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    • 7. 发明授权
    • Manufacturing apparatus and method for semiconductor device
    • 半导体器件的制造装置和方法
    • US08921212B2
    • 2014-12-30
    • US13685870
    • 2012-11-27
    • Kunihiko SuzukiShinichi Mitani
    • Kunihiko SuzukiShinichi Mitani
    • H01L21/02C23C16/458C30B25/10H01L21/67H01L21/687
    • H01L21/02639C23C16/4584C23C16/4586C30B25/10H01L21/67109H01L21/68792
    • A semiconductor device manufacturing apparatus includes a chamber in which a wafer is loaded; a first gas supply unit for supplying a process gas into the chamber; a gas exhaust unit for exhausting a gas from the chamber; a wafer support member on which the wafer is placed; a ring on which the wafer support member is placed; a rotation drive control unit connected to the ring to rotate the wafer; a heater disposed in the ring and comprising a heater element for heating the wafer to a predetermined temperature and including an SiC layer on at least a surface, and a heater electrode portion molded integrally with a heater element and including an SiC layer on at least a surface; and a second gas supply unit for supplying an SiC source gas into the ring.
    • 半导体器件制造装置包括其中装载晶片的腔室; 用于将处理气体供应到所述室中的第一气体供应单元; 用于从所述室排出气体的排气单元; 其上放置晶片的晶片支撑构件; 其上放置有晶片支撑构件的环; 旋转驱动控制单元,连接到所述环以旋转晶片; 设置在所述环中并且包括用于将晶片加热到预定温度并且在至少一个表面上包括SiC层的加热器元件的加热器和与加热器元件整体模制并且包括至少一个SiC层的SiC层的加热器电极部分 表面; 以及用于将SiC源气体供给到所述环中的第二气体供给单元。
    • 9. 发明申请
    • CONTROL DEVICE FOR INTERNAL COMBUSTION ENGINE
    • 内燃机控制装置
    • US20140318501A1
    • 2014-10-30
    • US14363167
    • 2011-12-08
    • Shinichi MitaniEiji MuraseTakahiro TsukagoshiKazuhisa Matsuda
    • Shinichi MitaniEiji MuraseTakahiro TsukagoshiKazuhisa Matsuda
    • F02D41/30
    • F02D41/30F02D19/061F02D19/0689F02D19/0692F02D19/084F02D19/087F02D41/0025F02D41/008F02D41/047F02D41/3094F02D2200/0611Y02T10/36
    • An objective of the present invention is to stabilize the fuel injection amount for each cylinder and to execute fuel injection control accurately in a single-pressure-feed dual-injection type alcohol fuel injection system. An engine includes two injection valves and and a single-pressure-feed dual-injection type fuel supply system. The fuel supply system is configured such that fuel is injected sequentially in two cylinders during the pressure-feed-interval period from the execution of one fuel pressure-feed operation to the execution of the next fuel pressure-feed operation. If the alcohol concentration in the fuel is higher than a predetermined determination value γ at a startup operation time, an ECU executes only a cylinder injection for the first of the two cylinders described above, and executes both an intake passage injection and a cylinder injection for the second cylinder. Thus, even if the fuel pressure decreases due to the fuel injection for the first cylinder, the required fuel injection amount can be reserved for the second cylinder.
    • 本发明的目的是稳定每个气缸的燃料喷射量,并且在单压进料双注射型酒精燃料喷射系统中精确地执行燃料喷射控制。 发动机包括两个喷射阀和一个单进料双注射型燃料供应系统。 燃料供给系统被构造成使得在从执行一个燃料加压操作到执行下一次燃料加压操作的压力进给间隔期间,将燃料依次注入两个气缸中。 如果燃料中的酒精浓度高于启动操作时间的预定判定值γ,则ECU仅执行上述两个气缸中的第一个气缸的气缸喷射,并且执行进气通道喷射和气缸喷射 第二缸。 因此,即使燃料压力由于第一气缸的燃料喷射而降低,也可以为第二气缸保留所需的燃料喷射量。
    • 10. 发明申请
    • PARTICULATE MATTER PROCESSING APPARATUS
    • 颗粒物加工设备
    • US20140000248A1
    • 2014-01-02
    • US13814419
    • 2011-03-16
    • Shinichi MitaniHiroshi NomuraEiji Murase
    • Shinichi MitaniHiroshi NomuraEiji Murase
    • F01N3/021
    • F01N3/021B03C3/41B03C3/49B03C3/68B03C2201/08B03C2201/24B03C2201/30B03C2201/32F01N3/01F01N9/00F01N11/00F01N2240/04F01N2900/0601F01N2900/1402F02D41/1459Y02T10/20Y02T10/47
    • A concentration of HC in an exhaust gas is estimated with a high degree of accuracy by making use of a particulate matter processing apparatus (1). In the particulate matter processing apparatus (1) in which a processing part (3) with an electrode (5) installed therein is arranged in an exhaust passage (2) of an internal combustion engine, wherein particulate matter is caused to aggregate by generating a potential difference between the electrode (5) and the processing part (3), provision is made for a power supply (6) that is connected to the electrode (5) and applies a voltage thereto, an insulation part (4) that insulates electricity between the processing part (3) and the exhaust passage (2), and a ground part (53) that grounds the processing part (3), a detection device (9) that detects an electric current in the ground part (53), and an estimation device (7) that estimates a concentration of HC in an exhaust gas based on the electric current detected by the detection device (9) at the time when the voltage is applied to the electrode (5) by means of the power supply (6).
    • 通过利用颗粒物处理装置(1),以高精度估计废气中的HC浓度。 在其中安装有电极(5)的处理部分(3)布置在内燃机的排气通道(2)中的颗粒物处理装置(1)中,其中使颗粒物质通过产生 电极(5)和处理部(3)之间的电位差设定为与电极(5)连接并对其施加电压的电源(6),将电力绝缘的绝缘部(4) 在处理部分(3)和排气通道(2)之间,以及接地部分(53),接地处理部分(3);检测装置(9),其检测接地部分(53)中的电流; 以及估计装置(7),其基于在通过电源向电极(5)施加电压时由检测装置(9)检测到的电流来估计排气中的HC的浓度 (6)。