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    • 1. 发明授权
    • Vertical heat-treating apparatus and heat insulator
    • 立式热处理装置和隔热材料
    • US5601428A
    • 1997-02-11
    • US540136
    • 1995-10-06
    • Shinichi OkoshiHiroyuki Kimura
    • Shinichi OkoshiHiroyuki Kimura
    • C30B31/10C30B31/12C30B33/00F27B17/00F27D7/02F27D3/12
    • C30B33/00C30B31/10F27B17/0025F27D7/02
    • It is an object of the present invention to provide a vertical heat treatment apparatus having a heat insulator, which has sufficient heat insulation, heat retention and high load pressure bearing properties to cope with increased size dimensions and number of layers of wafer workpieces and can be particularly advantageously used as a semiconductor and TFT substrate heat treatment apparatus. The apparatus features the use of a heat insulator casing 40 supporting a substrate holder 3 on its top and receiving a heat insulator 50 having numerous inner microspaces in its lower space, and defining a substrate holder or boat insulator receiving space A and a heat insulator receiving space B such that these spaces are hermetically sealed with respect to each other by the heat insulator casing. It is also a feature of the apparatus that the heat insulator receiving space B is in communication with the exterior or that the pressure in the heat insulator receiving space B can be reduced or increased through a contact section of a closure member 70 which supports the heat insulator casing 40 or a heat insulator casing flange 41.
    • 本发明的目的是提供一种具有绝热体的立式热处理装置,其具有足够的隔热性,保温性和高负载压力承载性能,以应对尺寸增加的尺寸和晶片工件的层数,并且可以 特别有利地用作半导体和TFT基板热处理装置。 该装置的特征在于使用在其顶部上支撑衬底保持器3的绝热器壳体40,并且在其下部空间中容纳具有多个内部微型体的隔热件50,并且限定衬底保持器或舟形绝缘体容纳空间A和隔热件接收 空间B,使得这些空间通过绝热壳体相对于彼此气密密封。 绝热体接收空间B与外部连通的装置的特征还在于,能够通过支撑热量的封闭构件70的接触部来减小或增加绝热体容纳空间B中的压力 绝缘体套管40或绝热体套管凸缘41。
    • 2. 发明授权
    • Base body of reflecting mirror and method for preparing the same
    • 反射镜的基体及其制备方法
    • US5576884A
    • 1996-11-19
    • US458672
    • 1995-06-02
    • Yoshiaki IseHiroyuki MiyazawaHiroyuki KimuraShinichi OkoshiTatsumasa NakamuraToshiyuki Kato
    • Yoshiaki IseHiroyuki MiyazawaHiroyuki KimuraShinichi OkoshiTatsumasa NakamuraToshiyuki Kato
    • G02B5/08G02B5/10G02B7/182G02B7/183C03B23/00C03B23/20
    • G02B7/183G02B5/08G02B5/10Y10S359/90Y10T428/249969Y10T428/249976Y10T428/249977
    • A light-weight base body of a reflecting mirror, such as those used in reflecting astronomical telescopes, is proposed which is made from fused silica glass or high-silica glass and is advantageous in respect of the excellent thermal and mechanical stability in dimensions to ensure high performance of the reflecting mirror. The base body is composed of a front plate, i.e. a surface plate to provide the optical surface, and a supporting body of porous foamed glass integrally bonded to the front plate. These two parts of the base body can be bonded together by sandwiching a layer of a finely divided silica powder therebetween and heating the assemblage at a temperature higher than the softening point of the silica powder so that the silica powder is softened or melted to firmly join the two parts sandwiching the powder layer. The base body can be further improved in respect of the mechanical stability by providing a rear plate backing the porous foamed body and a reinforcing hoop-like side layer surrounding the side surface of the porous foamed body, each made from fused quartz glass or high-silica glass and bonded to the porous foamed body by utilizing melting of a layer of silica powder therebetween.
