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1. 发明申请

US20120027543A1 METHOD AND DEVICE FOR INTRODUCING AND REMOVING SUBSTRATES 失效
标题翻译：用于引导和移除基板的方法和装置
公开(公告)号：US20120027543A1
公开(公告)日：2012-02-02
申请号：US13138713
申请日：2010-04-23
申请人： Michael Reising , Stefan Kempf
发明人： Michael Reising , Stefan Kempf
IPC分类号： B65G49/05 , H01L21/683 , H01L21/677
CPC分类号： H01L21/67751 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport means (4). A collection container (3) is located in said lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.
摘要翻译：本发明描述了一种用于引入和去除衬底的方法和装置。基板（5）由输送装置（4）输送到锁（2）中。收集容器（3）位于基底（5）下面的所述锁中，用于收集可能的底物碎片（19）。一旦锁（2）淹没，基板（5）与收集容器（3）和锁盖（18）一起被移除。锁定盖（18）和收集容器（3）围绕基板（5）形成几乎闭合的盒子。在更换基板（5）并且已经排空收集容器（3）之后，将新的基板（5）与收集容器一起引入。所有步骤都在机器周期中进行，以确保有效的生产过程。

2. 发明申请

US20120027952A1 TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME 有权
标题翻译：具有防水密封框架的运输设备
公开(公告)号：US20120027952A1
公开(公告)日：2012-02-02
申请号：US13138714
申请日：2010-04-23
申请人： Michael Reising , Stefan Kempf , Georg Roth
发明人： Michael Reising , Stefan Kempf , Georg Roth
IPC分类号： B65G49/00 , B65G29/00 , C23C16/513 , B65G49/05
CPC分类号： H01L21/67126 , H01L21/6719 , H01L21/67742
摘要： The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
摘要翻译：本发明描述了一种用于将基板（5）输送到可以以真空密封方式临时分离的工作区域（2,3,22）的装置和相应的方法。传送装置（4）将平面（XY）中的基板（5）传送到室（1）的限定的工作区域（2,3,22）。传送装置（4）具有可偏转的密封框架（6），其可相对于XY平面垂直于Z方向移动。密封框架（6）在Z方向上具有两个相对的密封面（10,11）。通过将闭合装置（16,21,24）压靠在第一密封表面（10,11）上，从而将第二密封表面（11,10）压靠在室壁（32,31）上，工作区域的空间（1）的腔室（2,3,22）可被密封。

3. 发明授权

US08740536B2 Method and device for introducing and removing substrates 失效
标题翻译：用于引入和去除衬底的方法和装置
公开(公告)号：US08740536B2
公开(公告)日：2014-06-03
申请号：US13138713
申请日：2010-04-23
申请人： Michael Reising , Stefan Kempf
发明人： Michael Reising , Stefan Kempf
IPC分类号： H01L21/67
CPC分类号： H01L21/67751 , H01L21/67126 , H01L21/6719 , H01L21/67201
摘要： The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport element (4). A collection container (3) is located in the lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.
摘要翻译：本发明描述了一种用于引入和去除衬底的方法和装置。基板（5）通过运输元件（4）运输到锁（2）中。收集容器（3）位于基底（5）下面的锁中，用于收集可能的底物碎片（19）。一旦锁（2）淹没，基板（5）与收集容器（3）和锁盖（18）一起被移除。锁定盖（18）和收集容器（3）围绕基板（5）形成几乎闭合的盒子。在更换基板（5）并且已经排空收集容器（3）之后，将新的基板（5）与收集容器一起引入。所有步骤都在机器周期中进行，以确保有效的生产过程。

