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1. 发明授权

US08971008B2 Electrostatic chuck 有权
标题翻译：静电吸盘
公开(公告)号：US08971008B2
公开(公告)日：2015-03-03
申请号：US13428527
申请日：2012-03-23
申请人： Shunpei Kondo , Hiroki Matsui
发明人： Shunpei Kondo , Hiroki Matsui
IPC分类号： H01L21/67 , H01L21/683
CPC分类号： H01L21/6833 , Y10T279/23
摘要： According to one embodiment, an electrostatic chuck includes: a ceramic dielectric substrate, an electrode, and a conductive member. The ceramic dielectric substrate has a first major surface on which a material to be adsorbed is to be mounted and a second major surface on a side opposite the first major surface. The electrode is interposed between the first major surface and the second major surface of the ceramic dielectric substrate. The conductive member is provided in a recess formed in the second major surface of the ceramic dielectric substrate. A tip end of the recess has a curved surface.
摘要翻译：根据一个实施例，静电卡盘包括：陶瓷电介质基板，电极和导电部件。所述陶瓷电介质基板具有要被安装的待吸附材料的第一主表面和与所述第一主表面相对的一侧上的第二主表面。电极介于陶瓷电介质基片的第一主表面和第二主表面之间。导电构件设置在形成在陶瓷电介质基板的第二主表面中的凹部中。凹部的尖端具有弯曲表面。

2. 发明申请

US20060158822A1 Method for attracting glass substrate with electrostatic chuck and electrostatic chuck 审中-公开
标题翻译：用静电吸盘和静电吸盘吸引玻璃基板的方法
公开(公告)号：US20060158822A1
公开(公告)日：2006-07-20
申请号：US11313277
申请日：2005-12-20
申请人： Shunpei Kondo , Tetsuo Kitabayashi
发明人： Shunpei Kondo , Tetsuo Kitabayashi
IPC分类号： H01T23/00
CPC分类号： H02N13/00 , H01L21/6833
摘要： The present invention relates to a method for using an electrostatic chuck which can achieve clamping force of 100 gf/cm2 within 60 seconds at low voltage of ±1 kV or less compared to high voltage of the conventional art such as 3 kV or 10 kV for electrostatically clamping a glass substrate. There is provided a method for clamping a glass substrate with an electrostatic chuck having a dielectric layer in which the upper surface of the dielectric layer of the electrostatic chuck has a surface roughness Ra of 0.8 μm or less and the volume resistivity of the dielectric layer of the electrostatic chuck is 108-1012 Ωcm, comprising the steps of increasing the temperature of the glass substrate so as to change the volume resistivity of the glass substrate to be 1014 Ωcm or less, and clamping the glass substrate to the upper surface of the dielectric layer of the electrostatic chuck.
摘要翻译：本发明涉及一种使用静电卡盘的方法，该静电卡盘可以在±1kV或更低的低电压下在60秒内实现100gf / cm 2的夹紧力，与常规技术的高电压相比例如用于静电夹持玻璃基板的3kV或10kV。提供了一种用具有电介质层的静电卡盘夹持玻璃基板的方法，其中静电卡盘的电介质层的上表面具有0.8μm或更小的表面粗糙度Ra，并且电介质层的体积电阻率静电吸盘是10×10 12Ω，包括以下步骤：增加玻璃基板的温度，以使玻璃基板的体积电阻率变为10 以下，将玻璃基板夹持到静电卡盘的电介质层的上表面。

3. 发明申请

US20130026720A1 ELECTROSTATIC CHUCK 审中-公开
标题翻译：静电卡
公开(公告)号：US20130026720A1
公开(公告)日：2013-01-31
申请号：US13635757
申请日：2011-03-23
申请人： Hiroaki Hori , Shunpei Kondo , Yuki Anai , Ikuo Itakura , Takeshi Uchimura , Kazuki Anada
发明人： Hiroaki Hori , Shunpei Kondo , Yuki Anai , Ikuo Itakura , Takeshi Uchimura , Kazuki Anada
IPC分类号： H01L21/683
CPC分类号： H01L21/6833 , Y10T279/23
摘要： An electrostatic chuck comprises: a ceramic plate provided with recesses on a major surface and provided with an electrode in an inner part of the ceramic plate; a temperature regulating plate bonded to the major surface of the ceramic plate; a first bonding agent provided between the ceramic plate and the temperature regulating plate; and a heater provided in the each of the recesses of the ceramic plate. The first bonding agent has a first major agent including an organic material, a first amorphous filler including an inorganic material, and a first spherical filler including an inorganic material. The first amorphous filler and the first spherical filler are dispersion-compounded into the first major agent. The first major agent, the first amorphous filler, and the first spherical filler are made of an electrically insulating material. An average diameter of the first spherical filler is greater than a maximum value of a minor axis of the first amorphous filler. A thickness of the first bonding agent is greater than or equal to the average diameter of the first spherical filler. A width of the each of the recesses is greater than a width of the heater, and a depth of the each of the recesses is greater than a thickness of the heater. The heater is adhered within the each of the recesses by a second bonding agent. A first distance between a major surface of the heater on the side of the temperature regulating plate and a major surface of the temperature regulating plate is greater than a second distance between the major surface between the recesses of the ceramic plate and the major surface of the temperature regulating plate.
摘要翻译：静电卡盘包括：陶瓷板，其在主表面上设置有凹部，并在陶瓷板的内部设置有电极; 温度调节板结合到陶瓷板的主表面; 设置在陶瓷板和温度调节板之间的第一粘合剂; 以及设置在陶瓷板的每个凹部中的加热器。第一粘结剂具有包括有机材料的第一主剂，包含无机材料的第一无定形填料和包含无机材料的第一球形填料。将第一无定形填料和第一球形填料分散混合到第一主剂中。第一主剂，第一无定形填料和第一球形填料由电绝缘材料制成。第一球形填料的平均直径大于第一无定形填料的短轴的最大值。第一粘合剂的厚度大于或等于第一球形填料的平均直径。每个凹部的宽度大于加热器的宽度，并且每个凹部的深度大于加热器的厚度。加热器通过第二粘合剂粘附在每个凹部内。加热器在温度调节板一侧的主表面和温度调节板的主表面之间的第一距离大于陶瓷板的凹部与主表面之间的主表面之间的第二距离调温板。

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