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    • 5. 发明申请
    • NANOMETER-PRECISION SIX-DEGREE-OF-FREEDOM MAGNETIC SUSPENSION MICRO-MOTION TABLE AND APPLICATION THEREOF
    • NANOMETER-PRECISION六自由度磁悬浮微运动表及其应用
    • US20130038853A1
    • 2013-02-14
    • US13635168
    • 2011-03-15
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • Yu ZhuMing ZhangGuang LiJinsong WangJinchun HuWensheng YinKaiming YangLi ZhangJing MaYan XuYujie LiLi TianGuanghong Duan
    • H02K41/02G03B27/58
    • G03F7/70758G03F7/70716
    • A nanometer precision six-DOF magnetic suspension micro-stage and the application thereof are provided which are mainly used in semiconductor photolithography devices. The micro-stage includes a cross support and four two-DOF actuators. Each 2-DOF actuator comprises a vertically polarized permanent magnet, a horizontal force coil and a vertical force coil; the permanent magnet being mounted on an end of the cross support, the horizontal force coil and the vertical force coil being arranged on a side of and below the permanent magnet respectively and being spaced apart from the permanent magnet; the cross support and four vertically polarized permanent magnets constitute a mover of the micro-stage; the horizontal force coil and the vertical force coil being fixed by a coil framework respectively and constituting a stator of the micro-stage; and the stator being mounted on a base of the micro-stage. A dual-wafer table positioning system of a photolithography machine may be constructed by two said micro-stages in combination with a two-DOF large stroke linear motor. The present invention features simple structure, large driving force, small mass and absence of cable disturbance, and is possible to realize high precision, high acceleration six-DOF micro-motion.
    • 提供了主要用于半导体光刻设备的纳米精密六自由度磁悬浮微步及其应用。 微型平台包括十字支架和四个双自由度执行器。 每个2-DOF致动器包括垂直极化永磁体,水平力线圈和垂直力线圈; 所述永磁体安装在所述十字支架的一端上,所述水平力线圈和所述垂直力线圈分别设置在所述永久磁铁的一侧和下方并与所述永磁体隔开; 交叉支撑和四个垂直极化永磁体构成微型载物; 水平力线圈和垂直力线圈分别由线圈框架固定并构成微型定子; 并且定子安装在微型台的基座上。 光刻机的双晶片台定位系统可以由两个微步与二自由度大行程直线电机组合构成。 本发明结构简单,驱动力大,质量小,无电缆扰动,可实现高精度,高加速度六自由度微动作。
    • 6. 发明申请
    • RING LIGHT SOURCE SYSTEM FOR INTERFEROMETER WITH ADJUSTABLE RING RADIUS AND RING RADIAL WIDTH
    • 具有可调节环的干涉仪的环形光源系统RADIUS和环径向宽度
    • US20130027942A1
    • 2013-01-31
    • US13558572
    • 2012-07-26
    • Yan XuYongjian WanYongqian Wu
    • Yan XuYongjian WanYongqian Wu
    • F21V5/04
    • G01B9/02001G02B27/0944
    • A ring light source system for an interferometer with adjustable ring radius and ring radial width may comprise a laser light source, an expander and collimator optical system, an adjustable aperture, a binary phase grating, a variable-focus optical system, and a spatial filter. The expander and collimator optical system is configured to convert a light beam from the light source into a parallel light beam. The adjustable aperture is configured to adjust a diameter of the parallel light beam. The light beam with the diameter adjusted by the adjustable aperture is incident perpendicularly onto the binary phase grating, followed by the variable-focus optical system. The filter is positioned on a back focal plane of the variable-focus optical system, and is configured to receive a ring light source. The ring radius and radial width of the light source are adjustable by adjusting a focus length f1 of the variable-focus optical system.
    • 用于具有可调节环半径和环径向宽度的干涉仪的环形光源系统可以包括激光源,扩展器和准直器光学系统,可调节孔径,二进制相位光栅,可变焦距光学系统和空间滤波器 。 扩展器和准直器光学系统被配置为将来自光源的光束转换成平行光束。 可调整孔径被配置为调节平行光束的直径。 具有由可调孔径调节的直径的光束垂直入射到二进制相位光栅上,随后是可变焦光学系统。 滤光器位于可变焦光学系统的后焦平面上,并且被配置为接收环形光源。 通过调整可变焦光学系统的焦距f1可以调节光源的环半径和径向宽度。
    • 7. 发明申请
    • POWER SWITCH CIRCUIT
    • 电源开关电路
    • US20110298524A1
    • 2011-12-08
    • US12838485
    • 2010-07-18
    • Yan XuYan-Ling GengHui YinBo-Ching LinHan-Che Wang
    • Yan XuYan-Ling GengHui YinBo-Ching LinHan-Che Wang
    • H03K17/60H03K17/687H03K17/00
    • H02M3/156
    • A power switch circuit providing voltage to an output port is provided. The switch circuit includes a single power supply, a switch unit, a controlling unit, and a logic unit. The switch unit is connected between the single power supply and an output port and capable of being turned on and off alternatively for continuing or discontinuing power from the single power supply to the output port; the single power supply provides power to the output port. The controlling unit is configured for generating a voltage controlling signal and transmitting the voltage controlling signal to the logic unit. The logic unit receives and inverts the voltage controlling signal, and outputs the inverted voltage controlling signal to turn on or turn off the switch unit.
    • 提供向输出端口提供电压的电源开关电路。 开关电路包括单个电源,开关单元,控制单元和逻辑单元。 开关单元连接在单个电源和输出端口之间,并且能够交替地被接通和断开,用于从单个电源向输出端口继续或停止电力; 单个电源为输出端口提供电源。 控制单元被配置为产生电压控制信号并将电压控制信号传送到逻辑单元。 逻辑单元接收和反相电压控制信号,并输出反相电压控制信号以接通或关断开关单元。