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1. 发明授权

US06332672B1 Ink jet recording head including a cap member sealing piezoelectric vibrators 失效
标题翻译：喷墨记录头包括密封压电振动器的盖构件
公开(公告)号：US06332672B1
公开(公告)日：2001-12-25
申请号：US09069991
申请日：1998-04-30
申请人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Shinri Sakai , Tsutomu Nishiwaki
IPC分类号： B41J2045
CPC分类号： B41J2/14233 , B41J2002/14241 , B41J2002/1425 , B41J2002/14387
摘要： An ink jet recording head comprises: a passage form substrate having, a diaphragm forming a part of a pressure generating chamber communicating with a nozzle aperture and at least the upper surface of which acts as a lower electrode, and a piezoelectric vibrator including a piezoelectric material layer formed on the surface of the diaphragm, an upper electrode formed on the surface of the piezoelectric material layer and a piezoelectric active part formed in an area opposite to the pressure generating chamber; a cap member joined to the side of the piezoelectric material layer of the passage formed substrate for sealing space in a state in which space to extent that a movement is not prevented is secured; and a flexible portion for absorbing the change of pressure in the space of the cap member.
摘要翻译：一种喷墨记录头，包括：通道形式基板，具有形成与喷嘴孔连通并且至少其上表面用作下电极的压力发生室的一部分的隔膜，以及包括压电材料的压电振动器形成在所述隔膜的表面上的上层电极，形成在所述压电体层的表面上的上电极和与所述压力发生室相反的区域形成的压电有源部; 确保在没有防止移动的空间的状态下连接到通道形成基板的压电材料层侧的密封空间的盖构件; 以及用于吸收盖构件的空间中的压力变化的柔性部分。

2. 发明申请

US20060203041A1 Ink jet recording head and ink jet recorder 有权
标题翻译：喷墨记录头和喷墨记录器
公开(公告)号：US20060203041A1
公开(公告)日：2006-09-14
申请号：US11430893
申请日：2006-05-10
申请人： Masato Shimada , Shinri Sakai , Shiro Yazaki
发明人： Masato Shimada , Shinri Sakai , Shiro Yazaki
IPC分类号： B41J2/045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2002/14387 , B41J2002/14491
摘要： To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.
摘要翻译：提供具有减小的隔膜的初始偏转量的喷墨记录头和包括喷墨记录头的喷墨记录器。一种喷墨记录头，其具有流路形成基板10，其中形成有与喷嘴开口连通的压力产生室12，并且压电元件通过隔膜放置在流路形成基板10的一侧上，并具有至少一个下电极 60，压电层70和上电极80，其特征在于，与压电层70一起沉积的层中的至少一层是具有压缩应力的压缩膜50，压缩膜50具有至少一部分厚度方向在与压力产生室相对的区域的至少一部分中移除，由此整个膜的应力减小。

3. 发明授权

US06231169B1 Ink jet printing head including a backing member for reducing displacement of partitions between pressure generating chambers 失效
标题翻译：喷墨打印头包括用于减小压力发生室之间的隔板位移的背衬构件
公开(公告)号：US06231169B1
公开(公告)日：2001-05-15
申请号：US09069992
申请日：1998-04-30
申请人： Shiro Yazaki , Shinri Sakai
发明人： Shiro Yazaki , Shinri Sakai
IPC分类号： B41J2045
CPC分类号： B41J2/14233 , B41J2002/14387
摘要： An ink jet recording head includes at least a row of nozzle aperture; a passage formed substrate having partitions forming at least a row of pressure generating chambers, each communicating the respective nozzle aperture; a diaphragm forming a part of the pressure generating chambers and at least an upper surface of which serves as a lower electrode; a piezoelectric vibrator including, a piezoelectric active part having a piezoelectric layer formed on the surface of the diaphragm, and an upper electrode formed on the surface of said piezoelectric layer and formed in an area opposite to said pressure generating chamber; and a backing member joined to the side of the piezoelectric layer and having partitioning walls forming a concave portion being space to extent that a movement of the piezoelectric active part is not prevented, and fixed to the passage formed substrate such that each partitioning wall is opposite to the partition of the passage formed substrate.
摘要翻译：喷墨记录头包括至少一排喷嘴孔; 通道形成的基板具有形成至少一排压力产生室的隔板，每个压力产生室连通相应的喷嘴孔; 形成压力发生室的一部分并且其至少上表面用作下电极的隔膜; 一种压电振动器，包括：具有形成在所述隔膜表面上的压电层的压电有源部分和形成在所述压电层的表面上并形成在与所述压力发生室相对的区域中的上电极; 以及与所述压电体层侧接合并具有形成凹部的分隔壁的背衬构件，所述隔壁形成为空间，所述隔壁的尺寸使得所述压电有源部的移动不被阻止，并且固定到所述通道形成的基板，使得每个分隔壁相对到通道形成的基底的分隔。

