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1. 发明授权

US4592801A Method of patterning thin film 失效
标题翻译：薄膜图案方法
公开(公告)号：US4592801A
公开(公告)日：1986-06-03
申请号：US639012
申请日：1984-08-09
申请人： Shinichi Hara , Shinji Narishige , Tsuneo Yoshinari , Mistuo Sato , Katsuya Mitsuoka , Makoto Morijiri , Masanobu Hanazono , Tetsuo Kobayashi
发明人： Shinichi Hara , Shinji Narishige , Tsuneo Yoshinari , Mistuo Sato , Katsuya Mitsuoka , Makoto Morijiri , Masanobu Hanazono , Tetsuo Kobayashi
IPC分类号： G11B5/31 , H01L21/302 , H01L21/3065 , H01L21/311 , B44C1/22 , C03C15/00 , C03C25/06 , C23F1/02
CPC分类号： H01L21/31116 , H01L21/302 , G11B5/3116 , G11B5/3163
摘要： A method of patterning a thin film by dry etching is disclosed in which, in order for a thin alumina film to have a predetermined pattern, the thin alumina film is selectively removed by carrying out the ion beam etching which uses a carbon fluoride gas, while using a photoresist film as a mask.
摘要翻译：公开了一种通过干蚀刻图案化薄膜的方法，其中为了使氧化铝薄膜具有预定图案，通过进行使用氟化碳气体的离子束蚀刻来选择性地除去薄氧化铝膜，同时使用光致抗蚀剂膜作为掩模。

2. 发明授权

US4780781A Thin film magnetic head having magnetic film of Co-Ni-Fe alloy 失效
标题翻译：具有Co-Ni-Fe合金磁膜的薄膜磁头
公开(公告)号：US4780781A
公开(公告)日：1988-10-25
申请号：US779469
申请日：1985-09-24
申请人： Masaaki Sano , Katsuya Mitsuoka , Makoto Morijiri , Shinji Narishige , Masanobu Hanazono , Toshihiro Yoshida
发明人： Masaaki Sano , Katsuya Mitsuoka , Makoto Morijiri , Shinji Narishige , Masanobu Hanazono , Toshihiro Yoshida
IPC分类号： C22C19/07 , C25D3/56 , C25D7/00 , G11B5/31 , H01F10/16 , H01F41/26 , G11B5/147
CPC分类号： G11B5/31
摘要： A thin film magnetic head comprising a lower magnetic film, an upper magnetic film which is formed over the lower magnetic film and in which one end is come into contact with one end of the lower magnetic film and the other end faces the other end of the lower magnetic film through a magnetic gap and thereby forming a magnetic circuit which has a magnetic gap in a part thereof, together with the lower magnetic film, and a conductor coil forming a coil of a predetermined number of turns and passing between the upper and lower magnetic films and crossing the magnetic circuit. Each of the upper and lower magnetic films is formed of a Co-Ni-Fe ternary alloy having a face-centered cubic crystal structure. Also, uniaxial anisotropy is alternately and perpendicularly given in every layer of a predetermined thickness stacked in the direction of thickness of the film.
摘要翻译：一种薄膜磁头，包括下部磁性膜，上部磁性膜，形成在下部磁性膜的上方，并且一端与下部磁性膜的一端接触，另一端面向下部磁性膜的另一端通过磁隙下降磁性膜，从而形成与下部磁性膜一起形成有磁性间隙的磁路，以及形成规定圈数的线圈的导体线圈，并且通过上下磁性膜并穿过磁路。上下磁性膜由具有面心立方晶体结构的Co-Ni-Fe三元合金形成。另外，在膜的厚度方向堆叠的规定厚度的各层中交替地，垂直地赋予单轴各向异性。

