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    • 10. 发明申请
    • SEMICONDUCTOR DEVICE AND IMAGING APPARATUS
    • 半导体器件和成像装置
    • US20130234277A1
    • 2013-09-12
    • US13793445
    • 2013-03-11
    • Takaaki NegoroHirofumi WatanabeYutaka HayashiToshitaka OtaYasushi Nagamune
    • Takaaki NegoroHirofumi WatanabeYutaka HayashiToshitaka OtaYasushi Nagamune
    • H01L27/146H01L29/73
    • H01L27/14681H01L27/14683H01L29/73H01L29/739H01L31/1105
    • The invention relates to a semiconductor device having a vertical transistor bipolar structure of emitter, base, and collector formed in this order from a semiconductor substrate surface in a depth direction. The semiconductor device includes an electrode embedded from the semiconductor substrate surface into the inside and insulated by an oxide film. In the surface of the substrate, a first-conductivity-type first semiconductor region, a second-conductivity-type second semiconductor region, and a first-conductivity-type third semiconductor region are arranged, from the surface side, inside a semiconductor device region surrounded by the electrode and along the electrode with the oxide film interposed therebetween, the second semiconductor region located below the first semiconductor region, the third semiconductor region located below the second semiconductor region. The electrode is insulated from the first to third semiconductor regions, and current gain is variable through application of voltage to the electrode.
    • 本发明涉及一种半导体器件,其具有从半导体衬底表面沿深度方向依次形成的发射极,基极和集电极的垂直晶体管双极结构。 半导体器件包括从半导体衬底表面嵌入内部并由氧化物膜绝缘的电极。 在基板的表面中,从第一导电型第一半导体区域,第二导电型第二半导体区域和第一导电型第三半导体区域的表面侧配置在半导体器件区域 被电极围绕并且沿着电极,氧化膜插入其间,位于第一半导体区域下方的第二半导体区域,位于第二半导体区域下方的第三半导体区域。 电极与第一至第三半导体区域绝缘​​,电流增益可通过向电极施加电压而变化。