    • 提出了一种反射镜的轻质基体,例如用于反射天文望远镜的反射镜,其由熔融石英玻璃或高硅石玻璃制成,并且在尺寸方面优良的热和机械稳定性是有利的,以确保 高性能的反光镜。 基体由前板,即提供光学表面的表面板和与前板一体地结合的多孔泡沫玻璃的支撑体组成。 基体的这两个部分可以通过在其间夹有细碎的二氧化硅粉末层而将它们粘合在一起,并在高于二氧化硅粉末的软化点的温度下加热组合物,使得二氧化硅粉末软化或熔化以牢固地结合 两部分夹在粉末层上。 通过提供背面多孔泡沫体的后板和围绕多孔泡沫体的侧表面的加强箍型侧层,每个由熔融石英玻璃或高熔点石英玻璃制成,可以进一步改善基体的机械稳定性, 二氧化硅玻璃,并通过利用二氧化硅粉末之间的熔融而与多孔发泡体结合。
    • 4. 发明授权
    • Vertical heat-treating apparatus and heat insulator
    • 立式热处理装置和隔热材料
    • US5480300A
    • 1996-01-02
    • US170164
    • 1993-12-23
    • Shinichi OkoshiHiroyuki Kimura
    • Shinichi OkoshiHiroyuki Kimura
    • C30B31/10C30B31/12C30B33/00F27B17/00F27D7/02F27D3/12
    • C30B33/00C30B31/10F27B17/0025F27D7/02
    • It is an object of the present invention to provide a vertical heat treatment apparatus having a heat insulator, which has sufficient heat insulation, heat retention and high load pressure bearing properties to cope with increased size dimensions and number of layers of wafer workpieces and can be particularly advantageously used as a semiconductor and TFT substrate heat treatment apparatus. The apparatus features the use of a heat insulator casing 40 supporting a substrate holder 3 on its top and receiving a heat insulator 50 having numerous inner microspaces in its lower space, and defining a substrate holder or boat insulator receiving space A and a heat insulator receiving space B such that these spaces are hermetically sealed with respect to each other by the heat insulator casing. It is also a feature of the apparatus that the heat insulator receiving space B is in communication with the exterior or that the pressure in the heat insulator receiving space B can be reduced or increased through a contact section of a closure member 70 which supports the heat insulator casing 40 or a heat insulator casing flange 41.
    • PCT No.PCT / JP92 / 00627 Sec。 371日期:1993年12月23日 102(e)日期1993年12月23日PCT提交日期为1992年5月15日PCT公布。 公开号WO93 / 23713 日本公开日为1993年11月25日。本发明的目的是提供一种具有绝热体的立式热处理装置,其具有足够的隔热性,保温性和高负载压力承受性能,以应对增加的尺寸尺寸和数量 晶片工件的层,并且可以特别有利地用作半导体和TFT基板热处理设备。 该装置的特征在于使用在其顶部上支撑衬底保持器3的绝热器壳体40,并且在其下部空间中容纳具有多个内部微型体的隔热件50,并且限定衬底保持器或舟形绝缘体容纳空间A和隔热件接收 空间B,使得这些空间通过绝热壳体相对于彼此气密密封。 绝热体接收空间B与外部连通的装置的特征还在于,能够通过支撑热量的封闭构件70的接触部来减小或增加绝热体容纳空间B中的压力 绝缘体套管40或绝热体套管凸缘41。
    • 5. 发明授权
    • Base body of reflecting mirror and method for preparing the same
    • 反射镜的基体及其制备方法
    • US5640282A
    • 1997-06-17
    • US775095
    • 1991-10-11
    • Yoshiaki IseHiroyuki MiyazawaHiroyuki KimuraShinichi OkoshiTatsumasa NakamuraToshiyuki Kato
    • Yoshiaki IseHiroyuki MiyazawaHiroyuki KimuraShinichi OkoshiTatsumasa NakamuraToshiyuki Kato
    • G02B5/08G02B5/10G02B7/182G02B7/183
    • G02B7/183G02B5/08G02B5/10Y10S359/90Y10T428/249969Y10T428/249976Y10T428/249977
    • A light-weight base body of a reflecting mirror, such as those used in reflecting astronomical telescopes, is proposed which is made from fused silica glass or high-silica glass and is advantageous in respect of the excellent thermal and mechanical stability in dimensions to ensure high performance of the reflecting mirror. The base body is composed of a front plate, i.e. a surface plate to provide the optical surface, and a supporting body of porous foamed glass integrally bonded to the front plate. These two parts of the base body can be bonded together by sandwiching a layer of a finely divided silica powder therebetween and heating the assemblage at a temperature higher than the softening point of the silica powder so that the silica powder is softened or melted to firmly join the two parts sandwiching the powder layer. The base body can be further improved in respect of the mechanical stability by providing a rear plate backing the porous foamed body and a reinforcing hoop-like side layer surrounding the side surface of the porous foamed body, each made from fused quartz glass or high-silica glass and bonded to the porous foamed body by utilizing melting of a layer of silica powder therebetween.