3. 发明授权

US4971896A Method for forming thin film pattern and method for fabricating thin film magnetic head using the same 失效
标题翻译：用于形成薄膜图案的方法和使用其制造薄膜磁头的方法
公开(公告)号：US4971896A
公开(公告)日：1990-11-20
申请号：US280828
申请日：1988-12-07
申请人： Takashi Kawabe , Ataru Kobayashi , Moriaki Fuyama , Makoto Morijiri , Eiji Ashida , Masatoshi Tsuchiya , Tetsuya Okai , Masanobu Hanazono , Shinichi Hara , Shinji Narishige , Hiroshi Ikeda
发明人： Takashi Kawabe , Ataru Kobayashi , Moriaki Fuyama , Makoto Morijiri , Eiji Ashida , Masatoshi Tsuchiya , Tetsuya Okai , Masanobu Hanazono , Shinichi Hara , Shinji Narishige , Hiroshi Ikeda
IPC分类号： G03F7/00 , G11B5/31
CPC分类号： G11B5/3163 , G03F7/0035 , Y10S430/165
摘要： A method of forming a thin film pattern on a base having a step portion. This method comprises a first step of forming a thin film of given material on the base, a second step of forming a predetermined pattern of a first photoresist film on said thin film at one of a first portion including a lower part of the step portion and a second portion including an upper part of the step portion, a third step of forming a predetermined pattern of a second photoresist film on said thin film at the other of the first and second portions and a fourth step of applying ion-milling to said thin film of given material using masks said first and second photoresist film patterns formed on said thin film at the first and second portions.
摘要翻译：在具有台阶部的基底上形成薄膜图案的方法。该方法包括在基底上形成给定材料的薄膜的第一步骤，第二步骤，在包括台阶部分的下部的第一部分中的一个上形成在所述薄膜上的第一光致抗蚀剂膜的预定图案，以及第二部分，包括台阶部分的上部;第三步骤，在所述第一和第二部分中的另一个上在所述薄膜上形成第二光致抗蚀剂膜的预定图案;以及第四步骤，将所述薄片给定材料的膜使用掩模，所述第一和第二部分形成在所述薄膜上形成的第一和第二光致抗蚀剂图案。

4. 发明授权

US4766009A Selective working method 失效
标题翻译：选择性工作方法
公开(公告)号：US4766009A
公开(公告)日：1988-08-23
申请号：US004279
申请日：1987-01-06
申请人： Midori Imura , Makoto Morijiri , Masanobu Hanazono , Shinichi Kazui
发明人： Midori Imura , Makoto Morijiri , Masanobu Hanazono , Shinichi Kazui
IPC分类号： C23C18/14 , B23K26/14 , C23C18/16 , C23C18/40 , C23F1/00 , C23F1/02 , C23F4/04 , H05K3/06 , H05K3/18 , H05K3/22 , B05D3/06
CPC分类号： C23C18/1669 , B23K26/146 , C23C18/161 , C23C18/1612 , C23F1/02 , H05K3/225 , H05K2203/107 , H05K2203/173 , H05K2203/175 , H05K3/068 , H05K3/187
摘要： A selective working method in which the surface to be worked of a workpiece is locally irradiated with energy beams and an electroless plating solution or an electroless etching solution is contacted with the irradiated workpiece surface, with the electroless plating solution or the electroless etching solution flowing continuously in the substantially same direction of as the direction of an irradiation of energy beams. The electroless plating of the electroless etching can be conducted selectively by this method. Above selective working method is best suited for the formation or correction (repair, filling up etc.) of micro-patterns on the workpiece such as metals, semi-conductors, insulators, etc.
摘要翻译：使用能量束局部照射被加工物的表面和化学镀溶液或无电解蚀刻溶液的选择性加工方法与被照射的工件表面接触，化学镀溶液或无电解蚀刻溶液连续流动在与能量束的照射方向基本相同的方向上。无电解蚀刻的化学镀可以通过该方法选择性地进行。上述选择性加工方法最适合于金属，半导体，绝缘子等工件上的微图案的形成或校正（修复，填充等）。

5. 发明授权

US4659587A Electroless plating process and process for producing multilayer wiring board 失效
标题翻译：无电镀工艺及生产多层布线板的工艺
公开(公告)号：US4659587A
公开(公告)日：1987-04-21
申请号：US786056
申请日：1985-10-10
申请人： Midori Imura , Makoto Morijiri , Masanobu Hanazono , Shinichi Kazui , Youzi Miura , Hiroyuki Ogino
发明人： Midori Imura , Makoto Morijiri , Masanobu Hanazono , Shinichi Kazui , Youzi Miura , Hiroyuki Ogino
IPC分类号： C23C18/16 , H05K3/18 , H05K3/40 , H05K3/46
CPC分类号： C23C18/1608 , C23C18/1612 , C23C18/1667 , C23C18/1868 , C23C18/1879 , C23C18/1882 , C23C18/204 , C23C18/206 , C23C18/2066 , C23C18/405 , H05K3/185 , H05K2203/107 , H05K3/4038 , H05K3/4644
摘要： In a selective electroless plating process suitable for formation and correction of a minute pattern by plating film, irradiation of the surface of a workpiece with a laser beam serves to selectively activate the surface of the workpiece to allow an electroless plating film to deposited on only the activated portions. The portion of the workpiece where plating is effected is irradiated with a radiation energy beam to form a damaged portion, which is contact with a plating bath during and/or after the irradiation to selectively from a plating film on the damaged portion. The portion of a workpiece where a pole as the connector part of a multilayer wiring board is to be formed is irradiated with a laser beam and allowed to have a pole selectively formed only thereon.
摘要翻译：在适于通过镀膜形成和校正微小图案的选择性化学镀方法中，用激光束照射工件表面用于选择性地激活工件的表面，以允许化学镀膜仅沉积在激活部分。用辐射能量束照射进行电镀的工件的部分，以形成受损部分，该损伤部分在照射期间和/或之后与电镀槽接触，以选择性地从损坏部分上的镀膜上。要形成作为多层布线板的连接器部分的极的工件的部分被激光束照射，并且允许具有仅在其上选择性地形成的极。