4. 发明授权

US07651201B2 Ink jet recording head and ink jet recorder 有权
标题翻译：喷墨记录头和喷墨记录器
公开(公告)号：US07651201B2
公开(公告)日：2010-01-26
申请号：US11430893
申请日：2006-05-10
申请人： Masato Shimada , Shinri Sakai , Shiro Yazaki
发明人： Masato Shimada , Shinri Sakai , Shiro Yazaki
IPC分类号： B41J2/045
CPC分类号： B41J2/1646 , B41J2/14233 , B41J2/161 , B41J2002/14387 , B41J2002/14491
摘要： To provide an ink jet recording head with a decreased initial deflection amount of a diaphragm and an ink jet recorder comprising the ink jet recording head. An ink jet recording head which has a flow passage formation substrate 10 where pressure generation chambers 12 communicating with nozzle openings are defined and a piezoelectric element being placed on one side of the flow passage formation substrate 10 via a diaphragm and having at least a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80, characterized in that at least one of layers deposited together with the piezoelectric layer 70 is a compression film 50 having a compressive stress and the compression film 50 has at least a part in a thickness direction removed in at least a part of an area opposed to the pressure generation chamber, whereby the stress of the whole film is decreased.
摘要翻译：提供具有减小的隔膜的初始偏转量的喷墨记录头和包括喷墨记录头的喷墨记录器。一种喷墨记录头，其具有流路形成基板10，其中形成有与喷嘴开口连通的压力产生室12，并且压电元件通过隔膜放置在流路形成基板10的一侧上，并具有至少一个下电极 60，压电层70和上电极80，其特征在于，与压电层70一起沉积的层中的至少一层是具有压缩应力的压缩膜50，压缩膜50具有至少一部分厚度方向在与压力产生室相对的区域的至少一部分中移除，由此整个膜的应力减小。

5. 发明授权

US08057018B2 Method of manufacturing a liquid jet head and a liquid jet apparatus 有权
标题翻译：液体喷射头和液体喷射装置的制造方法
公开(公告)号：US08057018B2
公开(公告)日：2011-11-15
申请号：US12391910
申请日：2009-02-24
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
IPC分类号： B41J2/045 , H04R17/00
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要翻译：制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜在通道形成基板上并将上电极膜图案化成预定图案。

6. 发明申请

US20090219345A1 METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS 有权
标题翻译：液体喷射头和液体喷射装置的制造方法
公开(公告)号：US20090219345A1
公开(公告)日：2009-09-03
申请号：US12391910
申请日：2009-02-24
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
IPC分类号： B41J2/045 , H01L41/24
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要翻译：制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜在通道形成基板上并将上电极膜图案化成预定图案。

7. 发明申请

US20060290747A1 Liquid-jet head and method of producing the same and liquid injection device 有权
标题翻译：喷液头及其制造方法和液体注射装置
公开(公告)号：US20060290747A1
公开(公告)日：2006-12-28
申请号：US10573356
申请日：2004-09-24
申请人： Masato Shimada , Shiro Yazaki , Tsutomu Nishiwaki , Akihito Tsuda , Masataka Yamada
发明人： Masato Shimada , Shiro Yazaki , Tsutomu Nishiwaki , Akihito Tsuda , Masataka Yamada
IPC分类号： B41J2/045
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： There are provided a liquid-jet head which can reliably prevent breakage of piezoelectric elements over a long period of time, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. Further, there are provided a liquid-jet head which can effectively prevent a drop in the amount of displacement of a vibration plate caused through drive of a piezoelectric element, and a method for manufacturing the liquid-jet head, as well as a liquid-jet apparatus. A liquid-jet head includes a channel substrate 10 which has pressure generation chambers 12 formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements 300 each of which is composed of a lower electrode 60, a piezoelectric layer 70, and an upper electrode 80 and which are disposed on one surface of the channel substrate 10 via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric elements 300 are covered with an insulating film 100 formed of an inorganic insulating material.
摘要翻译：提供了能够可靠地防止压电元件长时间破裂的液体喷射头，以及喷液头的制造方法以及喷液装置。此外，还提供了一种液体喷射头，其能够有效地防止由压电元件的驱动引起的振动板的位移量的下降，以及液体喷射头的制造方法，喷气机液体喷射头包括：通道基板10，其具有形成在其中的压力产生室12和用于喷射液滴的连通喷嘴孔;以及压电元件300，每个压电元件由下电极60，压电层70和上电极80，其经由振动板设置在通道基板10的一个表面上，其中构成压电元件300的各层的至少图案区域被由无机绝缘材料形成的绝缘膜100覆盖。

