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1. 发明申请

US20040263840A1 Calibration of reconfigurable inspection machine 审中-公开
标题翻译：校准可重构检测机
公开(公告)号：US20040263840A1
公开(公告)日：2004-12-30
申请号：US10852716
申请日：2004-05-24
发明人： Stephen B. Segall , Juris Upatnieks
IPC分类号： G01J001/10 , G01B011/02
CPC分类号： G01B11/02
摘要： A method for calibrating an inspection machine including a plurality of displacement detectors for inspecting a production part and a linear motion stage for relative motion between the displacement detectors and the production part. The method includes determining relative positional errors of the displacement detectors relative to each other, determining the effect of motion stage errors on a first detector from the plurality of displacement detectors as a function of position of the motion stage, and determining the effect of motion stage errors on the remaining displacement detectors as a function of position of the motion stage.
摘要翻译：一种用于校准包括用于检查生产部件的多个位移检测器和用于位移检测器和生产部件之间的相对运动的线性运动平台的检查机器的方法。该方法包括确定位移检测器相对于彼此的相对位置误差，从多个位移检测器确定运动级误差对第一检测器的影响作为运动级的位置的函数，以及确定运动级的影响作为运动平台位置的函数的剩余位移检测器的误差。

2. 发明申请

US20040221790A1 Method and apparatus for optical odometry 审中-公开
标题翻译：光学测距法的方法和装置
公开(公告)号：US20040221790A1
公开(公告)日：2004-11-11
申请号：US10786245
申请日：2004-02-24
发明人： Kenneth H. Sinclair , Pace Gaillard Willisson , Jay Loring Gainsboro , Lee Davis Weinstein
IPC分类号： G01C003/08 , G01P005/00 , G01B003/12 , G01B005/02 , G01B005/04 , G01B007/02 , G01B007/14 , G01B011/02 , G01B011/14 , G01B013/02 , G06F015/00 , G01B021/02 , G01C022/00
CPC分类号： G01P3/36 , G01C22/02 , G01P3/806 , G01S17/50 , G06T7/20
摘要： A method and apparatus for optical odometry are disclosed which inexpensively facilitate diverse applications including indoor/outdoor vehicle tracking in secure areas, industrial and home robot navigation, automated steering and navigation of autonomous farm vehicles, shopping cart navigation and tracking, and automotive anti-lock braking systems. In a preferred low-cost embodiment, a telecentric lens is used with an optical computer mouse chip and a microprocessor. In a two-sensor embodiment, both rotation and translation are accurately measured.
摘要翻译：公开了一种用于光学测距的方法和装置，其便宜地促进了各种应用，包括在安全区域中的室内/室外车辆跟踪，工业和家庭机器人导航，自主农用车辆的自动转向和导航，购物车导航和跟踪以及汽车防抱死制动系统。在优选的低成本实施例中，远心透镜与光学计算机鼠标芯片和微处理器一起使用。在双传感器实施例中，精确地测量旋转和平移两者。

3. 发明申请

US20040169869A1 Method and apparatus for inspecting an edge exposure area of a wafer 失效
标题翻译：用于检查晶片的边缘曝光区域的方法和装置
公开(公告)号：US20040169869A1
公开(公告)日：2004-09-02
申请号：US10787765
申请日：2004-02-27
发明人： Koung-Su Shin , Sun-Yong Choi , Chung-Sam Jun , Dong-Chun Lee , Kwang-Jun Yoon
IPC分类号： G01B011/02
CPC分类号： G01N21/9503 , G01N21/9501 , G01N21/9505
摘要： For an automatic defect inspection of an edge exposure area of a wafer, an optical unit supplies a light beam onto the edge portion of a wafer and a detection unit detects light reflected from the edge portion. The detection unit converts the detected light into an electrical signal to transmit the electrical signal to a processing unit. The processing unit analyzes the electrical signal to measure the reflectivity of the edge portion, compares the measured reflectivity with a reference reflectivity, and calculates the width of the edge exposure area. The processing unit compares the calculated width with a reference width to detect any defect in the edge exposure area.
摘要翻译：为了对晶片的边缘曝光区域进行自动缺陷检查，光学单元将光束提供到晶片的边缘部分，并且检测单元检测从边缘部分反射的光。检测单元将检测到的光转换为电信号，以将电信号传送到处理单元。处理单元分析电信号以测量边缘部分的反射率，将测量的反射率与参考反射率进行比较，并计算边缘曝光区域的宽度。处理单元将计算的宽度与参考宽度进行比较，以检测边缘曝光区域中的任何缺陷。