6. 发明授权

US5296979A Magnetic disc apparatus with thin film head suitable for high-density recording 失效
标题翻译：具有适用于高密度记录的薄膜头的磁盘装置
公开(公告)号：US5296979A
公开(公告)日：1994-03-22
申请号：US963039
申请日：1992-10-19
申请人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Masatoshi Tsuchiya , Eiji Ashida , Makoto Morijiri , Hideki Yamazaki , Yutaka Sugita , Hiroshi Fukui , Tadayuki Iwakura , Makoto Aihara , Makoto Saito , Shunichiro Kuwatsuka , Hiroshi Ikeda , Yokuo Saitoh
发明人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Masatoshi Tsuchiya , Eiji Ashida , Makoto Morijiri , Hideki Yamazaki , Yutaka Sugita , Hiroshi Fukui , Tadayuki Iwakura , Makoto Aihara , Makoto Saito , Shunichiro Kuwatsuka , Hiroshi Ikeda , Yokuo Saitoh
IPC分类号： G11B5/012 , G11B5/31
CPC分类号： G11B5/012 , G11B5/3116
摘要： A magnetic disc apparatus includes a magnetic disc for recording information; a thin film magnetic head including a magnetic pole structure having an upper magnetic pole tip and a lower magnetic pole tip arranged to provide a magnetic gap at respective end portions thereof for writing and reading information in and from the magnetic disc; a device for rotating the magnetic disc; and a device for positioning the thin film magnetic head; the upper and lower magnetic pole tips having different contours at the respective end portions as viewed from a side confronting the magnetic disc wherein the difference (.DELTA.CW in .mu.m) in the width, along the magnetic gap, of the upper magnetic pole tip and the width, along the magnetic gap, of the lower magnetic pole tip satisfies the relation0
摘要翻译：磁盘装置包括用于记录信息的磁盘; 包括具有上磁极端头和下磁极端头的磁极结构的薄膜磁头，其布置成在其各个端部处提供磁隙以在磁盘中写入和读取信息; 用于旋转磁盘的装置; 以及用于定位薄膜磁头的装置; 所述上磁极尖端和下磁极尖在相应端部处具有不同的轮廓，从与磁盘相对的一侧观察，其中沿着上部的磁隙的宽度（（delta）CW）（（m）））磁极尖端和下磁极尖端的磁隙的宽度满足磁道密度Tr为每英寸1800或更多磁道的磁盘的关系0 <（Delta）CW <= 5000 / Tr。

7. 发明授权

US5245493A Magnetic information storage apparatus including magnetic head and method for making magnetic head 失效
标题翻译：包括磁头的磁信息存储装置及制造磁头的方法
公开(公告)号：US5245493A
公开(公告)日：1993-09-14
申请号：US495908
申请日：1990-03-20
申请人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Eizi Ashida , Makoto Morijiri , Masanori Tanabe , Hiroshi Fukui , Yutaka Sugita , Hiroshi Ikeda , Masaaki Hayashi , Kazuo Nakagoshi , Kanji Kawakami , Yokuo Saitoh , Shunichiro Kuwatsuka
发明人： Takashi Kawabe , Moriaki Fuyama , Shinji Narishige , Eizi Ashida , Makoto Morijiri , Masanori Tanabe , Hiroshi Fukui , Yutaka Sugita , Hiroshi Ikeda , Masaaki Hayashi , Kazuo Nakagoshi , Kanji Kawakami , Yokuo Saitoh , Shunichiro Kuwatsuka
IPC分类号： G11B5/012 , G11B5/31 , G11B5/39
CPC分类号： G11B5/3919 , G11B5/012 , G11B5/3116 , G11B5/313 , G11B5/3163 , G11B5/3903 , G11B5/3967
摘要： A magnetic head for reading from and/or writing to a magnetic information storage medium has a substrate on which a plurality of thin films are formed in sequence. The films provide a magnetic circuit having a magnetic gap, a bottom pole piece and a top pole piece overlying said bottom pole piece. The top pole piece is formed as a tip portion adjoining the magnetic gap and a rear portion which makes magnetic contact with the tip portion. The rear portion is formed in the sequence after the tip portion. To ensure accurate thickness and width of the tip portion, a non-magnetic protective film is formed on the tip portion after the tip portion is formed and before the rear portion is formed.

