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    • 5. 发明授权
    • Solid state differential pressure sensor with overpressure stop and free
edge construction
    • 具有超压停止和自由边缘结构的固态差压传感器
    • US4905575A
    • 1990-03-06
    • US260237
    • 1988-10-20
    • Thomas A. KnechtAhmed NaumaanStanley E. Rud, Jr.
    • Thomas A. KnechtAhmed NaumaanStanley E. Rud, Jr.
    • G01L13/06F01B19/00G01L9/00
    • G01L9/0042F01B19/00
    • A solid state pressure sensor utilizes a brittle diaphragm made of a material such as silicon, which is mounted between base plates of glass, and which deflects in response to pressure. The base plates of glass can have recesses formed therein to receive the diaphragm and provide a full support across the diaphragm under overpressure conditions to prevent overstressing the diaphragm, or the diaphragm can have such contoured surfaces for forming overpressure stop surfaces against the facing base plate. The diaphragm has grooves defining a central portion that deflects, and whereby the grooves will form webs joining the central portion to an outer rim so that the diaphragm acts similarly to a "free edge" diaphragm in its deflection characteristics. The grooves defining the webs can have various configurations for achieving the results desired.
    • 固态压力传感器利用由诸如硅的材料制成的脆性膜片,其安装在玻璃基板之间,并且响应于压力而偏转。 玻璃基板可以具有形成在其中的凹部以容纳隔膜并且在超压条件下跨隔膜提供完全支撑,以防止膜片过度应力,或者隔膜可以具有用于将相对于相对的基板形成超压止动表面的轮廓表面。 隔膜具有限定中心部分的凹槽,其中心部分偏转,并且由此凹槽将形成将中心部分连接到外缘的腹板,使得隔膜在其偏转特性中类似于“自由边缘”隔膜。 限定腹板的凹槽可具有用于实现所需结果的各种结构。
    • 8. 发明授权
    • Multiple range transition method and apparatus for process control
sensors
    • 用于过程控制传感器的多范围转换方法和装置
    • US6047244A
    • 2000-04-04
    • US986047
    • 1997-12-05
    • Stanley E. Rud, Jr.
    • Stanley E. Rud, Jr.
    • G01D3/024G01L19/02G05B19/042G01P21/00H04L27/04
    • G05B19/0423G01D3/024G01L19/02
    • A sensor system includes a first sensor for sensing a parameter in a first sensing range and providing a first sensor signal indicative of the parameter. A second sensor senses the parameter in a second sensing range and provides a second sensor signal indicative of the parameter. The second sensing range is larger than the first sensing range and the first and second sensing ranges overlap in a transition overlap region. A sensor output device provides a sensor output signal based on the first and second sensor signals by blending components of the first and second sensor signals according to a blending function such that the sensor output signal is single valued, has no induced hysteresis and is continuously differentiable.
    • 传感器系统包括用于感测第一感测范围中的参数并提供指示参数的第一传感器信号的第一传感器。 第二传感器在第二感测范围内感测参数,并提供指示参数的第二传感器信号。 第二感测范围大于第一感测范围,并且第一和第二感测范围在过渡重叠区域中重叠。 传感器输出装置通过根据混合功能混合第一和第二传感器信号的分量来提供基于第一和第二传感器信号的传感器输出信号,使得传感器输出信号是单值的,没有感应滞后并且是连续可微分的 。