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    • 3. 发明授权
    • Apparatus for mounting semiconductor chips
    • 用于安装半导体芯片的装置
    • US06898481B2
    • 2005-05-24
    • US10389722
    • 2003-03-13
    • Eugen MannhartReto Schubiger
    • Eugen MannhartReto Schubiger
    • H01L21/00G06F7/00
    • H01L21/67271H01L21/67259Y10T29/41
    • An apparatus for mounting semiconductor chips comprises a loading station for the presentation of substrates, a first transport system and a second transport system. The first transport system removes one substrate after the other from the loading station and passes them on to the second transport system which transports the substrates in steps to a dispensing or soldering station and to a bonding station. A sensor with two coils arranged at a distance to one another is arranged in such a way that one end of the substrate transported by the first transport system travels through a gap formed between the two coils. The signal delivered by the sensor is used to determine a control signal which indicates whether or not the first transport system should pass the substrate on to the second transport system.
    • 用于安装半导体芯片的装置包括用于呈现衬底的装载站,第一传送系统和第二传送系统。 第一运输系统从装载站中将一个基板相继地移除,并将它们传递到第二运输系统,该第二运输系统将基板逐步运输到分配或焊接站和粘合站。 布置有彼此间隔一定距离的两个线圈的传感器被布置成使得由第一传送系统传送的基板的一端穿过形成在两个线圈之间的间隙。 由传感器传递的信号用于确定控制信号,该控制信号指示第一传输系统是否应将衬底通过第二传输系统。