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1. 发明申请

US20030202189A1 Light-receiving/emitting composite unit, method for manufacturing the same, and displacement detection device 有权
标题翻译：光接收/发射复合单元，其制造方法和位移检测装置
公开(公告)号：US20030202189A1
公开(公告)日：2003-10-30
申请号：US10414860
申请日：2003-04-15
申请人： Sony Precision Technology Inc.
发明人： Hideaki Tamiya , Kayoko Taniguchi , Akihiro Kuroda , Hidehiro Kume
IPC分类号： G01B009/02
CPC分类号： G01D5/38
摘要： A displacement detection device having excellent stability with the lapse of time and suitable for reduction in size and weight includes: a light source for emitting light; polarizing light splitting unit for splitting the light emitted from the light source into two light beams having difference polarized components, radiating the two light beams to an external optical system, and combining the two light beams reflected by the external optical system to generate combined light; a phase plate provided between the light source and the polarizing light splitting unit and adapted for changing the polarization state of the light emitted from the light source and leading the light to the polarizing light splitting unit; light splitting films for splitting the combined light generated by the polarizing light splitting unit into plural light beams; polarizing units for transmitting only a predetermined polarized components of the split combined light beams; and light-receiving elements for photoelectrically converting coherent light beams transmitted through the polarizing units and thus generating an interference signal.
摘要翻译：具有优异的时间稳定性和适合于减小尺寸和重量的位移检测装置包括：用于发光的光源; 偏振光分离单元，用于将从光源发射的光分成具有差分偏振分量的两个光束，将两个光束照射到外部光学系统，并且组合由外部光学系统反射的两个光束以产生组合光; 设置在所述光源和所述偏振光分离单元之间的相位板，用于改变从所述光源发射的光的偏振状态并将光引导到所述偏振光分离单元; 用于将由偏振光分离单元产生的组合光分离成多个光束的分光膜; 用于仅透射分离的组合光束的预定偏振分量的偏振单元; 以及用于光电转换透射通过偏振单元的相干光束并由此产生干涉信号的光接收元件。

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