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    • 1. 发明申请
    • Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device
    • 光接收/发射复合单元,其制造方法和位移检测装置
    • US20030202189A1
    • 2003-10-30
    • US10414860
    • 2003-04-15
    • Sony Precision Technology Inc.
    • Hideaki TamiyaKayoko TaniguchiAkihiro KurodaHidehiro Kume
    • G01B009/02
    • G01D5/38
    • A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
    • 具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括:用于发光的光源; 偏振光分离单元,用于将从光源发射的光分成具有差分偏振分量的两个光束,将两个光束照射到外部光学系统,并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板,用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。
    • 2. 发明申请
    • Displacement pickup
    • 位移拾取
    • US20040095583A1
    • 2004-05-20
    • US10705429
    • 2003-11-10
    • Sony Precision Technology Inc.
    • Hideaki TamiyaKayoko TaniguchiEiko Kanbara
    • G01B009/02
    • G01D5/366G01D5/34792
    • A displacement pickup is provided which comprising a scale (12) having defined thereon a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a pitch different from that in the first area (12a), a first reader (10) which reads the positional information recorded in the first area (12a), a first phase detector (14) which detects a first phase on the basis of the positional information read by the first reader (10), a second reader (11) which reads the positional information recorded in the second area (12b), a second phase detector (15) which detects a second phase on the basis of the positional information read by the second reader (11), a phase comparator (16) which makes a comparison between the first and second phases, and an origin signal selector (18) which produce a plurality of signals according to the result of comparison and selects an arbitrary one of the plurality of signals on the basis of the positional information read by the first reader (10).
    • 提供一种位移拾取器,其包括其上限定有以预定间距记录位置信息的第一区域(12a)的刻度(12),以及第二区域(12b),其中位置信息以不同于 第一区域(12a),读取记录在第一区域(12a)中的位置信息的第一读取器(10),第一相位检测器(14),其基于由第一读取器读取的位置信息检测第一相位 (10),读取记录在第二区域(12b)中的位置信息的第二读取器(11),第二相位检测器(15),其基于由第二读取器(11)读取的位置信息来检测第二相位 ),比较第一和第二相位的相位比较器(16)和根据比较结果产生多个信号的原点信号选择器(18),并选择多个信号中的任意一个 基于由第一读取器(10)读取的位置信息。
    • 3. 发明申请
    • Displacement pickup
    • 位移拾取
    • US20040080755A1
    • 2004-04-29
    • US10692376
    • 2003-10-22
    • Sony Precision Technology
    • Hideaki TamiyaKayoko TaniguchiAkihiro Kuroda
    • G01B011/02
    • G01D5/34707
    • A displacement pickup is provided which includes a displaceable scale (12) having defined therein a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a predetermined pitch different from that in the first area (12a), a first reading system (10) to read the positional information recorded in the first area (12a), a first phase detector (14) to detect a first phase on the basis of the positional information read by the first reading system (10), a second reading system (11) to read the positional information recorded in the second area (12b), a second phase detector (15) to detect a second phase on the basis of the positional information read by the second reading system (11), a phase comparator (16) to make a comparison between the first and second phases, and an origin signal generator (17) to generate an origin signal according to the result of comparison from the phase comparator (16).
    • 提供了一种位移拾取器,其包括可移位标尺(12),其中限定了第一区域(12a),其中以预定间距记录位置信息;以及第二区域(12b),其中以与 在第一区域(12a)中,读取记录在第一区域(12a)中的位置信息的第一读取系统(10),基于由第一区域(12a)读取的位置信息来检测第一阶段的第一相位检测器 第一读取系统(10),读取记录在第二区域(12b)中的位置信息的第二读取系统(11),基于由第二读取系统读取的位置信息来检测第二阶段的第二相位检测器(15) 第二读取系统(11),用于进行第一和第二相位之间的比较的相位比较器(16)以及根据比较结果从相位比较器产生原点信号的原点信号发生器(17) (16)。