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    • 8. 发明授权
    • Magnetic tunnel junction structure and method
    • 磁隧道结结构及方法
    • US07572645B2
    • 2009-08-11
    • US11601129
    • 2006-11-15
    • Jijun SunRenu W. DaveJason A. JaneskyJon M. Slaughter
    • Jijun SunRenu W. DaveJason A. JaneskyJon M. Slaughter
    • H01L29/76
    • G01R33/093B82Y25/00B82Y40/00G01R33/098G11C11/16H01F10/3254H01F10/3272H01F41/302H01L43/08
    • Methods and apparatus are provided for magnetic tunnel junctions (MTJs) (10, 50) employing synthetic antiferromagnet (SAF) free layers (14, 14′). The MTJ (10, 50) comprises a pinned ferromagnetic (FM) layer (32, 18), the SAF (14) and a tunneling barrier (16) therebetween. The SAF (14) has a first higher spin polarization FM layer (30) proximate the tunneling barrier (16) and a second FM layer (26) desirably separated from the first FM layer (30) by a coupling layer (28), with magnetostriction adapted to compensate the magnetostriction of the first FM layer (30). Such compensation reduces the net magnetostriction of the SAF (14) to near zero even with high spin polarization proximate the tunneling barrier (16). Higher magnetoresistance ratios (MRs) are obtained without adverse affect on other MTJ (10, 50) properties. NiFe combinations are desirable for the first (30) and second (26) free FM layers, with more Fe in the first (30) free layer and less Fe in the second (26) free layer. CoFeB and NiFeCo are also useful in the free layers.
    • 提供了使用合成反铁磁(SAF)自由层(14,14')的磁隧道结(MTJ)(10,50)的方法和装置。 MTJ(10,50)包括钉扎铁磁(FM)层(32,18),SAF(14)和它们之间的隧道势垒(16)。 SAF(14)具有靠近隧道势垒(16)的第一高自旋极化FM层(30)和期望地通过耦合层(28)从第一FM层(30)分离的第二FM层(26),其中, 磁致伸缩适于补偿第一FM层(30)的磁致伸缩。 即使在靠近隧道势垒(16)的高自旋极化下,这种补偿也将SAF(14)的净磁致伸缩降低到接近于零。 获得更高的磁阻比(MRs),而不影响其他MTJ(10,50)性能。 对于第一(30)和第二(26)自由的FM层,NiFe组合是理想的,在第一(30)自由层中具有更多的Fe,在第二(26)自由层中具有更少的Fe。 CoFeB和NiFeCo也可用于自由层。