4. 发明授权

US5876082A Device for gripping and holding substrates 失效
标题翻译：夹持和保持基板的装置
公开(公告)号：US5876082A
公开(公告)日：1999-03-02
申请号：US801644
申请日：1997-02-18
申请人： Stefan Kempf , Michael Reising
发明人： Stefan Kempf , Michael Reising
IPC分类号： C23C14/50 , C23C14/56 , G11B7/26 , G11B17/02 , G11B23/00 , H01L21/687 , B23Q3/08
CPC分类号： H01L21/68721 , C23C14/50 , C23C14/566 , G11B23/00 , H01J37/32733 , H01J37/34 , H01L21/68771 , G11B17/02 , G11B7/26
摘要： A device 1 for gripping and holding substrates 2 with one or several substrate holders 5 arranged in a vacuum chamber 4, 4', 4" and one or several displaceably arranged grippers 3, which can be displaced into a first position through the action of an operating pressure or against the action of a spring 6, and into a second position through the action of a diaphragm 7, which can be exposed to a pneumatic pressure P.sub.a and/or to an operating element 8 cooperating with it, wherein the substrate 2 is held when the diaphragm is in a first position and the substrate 2 is released for being further transported when the diaphragm is in a second position. The diaphragm 7 is integrated into the vacuum chamber in such a way that in an operating position it is exposed to atmospheric pressure P.sub.a on the one side 9 and on the other side 10 to vacuum pressure P.sub.v, and in a second position is exposed to vacuum pressure P.sub.v on both sides.
摘要翻译：用于夹持和保持基板2的装置1，其具有布置在真空室4,4'和4“中的一个或多个基板保持器5和一个或多个可移位布置的夹纱器3，其可以通过操作压力或抵抗弹簧6的作用，并且通过可以暴露于气动压力Pa和/或与其配合的操作元件8的隔膜7的作用进入第二位置，其中基板2 当隔膜处于第一位置时被保持，并且当隔膜处于第二位置时基板2被释放以进一步输送。隔膜7以这样的方式集成到真空室中，使得在操作位置，其在一侧9和另一侧10暴露于大气压力Pa至真空压力Pv，并且在第二位置暴露于真空双方压力Pv。

5. 发明申请

US20110195199A1 PROCESS AND DEVICE FOR SOLDERING IN THE VAPOR PHASE 审中-公开
标题翻译：用于在蒸气相中焊接的工艺和装置
公开(公告)号：US20110195199A1
公开(公告)日：2011-08-11
申请号：US12737900
申请日：2009-08-26
申请人： Marco Huber , Wolfgang Becker , Patrick Binkowska , Bemhard Cord , Oliver Hohn , Stefan Kempf , Michael Reising , Björn Roos , Edgar Rüth , Eggo Sichmann , Peter Wohlfart
发明人： Marco Huber , Wolfgang Becker , Patrick Binkowska , Bemhard Cord , Oliver Hohn , Stefan Kempf , Michael Reising , Björn Roos , Edgar Rüth , Eggo Sichmann , Peter Wohlfart
IPC分类号： H01L31/18 , C23C16/50 , C23C16/44
CPC分类号： H01L21/67213 , C23C16/54 , H01L21/67167
摘要： The invention provides a coating system for coating substrates in a cyclic mode. The process stations of the coating system are disposed in a circular fashion. A handling mechanism is provided for transferring the substrates between the process stations. The process stations comprise a lock for loading and unloading the substrates, at least two coating chambers, each of which comprises a plasma source for stationary coating of the substrate, and preferably a heating station.
摘要翻译：本发明提供了一种用于以循环模式涂覆基材的涂布系统。涂布系统的处理站以圆形方式设置。提供了处理机构，用于在处理站之间传送基板。处理站包括用于装载和卸载衬底的锁，至少两个涂覆室，每个涂覆室包括用于衬底的固定涂覆的等离子体源，并且优选地为加热站。

6. 发明授权

US08740537B2 Transport device having a deflectable sealing frame 有权
标题翻译：运输装置具有可偏转的密封框架
公开(公告)号：US08740537B2
公开(公告)日：2014-06-03
申请号：US13138714
申请日：2010-04-23
申请人： Michael Reising , Stefan Kempf , Georg Roth
发明人： Michael Reising , Stefan Kempf , Georg Roth
IPC分类号： H01L21/67
CPC分类号： H01L21/67126 , H01L21/6719 , H01L21/67742
摘要： A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
摘要翻译：一种用于将基板（5）输送到可以以真空密封方式临时分离的工作区域（2,3,22）的装置以及相应的方法。输送元件（4）将平面（XY）中的基板（5）输送到室（1）的限定的工作区域（2,3,22）。运输元件（4）具有可偏转的密封框架（6），其可以相对于XY平面垂直于Z方向移动。密封框架（6）在Z方向上具有两个相对的密封面（10,11）。通过将闭合元件（16,21,24）压靠在第一密封表面（10,11）上，并且因此将第二密封表面（11,10）压靠在室壁（32,31）上，工作区域的空间（1）的腔室（2,3,22）可被密封。