8. 发明授权

US08613498B2 Method of manufacturing a liquid jet head and a liquid jet apparatus 有权
公开(公告)号：US08613498B2
公开(公告)日：2013-12-24
申请号：US13253896
申请日：2011-10-05
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
IPC分类号： B41J2/045
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.

9. 发明授权

US07559631B2 Liquid-jet head, method for manufacturing the same, and liquid-jet apparatus 有权
标题翻译：液体喷射头，其制造方法和液体喷射装置
公开(公告)号：US07559631B2
公开(公告)日：2009-07-14
申请号：US10573356
申请日：2004-09-24
申请人： Masato Shimada , Shiro Yazaki , Tsutomu Nishiwaki , Akihito Tsuda , Masataka Yamada
发明人： Masato Shimada , Shiro Yazaki , Tsutomu Nishiwaki , Akihito Tsuda , Masataka Yamada
IPC分类号： B41J2/05 , B41J2/045
CPC分类号： B41J2/1623 , B41J2/14233 , B41J2/161 , B41J2/1628 , B41J2/1629 , B41J2/1632 , B41J2/1635 , B41J2/1642 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491
摘要： A liquid-jet head and a manufacturing method thereof are provided. The liquid-jet head includes a channel substrate which has pressure generation chambers formed therein and communicating nozzle orifices for discharging liquid droplets, and piezoelectric elements. The piezoelectric element includes a lower electrode, a piezoelectric layer and an upper electrode, and disposed on one surface of the channel substrate via a vibration plate, wherein at least pattern regions of the respective layers which constitute the piezoelectric element are covered with an insulating film formed of an inorganic insulating material.
摘要翻译：提供一种喷液头及其制造方法。液体喷射头包括通道基板，其具有形成在其中的压力产生室和用于喷射液滴的连通喷嘴孔和压电元件。压电元件包括下电极，压电层和上电极，并且经由振动板设置在通道基板的一个表面上，其中构成压电元件的各层的至少图案区域被绝缘膜覆盖由无机绝缘材料形成。

10. 发明申请

US20120026250A1 METHOD OF MANUFACTURING A LIQUID JET HEAD AND A LIQUID JET APPARATUS 有权
标题翻译：液体喷射头和液体喷射装置的制造方法
公开(公告)号：US20120026250A1
公开(公告)日：2012-02-02
申请号：US13253896
申请日：2011-10-05
申请人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
发明人： Shiro Yazaki , Setsuya Iwashita , Eiju Hirai , Tsutomu Nishiwaki
IPC分类号： B41J2/045 , B23P17/00
CPC分类号： B41J2/164 , B41J2/04 , B41J2/055 , B41J2/14233 , B41J2/161 , B41J2/1629 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/14241 , B41J2002/14419 , B41J2002/14491 , Y10T29/42 , Y10T29/49401
摘要： A method of manufacturing a liquid jet head includes depositing a lower electrode film on a passage forming substrate and patterning the lower electrode film into a predetermined pattern, forming a piezoelectric layer on the passage forming substrate, forming an intermediate film made of a conductive material on the piezoelectric layer, forming a protective film on the intermediate film and, using the protective film as a mask, patterning by etching the piezoelectric layer together with the intermediate film into a predetermined pattern, peeling off the protective film, and depositing an upper electrode film on the passage forming substrate and patterning the upper electrode film into a predetermined pattern.
摘要翻译：制造液体喷射头的方法包括在通道形成基板上沉积下电极膜并将下电极膜图案化成预定图案，在通道形成基板上形成压电层，在导电材料上形成中间膜所述压电层在所述中间膜上形成保护膜，并且使用所述保护膜作为掩模，通过将所述压电层与所述中间膜一起蚀刻成预定图案，剥离所述保护膜并沉积上电极膜在通道形成基板上并将上电极膜图案化成预定图案。

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