    • 提出了一种反射镜的轻质基体,例如用于反射天文望远镜的反射镜,其由熔融石英玻璃或高硅石玻璃制成,并且在尺寸方面优良的热和机械稳定性是有利的,以确保 高性能的反光镜。 基体由前板,即提供光学表面的表面板和与前板一体地结合的多孔泡沫玻璃的支撑体组成。 基体的这两个部分可以通过在其间夹有细碎的二氧化硅粉末层而将它们粘合在一起,并在高于二氧化硅粉末的软化点的温度下加热组合物,使得二氧化硅粉末软化或熔化以牢固地连接 两部分夹在粉末层上。 通过提供背面多孔泡沫体的后板和围绕多孔泡沫体的侧表面的加强箍型侧层,每个由熔融石英玻璃或高熔点石英玻璃制成,可以进一步改善基体的机械稳定性, 二氧化硅玻璃,并通过利用二氧化硅粉末之间的熔融而与多孔发泡体结合。
    • 8. 发明授权
    • Method of switching from immersion objective lens to dry objective lens
    • 从浸没式物镜切换到干式物镜的方法
    • US08456770B2
    • 2013-06-04
    • US12603652
    • 2009-10-22
    • Hiroyuki Kimura
    • Hiroyuki Kimura
    • G02B7/14
    • G02B21/248G02B21/33G02B27/0006
    • A microscope apparatus capable of removing liquid from an observation field of view of a dry objective lens, when an immersion objective lens is switched to the dry objective lens, is provided. The microscope apparatus includes a specimen XY stage on which a specimen is placed, a dry objective lens and an immersion objective lens that collect light from the specimen, a movable revolver that selectively disposes one of these objective lenses at a position facing the specimen, and a control unit that controls the specimen XY stage and movable revolver such that the relative positions in the XY direction are changed until the immersion objective lens is disposed at a non-observation region of the dry objective lens, prior to switching of these objective lenses.
    • 提供了一种显示装置,当将浸没物镜切换到干物镜时,能够从干物镜的观察视场中去除液体。 显微镜装置包括:放置试样的试样XY台,干物镜和收集来自试样的光的浸没物镜;选择性地将这些物镜中的一个物镜放置在与试样相对的位置的可动轮,以及 控制单元,其在切换这些物镜之前控制样本XY平台和可移动旋转臂,使得XY方向上的相对位置改变,直到浸没物镜设置在干燥物镜的非观察区域。
    • 10. 发明授权
    • Pretensioner and process for manufacturing the same
    • 预紧器和制造过程相同
    • US08366151B2
    • 2013-02-05
    • US12666141
    • 2007-07-06
    • Yoshihiro YokoteKazuhiko TanakaHiroyuki Kimura
    • Yoshihiro YokoteKazuhiko TanakaHiroyuki Kimura
    • B60R22/36A62B35/00B21D39/06
    • B60R22/1955B21D19/16B21D39/04B21K21/12Y10T29/49908
    • A pretensioner (1) for a seat belt system (7) of an automobile includes a gas generator (2), a gas pipe (3), a piston (5) and a coupling mechanism (6). The gas generator is adapted to generate a high-pressure gas when a shock occurs in the automobile due to a collision, a sudden stop, etc. The gas pipe is formed to receive therein the gas generator. The gas pipe is adapted to guide the high-pressure gas released from the gas generator to the piston. The piston is adapted to be moved or displaced by the pressure of the high-pressure gas guided by the gas pipe. The coupling mechanism is connected to each of the piston and a buckle (8) of the seat belt system (7). The coupling mechanism is adapted to wind up or pull a seat belt (9) in accordance with the movement of the piston to increase a restraining force of the seat belt.
    • 用于汽车的安全带系统(7)的预紧器(1)包括气体发生器(2),气体管道(3),活塞(5)和联接机构(6)。 气体发生器适于在汽车中由于碰撞,突然停止等而发生冲击时产生高压气体。气体管被形成为在其中容纳气体发生器。 气体管道适于将从气体发生器释放的高压气体引导到活塞。 活塞适于由气体管道引导的高压气体的压力移动或移动。 联接机构连接到安全带系统(7)的每个活塞和带扣(8)。 联接机构适于根据活塞的运动卷起或拉动安全带(9),以增加安全带的约束力。