7. 发明授权

US5669652A Apparatus for gripping a flat substrate 失效
标题翻译：用于夹持平坦基底的装置
公开(公告)号：US5669652A
公开(公告)日：1997-09-23
申请号：US691138
申请日：1996-08-01
申请人： Michael Reising , Stefan Kempf , Michael Konig
发明人： Michael Reising , Stefan Kempf , Michael Konig
IPC分类号： B65G47/90 , C23C14/50 , B25J15/10
CPC分类号： B65G47/90 , B25J15/0246 , C23C14/50
摘要： Several finger-like grippers (4) are held and guided in openings or holes (21) in the head part (6) of a housing (20) so they can pivot about axes which are in a common plane transverse to the longitudinal axis (L) of the housing (20). Permanent magnets (11, 12) fixed to the inner ends of the grippers (4) cooperate with an electromagnet (13) provided in the housing (20) above the magnets (11, 12), the magnetic field axis of the electromagnet coinciding with the longitudinal axis (L) of the housing (20). The electromagnet moves the inner ends of the grippers (11, 12) back and forth between two stops (16, 17) depending on the polarity of the electromagnet (13).
摘要翻译：几个指状的夹持器（4）被保持并被引导到壳体（20）的头部部分（6）中的开口或孔（21）中，使得它们能够绕垂直于纵向轴线的共同平面中的轴线枢转 L）。固定在夹持器（4）的内端的永磁体（11,12）与设置在磁体（11,12）上方的壳体（20）中的电磁体（13）配合，电磁铁的磁场轴线与壳体（20）的纵向轴线（L）。电磁铁根据电磁铁（13）的极性使夹持器（11,12）的内端在两个止动件（16,17）之间来回移动。

8. 发明授权

US5612068A Apparatus for the transfer of substrates 失效
标题翻译：用于转移衬底的装置
公开(公告)号：US5612068A
公开(公告)日：1997-03-18
申请号：US350684
申请日：1994-12-07
申请人： Stefan Kempf , Eggo Sichmann
发明人： Stefan Kempf , Eggo Sichmann
IPC分类号： B65G49/07 , G11B7/26 , H01L21/00 , H01L21/677 , B29C45/06
CPC分类号： H01L21/67161 , G11B7/265 , H01L21/67196 , H01L21/68764 , H01L21/68771 , Y10S414/141 , Y10S425/81
摘要： In an apparatus for the transfer of substrates (9) from an initial station (3) through several process stations (4 to 8) and back to this initial station (3), manipulators (10 to 14) having pivoting gripper arms (15 to 19) and carousel transfer systems (20,21) for the transfer of the substrates (9) are provided. One of the carousels (20) provided with substrate holders (22) cooperates both with a two-armed first manipulator (11) and with a two-armed second manipulator (10). The second manipulator (10) lifts several substrates (9) simultaneously from the first carousel (20) in one period of time and feeds them to the corresponding second process station (5) which is configured for the simultaneous processing of several substrates. The second manipulator (11), in the same period of time, lifts one substrate (9) at a time from the first carousel (20) in several swings of its two gripper arms (16,16') and feeds them to the first process station (4) for the processing of one substrate at a time and carries them back from this process station (4) onto the first carousel (20). Two injection molding machines can be associated with the first carousel (20) and can feed the substrates directly through an additional manipulator.
摘要翻译：在用于将基板（9）从初始台（3）传送到几个处理站（4至8）并且返回到该初始站（3）的装置中，具有枢转夹持臂（15至15）的操纵器（10至14）提供用于传送基板（9）的转盘传送系统（20,21）。设置有基板保持器（22）的转盘（20）之一与双臂第一操纵器（11）和双臂第二操纵器（10）配合。第二操纵器（10）在一段时间内同时从第一转盘（20）提升多个基板（9）并将其馈送到相应的第二处理站（5），该第二处理站被配置为同时处理若干基板。第二操纵器（11）在相同的时间段内，在其两个夹持臂（16,16'）的几个摆动中一次从第一转盘（20）提起一个基板（9）并将它们馈送到第一处理站（4），用于一次处理一个基板，并将其从该处理站（4）返回到第一转盘（20）上。两个注塑机可以与第一转盘（20）相关联，并且可以通过附加的操纵器直接供给基板。

