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    • 1. 发明申请
    • TRANSPORT DEVICE HAVING A DEFLECTABLE SEALING FRAME
    • 具有防水密封框架的运输设备
    • US20120027952A1
    • 2012-02-02
    • US13138714
    • 2010-04-23
    • Michael ReisingStefan KempfGeorg Roth
    • Michael ReisingStefan KempfGeorg Roth
    • B65G49/00B65G29/00C23C16/513B65G49/05
    • H01L21/67126H01L21/6719H01L21/67742
    • The invention describes a device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport means (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport means (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure means (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
    • 本发明描述了一种用于将基板(5)输送到可以以真空密封方式临时分离的工作区域(2,3,22)的装置和相应的方法。 传送装置(4)将平面(XY)中的基板(5)传送到室(1)的限定的工作区域(2,3,22)。 传送装置(4)具有可偏转的密封框架(6),其可相对于XY平面垂直于Z方向移动。 密封框架(6)在Z方向上具有两个相对的密封面(10,11)。 通过将闭合装置(16,21,24)压靠在第一密封表面(10,11)上,从而将第二密封表面(11,10)压靠在室壁(32,31)上,工作区域的空间 (1)的腔室(2,3,22)可被密封。
    • 2. 发明授权
    • Method and device for introducing and removing substrates
    • 用于引入和去除衬底的方法和装置
    • US08740536B2
    • 2014-06-03
    • US13138713
    • 2010-04-23
    • Michael ReisingStefan Kempf
    • Michael ReisingStefan Kempf
    • H01L21/67
    • H01L21/67751H01L21/67126H01L21/6719H01L21/67201
    • The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport element (4). A collection container (3) is located in the lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.
    • 本发明描述了一种用于引入和去除衬底的方法和装置。 基板(5)通过运输元件(4)运输到锁(2)中。 收集容器(3)位于基底(5)下面的锁中,用于收集可能的底物碎片(19)。 一旦锁(2)淹没,基板(5)与收集容器(3)和锁盖(18)一起被移除。 锁定盖(18)和收集容器(3)围绕基板(5)形成几乎闭合的盒子。 在更换基板(5)并且已经排空收集容器(3)之后,将新的基板(5)与收集容器一起引入。 所有步骤都在机器周期中进行,以确保有效的生产过程。
    • 3. 发明授权
    • Device for gripping and holding substrates
    • 夹持和保持基板的装置
    • US5876082A
    • 1999-03-02
    • US801644
    • 1997-02-18
    • Stefan KempfMichael Reising
    • Stefan KempfMichael Reising
    • C23C14/50C23C14/56G11B7/26G11B17/02G11B23/00H01L21/687B23Q3/08
    • H01L21/68721C23C14/50C23C14/566G11B23/00H01J37/32733H01J37/34H01L21/68771G11B17/02G11B7/26
    • A device 1 for gripping and holding substrates 2 with one or several substrate holders 5 arranged in a vacuum chamber 4, 4', 4" and one or several displaceably arranged grippers 3, which can be displaced into a first position through the action of an operating pressure or against the action of a spring 6, and into a second position through the action of a diaphragm 7, which can be exposed to a pneumatic pressure P.sub.a and/or to an operating element 8 cooperating with it, wherein the substrate 2 is held when the diaphragm is in a first position and the substrate 2 is released for being further transported when the diaphragm is in a second position. The diaphragm 7 is integrated into the vacuum chamber in such a way that in an operating position it is exposed to atmospheric pressure P.sub.a on the one side 9 and on the other side 10 to vacuum pressure P.sub.v, and in a second position is exposed to vacuum pressure P.sub.v on both sides.
    • 用于夹持和保持基板2的装置1,其具有布置在真空室4,4'和4“中的一个或多个基板保持器5和一个或多个可移位布置的夹纱器3,其可以通过 操作压力或抵抗弹簧6的作用,并且通过可以暴露于气动压力Pa和/或与其配合的操作元件8的隔膜7的作用进入第二位置,其中基板2 当隔膜处于第一位置时被保持,并且当隔膜处于第二位置时基板2被释放以进一步输送。 隔膜7以这样的方式集成到真空室中,使得在操作位置,其在一侧9和另一侧10暴露于大气压力Pa至真空压力Pv,并且在第二位置暴露于真空 双方压力Pv。
    • 4. 发明申请
    • METHOD AND DEVICE FOR INTRODUCING AND REMOVING SUBSTRATES
    • 用于引导和移除基板的方法和装置
    • US20120027543A1
    • 2012-02-02
    • US13138713
    • 2010-04-23
    • Michael ReisingStefan Kempf
    • Michael ReisingStefan Kempf
    • B65G49/05H01L21/683H01L21/677
    • H01L21/67751H01L21/67126H01L21/6719H01L21/67201
    • The invention describes a method and a device for introducing and removing substrates. Substrates (5) are transported into a lock (2) by a transport means (4). A collection container (3) is located in said lock below the substrates (5) for collecting possible substrate fragments (19). The substrates (5) are removed together with the collection container (3) and the lock cover (18) once the lock (2) has been flooded. The lock cover (18) and the collection container (3) form an almost closed box around the substrates (5). After the substrates (5) have been replaced and the collection container (3) has been emptied, the new substrates (5) are introduced together with the collection container. All the steps are carried out in the machine cycle to ensure an effective production process.