4. 发明申请

US20040150832A1 Method and apparatus for measuring motion 失效
标题翻译：测量运动的方法和装置
公开(公告)号：US20040150832A1
公开(公告)日：2004-08-05
申请号：US10355509
申请日：2003-01-31
发明人： Michael Mermelstein
IPC分类号： G01B011/02
CPC分类号： G01H9/00 , G01B9/02014 , G01B9/02057 , G01B9/02069 , G01B9/02077 , G01B9/02083 , G01B9/02084 , G01B9/0209 , G01S17/50
摘要： A method and apparatus for measuring motion of an object substantially orthogonal to an optical axis of an interferometer. The method includes the steps of obtaining a first interferogram and a second interferogram, wherein each of the first and second interferograms includes intensity information of each of at least two pixels, and determining the motion of the object from the first and the second interferograms in response to the difference of the intensity gradients of the pixels in the first and second interferograms in the orthogonal direction. The system includes a first interferogram including intensity information of each of at least two pixels and a second interferogram including intensity information of each of at least two pixels. The system also includes a gradient processor calculating the intensity gradients of the first and second interferograms in the orthogonal direction and a motion processor calculating the motion of the object from the first and the second interferograms in response to the difference of the intensity gradients of the first and second interferograms in the orthogonal direction.
摘要翻译：用于测量基本上与干涉仪的光轴正交的物体的运动的方法和装置。该方法包括获得第一干涉图和第二干涉图的步骤，其中第一和第二干涉图中的每一个包括至少两个像素中的每一个的强度信息，以及响应于从第一和第二干涉图中确定物体的运动对于正交方向上的第一和第二干涉图中的像素的强度梯度的差异。该系统包括包括至少两个像素中的每一个的强度信息的第一干涉图和包括至少两个像素中的每一个的强度信息的第二干涉图。该系统还包括梯度处理器，其计算正交方向上的第一和第二干涉图的强度梯度;以及运动处理器，响应于第一和第二干涉图的强度梯度的差异，从第一和第二干涉图计算物体的运动和正交方向上的第二干涉图。

5. 发明申请

US20040105097A1 Weighted least-square interferometric measurement of multiple surfaces 有权
标题翻译：多个表面的加权最小二乘干涉测量
公开(公告)号：US20040105097A1
公开(公告)日：2004-06-03
申请号：US10308484
申请日：2002-12-03
申请人： Phase Shift Technology
发明人： Shouhong Tang
IPC分类号： G01B011/02
CPC分类号： G01B11/2441
摘要： A system and method are provided for obtaining mapping profiles of transparent objects having a plurality of reflective surfaces. The object, the surfaces of which are to be mapped, is placed in an unequal path interferometer including a reference surface located a predetermined distance from the object. Coherent light is supplied in the interferometer from a tunable source; and multiple optical interferograms for each of the plurality of reflective surfaces are simultaneously recorded. These interferograms are simultaneously extracted through the use of a dynamically generated weighted least-square fitting technique, which separates interferograms from a set of superimposed interferograms to obtain a given interferogram for any one of the surfaces, free from errors resulting from the existence of the other interferograms.
摘要翻译：提供了一种用于获得具有多个反射表面的透明对象的映射简档的系统和方法。其表面将要映射的对象被放置在不等距干涉仪中，该干涉仪包括距物体预定距离的参考表面。干涉仪中的相干光从可调光源提供; 并且同时记录多个反射表面中的每一个的多个光学干涉图。通过使用动态生成的加权最小二乘拟合技术来同时提取这些干涉图，该技术将干涉图与一组叠加的干涉图分离，以获得任何一个表面的给定干涉图，而不存在由于其他干涉图。

6. 发明申请

US20040080755A1 Displacement pickup 有权
标题翻译：位移拾取
公开(公告)号：US20040080755A1
公开(公告)日：2004-04-29
申请号：US10692376
申请日：2003-10-22
申请人： Sony Precision Technology
发明人： Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda
IPC分类号： G01B011/02
CPC分类号： G01D5/34707
摘要： A displacement pickup is provided which includes a displaceable scale (12) having defined therein a first area (12a) where positional information is recorded with a predetermined pitch and a second area (12b) where positional information is recorded with a predetermined pitch different from that in the first area (12a), a first reading system (10) to read the positional information recorded in the first area (12a), a first phase detector (14) to detect a first phase on the basis of the positional information read by the first reading system (10), a second reading system (11) to read the positional information recorded in the second area (12b), a second phase detector (15) to detect a second phase on the basis of the positional information read by the second reading system (11), a phase comparator (16) to make a comparison between the first and second phases, and an origin signal generator (17) to generate an origin signal according to the result of comparison from the phase comparator (16).
摘要翻译：提供了一种位移拾取器，其包括可移位标尺（12），其中限定了第一区域（12a），其中以预定间距记录位置信息;以及第二区域（12b），其中以与在第一区域（12a）中，读取记录在第一区域（12a）中的位置信息的第一读取系统（10），基于由第一区域（12a）读取的位置信息来检测第一阶段的第一相位检测器第一读取系统（10），读取记录在第二区域（12b）中的位置信息的第二读取系统（11），基于由第二读取系统读取的位置信息来检测第二阶段的第二相位检测器（15）第二读取系统（11），用于进行第一和第二相位之间的比较的相位比较器（16）以及根据比较结果从相位比较器产生原点信号的原点信号发生器（17）（16）。