9. 发明授权

US5451130A Method and apparatus for the step-by-step and automatic loading and unloading of a coating apparatus 失效
标题翻译：用于逐步自动装载和卸载涂布装置的方法和装置
公开(公告)号：US5451130A
公开(公告)日：1995-09-19
申请号：US267793
申请日：1994-06-28
申请人： Stefan Kempf
发明人： Stefan Kempf
IPC分类号： G11B17/24 , B65G47/80 , B65G47/90 , B65G49/07 , C23C14/56 , H01L21/687 , B65G57/00
CPC分类号： C23C14/56 , H01L21/68707 , Y10S414/139 , Y10S414/141
摘要： A first turntable (4) has a plurality of posts (6) equidistantly distributed and arranged in a circle on the turntable (4), wherein a plurality of substrates (7) can be stacked on each post (6). Stationary loading (9) and unloading stations (10 11) are provided and the distance between each pair of adjacent stations (9, 10, 11) corresponds to the distance between each pair of adjacent posts (6), the first turntable being rotated stepwise so that each post can be stopped successively at adjacent stations. A second turntable (12) is rotated stepwise through a loading station (15), a transfer station (16) and an unloading station (17). A loading arm transfers substrates from the loading station of the first turntable to the loading station of the second turntable, a transfer arm transfers the substrates from the transfer station to a coating station, and an unloading arm transfers coated substrates from the unloading station of the second turntable to either of the two unloading stations of the first turntable. A control system (33) includes a sensor (29), a counting device (30) and a servo motor (31), the servo motor (31) driving the unloading arm (21), the unloading station which receives a substrate being selected by the control system (33).
摘要翻译：第一转盘（4）具有多个等距分布并且设置在转台（4）上的圆周上的柱（6），其中多个基板（7）可以堆叠在每个支柱（6）上。提供固定装载（9）和卸载站（10 11），并且每对相邻站（9,10,11）之间的距离对应于每对相邻站（6）之间的距离，第一转台逐步旋转使得每个帖子可以在相邻站点连续停止。第二转台（12）通过装载站（15），转运站（16）和卸载站（17）逐步旋转。装载臂将基板从第一转台的装载站传送到第二转台的装载站，传送臂将传送站从传送站传送到涂布站，卸载臂将涂覆的基板从卸载站第二转盘到第一转盘的两个卸载站中的任一个。控制系统（33）包括传感器（29），计数装置（30）和伺服电动机（31），驱动卸载臂（21）的伺服电动机（31），接收正在选择的衬底的卸载站通过控制系统（33）。

10. 发明授权

US08365579B2 Knock detection system and method for an amplifier control for a knock signal 有权
标题翻译：用于敲击信号的放大器控制的敲击检测系统和方法
公开(公告)号：US08365579B2
公开(公告)日：2013-02-05
申请号：US12733991
申请日：2008-09-24
申请人： Kai Dierssen , Stefan Kempf , Jochen Goebels , Federico Buganza , Anton Kantschar , Frédéric Gabel , Carsten Kluth , Oskar Torno , Werner Haeming , Robert Sloboda , Jan Boettger , Rudi Eichhorn , Andreas Meinken
发明人： Kai Dierssen , Stefan Kempf , Jochen Goebels , Federico Buganza , Anton Kantschar , Frédéric Gabel , Carsten Kluth , Oskar Torno , Werner Haeming , Robert Sloboda , Jan Boettger , Rudi Eichhorn , Andreas Meinken
IPC分类号： G01L23/22
CPC分类号： G01L23/225 , F02D35/027
摘要： An apparatus for furnishing an amplified sensor signal of a knock sensor, encompassing an analog amplifier for amplifying the sensor signal in accordance with a first definable gain factor; an analog/digital converter for digitizing the amplified sensor signal into a digitized sensor signal; a digital amplifier for amplifying the digitized sensor signal in accordance with a second definable gain factor; and a control unit in order to furnish the first and the second gain factor as a function of a baseline sound level of the sensor signal, the baseline sound level corresponding to the component of the solid-borne sound signal generated in normal operation without knocking.
摘要翻译：一种用于提供爆震传感器的放大的传感器信号的装置，包括用于根据第一可定义增益因子放大传感器信号的模拟放大器; 用于将放大的传感器信号数字化为数字化传感器信号的模拟/数字转换器; 数字放大器，用于根据第二可定义增益因子放大数字化的传感器信号; 以及控制单元，以便提供作为传感器信号的基线声级的函数的第一增益因子和第二增益因子，所述基线声级与在正常操作中产生的固体声音信号的分量相对应而不发生敲击。

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