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    • 6. 发明授权
    • Silicon side by side coplanar pressure sensors
    • 硅并排共面压力传感器
    • US4790192A
    • 1988-12-13
    • US100488
    • 1987-09-24
    • Thomas A. KnechtMark G. Romo
    • Thomas A. KnechtMark G. Romo
    • G01L9/00G01L7/08G01L9/06
    • G01L19/147G01L19/0038G01L19/143G01L19/148G01L9/0054Y10S73/04
    • A pressure sensor that provides for multiple diaphragm sensing regions in a side by side configuration which can be formed into a stacked monolithic batch fabricated form. The multiple pressure sensor can be constructed to sense differential or absolute pressure as desired. In preferred forms of the invention, the pressure inlets are all on the same side of the monolithic structure to easily isolate the corrosive pressure media from the sensing means, which as shown comprise strain gage sensors on the sensing diaphragms as well as from the conductors carrying signals from the sensing means. The variable strain gage resistors on the sensor diaphragms are segregated from the media in several differet ways using isolating layers. The stacked sensor configuration insures that the device can be batched fabricated so that a number of sensors can be formed on chips that are stacked and bonded together, and then separated into individual sensors.
    • 压力传感器,其以并排构造提供多个光阑感测区域,其可以形成为堆叠的单片批量制造形式。 可以构造多压力传感器以根据需要感测差压或绝对压力。 在本发明的优选形式中,压力入口都在整体结构的同一侧,以容易地将腐蚀性压力介质与感测装置隔离,如图所示,感测膜片上的应变计传感器以及承载的导体 来自感测装置的信号。 传感器隔膜上的可变应变计电阻器使用隔离层以几种不同的方式与介质隔离。 层叠的传感器构造确保了可以批量地制造器件,使得可以在堆叠并结合在一起的芯片上形成多个传感器,然后分离成单独的传感器。
    • 8. 发明申请
    • DIFFERENTIAL PRESSURE SENSOR ISOLATION IN A PROCESS FLUID PRESSURE TRANSMITTER
    • 过程流体压力变送器中的差压传感器分离
    • US20090078054A1
    • 2009-03-26
    • US11903068
    • 2007-09-20
    • Mark G. Romo
    • Mark G. Romo
    • G01L9/00
    • G01L13/026G01L19/04G01L19/0645
    • A differential pressure transmitter includes first and second process fluid inlets. A differential pressure sensor is disposed within the transmitter and has first and second sensor inlets. A first isolator diaphragm is located proximate the first process fluid inlet and is operably coupled to the first sensor inlet through a first fill fluid volume. A second isolator diaphragm is located proximate the second process fluid inlet and is operably coupled to the second sensor inlet through a second fill fluid volume. Measurement circuitry is operably coupled to the differential pressure sensor and configured to measure an electrical parameter of the sensor and provide an indication of the measured parameter. A third fluid volume substantially surrounds the differential pressure sensor. The third fluid volume exerts a compressive force on the differential pressure sensor.
    • 差压变送器包括第一和第二过程流体入口。 差压传感器设置在变送器内,并具有第一和第二传感器入口。 第一隔离隔膜位于第一工艺流体入口附近,并且通过第一填充流体体积可操作地联接到第一传感器入口。 第二隔离膜隔膜位于第二过程流体入口附近,并且通过第二填充流体体积可操作地联接到第二传感器入口。 测量电路可操作地耦合到差压传感器并且被配置为测量传感器的电参数并提供测量参数的指示。 第三流体体积基本上围绕差压传感器。 第三流体体积在压差传感器上施加压缩力。
    • 10. 发明申请
    • PRESSURE TRANSMITTER WITH PRESSURE SENSOR MOUNT
    • 带压力传感器的压力变送器
    • US20110079086A1
    • 2011-04-07
    • US12571611
    • 2009-10-01
    • Mark G. Romo
    • Mark G. Romo
    • G01L7/00
    • G01L19/146G01L19/0007
    • A pressure transmitter with pressure sensor mount includes pressure measurement circuitry. A metal body of the pressure transmitter has a pressure coupling configured to couple to a process pressure. A pressure sensor is configured to provide an output related to an applied pressure to the pressure measurement circuitry. A conduit is coupled to the pressure sensor and configured to apply an applied pressure corresponding to the process pressure to pressure sensor. A non-conductive spacer is configured to electrically isolate the conduit from the metal body. The non-conductive spacer has an opening formed therein and is arranged to convey the applied from the metal body to the conduit.
    • 带压力传感器座的压力变送器包括压力测量电路。 压力变送器的金属体具有被配置为耦合到过程压力的压力耦合。 压力传感器被配置为向压力测量电路提供与施加的压力相关的输出。 导管联接到压力传感器并且构造成将对应于过程压力的施加压力施加到压力传感器。 非导电间隔件构造成将导管与金属体电隔离。 非导电间隔件具有形成在其中的开口,并且布置成将从金属体施加的导管传送到导管。