7. 发明申请

US20040032593A1 Process endpoint detection method using broadband reflectometry 有权
标题翻译：使用宽带反射测量法处理端点检测方法
公开(公告)号：US20040032593A1
公开(公告)日：2004-02-19
申请号：US10401118
申请日：2003-03-27
申请人： LAM RESEARCH CORPORATION
发明人： Vijayakumar C. Venugopal
IPC分类号： G01B011/02
CPC分类号： G01N21/8422 , G01B11/0625 , G01B11/0683
摘要： A method of determining a parameter of interest during processing of a patterned substrate includes obtaining a measured net reflectance spectrum resulting from illuminating at least a portion of the patterned substrate with a light beam having a broadband spectrum, calculating a modeled net reflectance spectrum as a weighted incoherent sum of reflectances from different regions constituting the portion of the patterned substrate, and determining a set of parameters that provides a close match between the measured net reflectance spectrum and the modeled net reflectance spectrum. For wavelengths below a selected transition wavelength, a first optical model is used to calculate the reflectance from each region as a weighted coherent sum of reflected fields from thin film stacks corresponding to laterally distinct areas constituting the region. For wavelengths above the transition wavelength, a second optical model based on effective medium approximation is used to calculate the reflectance from each region.
摘要翻译：在图案化衬底的处理期间确定感兴趣的参数的方法包括获得由具有宽带光谱的光束照射图案化衬底的至少一部分而得到的测量的净反射光谱，将模拟的净反射光谱计算为加权构成图案化衬底部分的不同区域的反射率不相干和，并且确定提供测量的净反射光谱和建模的净反射光谱之间的紧密匹配的一组参数。对于低于所选择的跃迁波长的波长，使用第一光学模型来计算来自每个区域的反射率，作为对应于构成区域的横向不同区域的薄膜叠层的反射场的加权相干和。对于高于过渡波长的波长，使用基于有效介质近似的第二光学模型来计算每个区域的反射率。

8. 发明申请

US20040030529A1 Position measuring device 失效
标题翻译：位置测量装置
公开(公告)号：US20040030529A1
公开(公告)日：2004-02-12
申请号：US10380864
申请日：2003-03-17
发明人： Johann Mitterreiter
IPC分类号： G01B003/02 , G01B005/02 , G01B005/14 , G01B007/02 , G01B007/14 , G01B011/02 , G01B011/14 , G01B013/02 , G06F015/00 , G01B021/02
CPC分类号： G01D5/34738
摘要： A position measuring system that includes a scale graduation, a scanning unit for scanning the scale graduation. An adjustment device that includes a displacement element for setting a position of the scanning unit with respect to the scale graduation and a gear-down mechanism arranged between the displacement element and the scanning unit, the gear-down mechanism converts a displacement movement of the displacement element into a shorter displacement movement of the scanning unit. The gear-down mechanism includes a lever arrangement with joints, which converts the displacement movement of the displacement element into a linear displacement movement of the scanning unit in relation to the scale graduation.
摘要翻译：包括刻度刻度的位置测量系统，用于扫描刻度刻度的扫描单元。一种调节装置，其包括用于设定扫描单元相对于刻度的位置的位移元件和布置在位移元件和扫描单元之间的减速机构，所述减速机构将位移的位移运动元件变成扫描单元的较短位移运动。齿轮减速机构包括具有接头的杠杆装置，其将位移元件的位移运动转换成扫描单元相对于刻度刻度的线性位移运动。

9. 发明申请

US20040012791A1 Interferometer having a coupled cavity geometry for use with an extended source 有权
标题翻译：干涉仪具有与扩展源一起使用的耦合空腔几何形状
公开(公告)号：US20040012791A1
公开(公告)日：2004-01-22
申请号：US10464163
申请日：2003-06-17
发明人： Xavier Colonna De Lega , Peter J. De Groot
IPC分类号： G01B011/02
CPC分类号： G01B9/02038 , G01B9/02065 , G01B9/0209 , G01B2290/70
摘要： Interferometers utilizing coupled cavities and extended sources are disclosed.
摘要翻译：公开了使用耦合腔和扩展源的干涉仪。

10. 发明申请

US20030149544A1 Spectral assessment of fruit 失效
标题翻译：水果光谱评估
公开(公告)号：US20030149544A1
公开(公告)日：2003-08-07
申请号：US10220739
申请日：2002-11-14
发明人： Peter Gary Brown , Colin Victor Greensill , Kerry Brian Walsh
IPC分类号： G01B011/02
CPC分类号： G01N33/025 , B07C5/3422 , G01N21/255 , G01N21/3563 , G01N21/359
摘要： Apparatus for the spectral assessment of fruit comprising a sensor head (10) positioned adjacent a near infrared light source (11), the sensor head being coupled to a spectrometer via fibre optics (30), the sensor head being positioned close to the periphery of fruit substantially parallel with the light from the light source so that the fibre optics sense only the internally reflected or refracted light emanating from the fruit.
摘要翻译：用于对果实进行光谱评估的设备，包括邻近近红外光源（11）定位的传感器头（10），所述传感器头通过光纤（30）耦合到光谱仪，所述传感器头靠近水果基本上与来自光源的光平行，使得光纤仅感知从果实发出的内部反射或折射光。

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