    • 本发明描述了一种用于引入和去除衬底的方法和装置。 基板(5)由输送装置(4)输送到锁(2)中。 收集容器(3)位于基底(5)下面的所述锁中,用于收集可能的底物碎片(19)。 一旦锁(2)淹没,基板(5)与收集容器(3)和锁盖(18)一起被移除。 锁定盖(18)和收集容器(3)围绕基板(5)形成几乎闭合的盒子。 在更换基板(5)并且已经排空收集容器(3)之后,将新的基板(5)与收集容器一起引入。 所有步骤都在机器周期中进行,以确保有效的生产过程。
    • 6. 发明授权
    • Transport device having a deflectable sealing frame
    • 运输装置具有可偏转的密封框架
    • US08740537B2
    • 2014-06-03
    • US13138714
    • 2010-04-23
    • Michael ReisingStefan KempfGeorg Roth
    • Michael ReisingStefan KempfGeorg Roth
    • H01L21/67
    • H01L21/67126H01L21/6719H01L21/67742
    • A device for transporting a substrate (5) into a working area (2, 3, 22) which can be temporarily separated in a vacuum-tight manner, and a corresponding method. A transport element (4) transports a substrate (5) in the plane (XY) to a defined working area (2, 3, 22) of a chamber (1). The transport element (4) has a deflectable sealing frame (6) which can be moved in a Z-direction perpendicular with respect to the XY-plane. The sealing frame (6) has two opposing sealing surfaces (10, 11) in the Z-direction. By pressing a closure element (16, 21, 24) against a first sealing surface (10, 11) and thus pressing the second sealing surface (11, 10) against a chamber wall (32, 31), the space of the working area (2, 3, 22) of the chamber (1) can be sealed.
    • 一种用于将基板(5)输送到可以以真空密封方式临时分离的工作区域(2,3,22)的装置以及相应的方法。 输送元件(4)将平面(XY)中的基板(5)输送到室(1)的限定的工作区域(2,3,22)。 运输元件(4)具有可偏转的密封框架(6),其可以相对于XY平面垂直于Z方向移动。 密封框架(6)在Z方向上具有两个相对的密封面(10,11)。 通过将闭合元件(16,21,24)压靠在第一密封表面(10,11)上,并且因此将第二密封表面(11,10)压靠在室壁(32,31)上,工作区域的空间 (1)的腔室(2,3,22)可被密封。
    • 10. 发明授权
    • Printing machine with removable components
    • 印刷机具有可移动部件
    • US5787813A
    • 1998-08-04
    • US597464
    • 1996-02-02
    • Michael Reising
    • Michael Reising
    • B41F7/24B41F31/30B41F33/00B41F33/14
    • B41F33/0018B41F33/00B41P2233/20
    • A printing machine, particularly a sheet-fed offset printing machine, which has removable components, such as, in particular, inking-unit, dampening-unit or varnishing-unit rollers, is described. The printing machine includes an arrangement wherein it can be established, particularly via a control station of the printing machine, whether a component and which component is not properly installed. This measure is intended primarily to avoid malfunctions or even machine damage. This is achieved, according to the invention, in that the removable component has a permanent magnet which can be sensed by a sensor mounted fixedly relative to the frame of the printing machine at a point corresponding to the magnetic field produced by the permanent magnet. The signal or signals from one or more sensors are fed to an evaluation unit which determines the proper installation state from these signals.
    • 描述了具有可拆卸部件的打印机,特别是单张胶版印刷机,特别是上墨单元,润版单元或上光单元辊。 印刷机包括其特征在于可以通过印刷机的控制站建立组件以及哪个部件未正确安装的装置。 此措施主要是为了避免故障甚至机器损坏。 根据本发明,这是可以实现的,因为可拆卸部件具有永磁体,该永久磁体可以由在与永磁体产生的磁场相对应的点相对于印刷机的框架固定地安装的传感器来感测。 来自一个或多个传感器的信号或信号被馈送到评估单元,该评估单元从这些信号确定正确的安装状态。