01P15/12 , H04R23/00 , G01R29/12 , H04R19/00
CPC分类号： G01B7/003 , G01D1/18 , G01D5/145 , G01D5/165 , G01D5/18 , G01D5/2412 , G01D5/34 , G01L1/005 , G01P15/093 , G01P15/12 , G01P15/124 , H04R23/00
摘要： Displacement measuring apparatus for measuring the displacement and movement of an object includes a sensor having an operative surface and circuitry for producing an electrical output signal whose value is dependent upon the area of the operative surface covered by an electrical/magnetic field producing member. The apparatus also includes an elongate, flexible band capable of producing an electric/magnetic field, where the band is attached at one end to the sensor to roll over and cover or unroll from over and uncover the operative surface as the object whose displacement is to be measured is moved. The value of the electrical output signal produced by the circuitry is thus dependent upon the area of the operative surface covered by the band and thus by the position and movement of the object.

10. 发明授权

US4964306A Field-based movement sensor 失效
标题翻译：基于场的运动传感器
公开(公告)号：US4964306A
公开(公告)日：1990-10-23
申请号：US332593
申请日：1989-04-03
申请人： Stephen C. Jacobsen , John E. Wood
发明人： Stephen C. Jacobsen , John E. Wood
IPC分类号： G01P15/08 , G01B7/00 , G01B7/16 , G01L1/00 , G01L1/14 , G01L1/22
CPC分类号： G01L1/005 , G01L1/14 , G01L1/2293
摘要： A field-based movement sensor adapted for measuring strain along a certain axis in an object on which the sensor is attached. The sensor includes a substrate having a working surface and formed with a pair of fingers projecting from a first direction, and a third finger projecting from a direction opposite the first direction, to a position between the pair of fingers. The pair of fingers and third finger extend generally perpendicular to the axis along which strain is to be measured, with the pair of fingers being moveable with respect to the third finger along the axis when the strain occurs. An electrically charged element for producing an electric field is disposed on the working surface of the third finger, and a pair of field-effect transistors (FETS) are each disposed on a working surface of a different one of the pair of fingers. As the object is subjected to strain causing the pair of fingers to move relative to the third finger, the variations in the strength of the electric field from the charged elements to the FETS is determined and this provides a measure of the variation in distance between the third finger and the pair of fingers and this, in turn, provides a measure of the strain in the object to which the substrate is attached.

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