8. 发明授权

US5241440A Thin film magnetic head and manufacturing method therefor 失效
标题翻译：薄膜磁头及其制造方法
公开(公告)号：US5241440A
公开(公告)日：1993-08-31
申请号：US908607
申请日：1992-06-29
申请人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
发明人： Eizi Ashida , Moriaki Fuyama , Hideki Yamazaki , Shinji Narishige , Makoto Morijiri , Takashi Kawabe , Shunichiro Kuwatsuka , Saburo Suzuki , Eisei Togawa
IPC分类号： G11B5/31
CPC分类号： G11B5/313 , G11B5/3163
摘要： A thin film magnetic head including conductor coils, a plurality of insulating layers to interpose and insulate the conductor coils and a magnetic gap layer between upper and lower magnetic cores, in which another insulating layer is provided on a stepped region formed by end faces of the plurality of insulating layers.
摘要翻译：一种薄膜磁头，包括导体线圈，多个绝缘层，用于将导体线圈插入并绝缘，以及在上下磁芯之间的磁隙层，其中另一绝缘层设置在由多个绝缘层。

9. 发明授权

US5701221A Magnetoresistive thin-film magnetic head and method of fabrication thereof 失效
标题翻译：磁阻薄膜磁头及其制造方法
公开(公告)号：US5701221A
公开(公告)日：1997-12-23
申请号：US416653
申请日：1995-04-05
申请人： Akira Taniyama , Makoto Morijiri , Haruko Tanaka , Isamu Yuito , Eiji Ashida , Hiroaki Koyanagi , Hideo Tanabe , Tetsuo Kobayashi
发明人： Akira Taniyama , Makoto Morijiri , Haruko Tanaka , Isamu Yuito , Eiji Ashida , Hiroaki Koyanagi , Hideo Tanabe , Tetsuo Kobayashi
IPC分类号： G11B5/31 , G11B5/39
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/3903 , G11B5/3932
摘要： A magnetic domain controlling film for controlling the magnetic domain of a magnetoresistive film is formed by a patterning technique on a lower insulating film formed on a lower shield film. The magnetoresistive film is formed on the magnetic domain controlling film for converting a magnetic signal from a magnetic recording medium into an electrical signal using the magnetoresistive effect. A resist pattern is formed by the lift-off method on the magnetoresistive film in such a fashion as to leave a region of the magnetoresistive film corresponding to the tracks of the magnetic recording medium. A magnetoresistive element is formed by ion milling leaving only the portion of the magnetoresistive film corresponding to the tracks. An insulating layer is formed on the resist pattern, on the upper surface region of the lower insulating film other than the portion thereof right under the magnetic domain controlling film reduced in thickness by ion milling, and on the upper surface region of the magnetic domain controlling film other than the portion thereof right under the magnetoresistive film. An electrode film is formed on the insulating layer, after which the resist pattern is removed. The insulating layer is contiguously deposited on the upper surface region formed in a thin layer of the lower insulating film and on a part of the upper surface region formed in a thin layer of the magnetic domain controlling film.
摘要翻译：用于控制磁阻膜的磁畴的磁畴控制膜通过在下屏蔽膜上形成的下绝缘膜上的图案化技术形成。磁阻膜形成在磁畴控制膜上，用于使用磁阻效应将来自磁记录介质的磁信号转换成电信号。通过剥离方法在磁阻膜上形成抗蚀剂图案，以便留下与磁记录介质的轨道相对应的磁阻膜的区域。通过离子铣削形成磁阻元件，仅留下对应于轨道的磁阻膜的部分。绝缘层形成在抗蚀剂图案上，除了通过离子研磨在厚度减小的磁畴控制膜的正下方的部分的下部绝缘膜的上表面区域上形成绝缘层，并且在磁畴控制的上表面区域膜之外的其它部分即刻在磁阻膜的正下方。在绝缘层上形成电极膜，然后除去抗蚀剂图案。绝缘层连续沉积在形成在下绝缘膜的薄层中的上表面区域和形成在磁畴控制膜的薄层中的上表面区域的一部分上。

10. 发明授权

US5897969A Method of fabricating a magnetoresistive thin-film magnetic head 失效
标题翻译：制造磁阻薄膜磁头的方法
公开(公告)号：US5897969A
公开(公告)日：1999-04-27
申请号：US975332
申请日：1997-11-20
申请人： Akira Taniyama , Makoto Morijiri , Haruko Tanaka , Isamu Yuito , Eiji Ashida , Hiroaki Koyanagi , Hideo Tanabe , Tetsuo Kobayashi
发明人： Akira Taniyama , Makoto Morijiri , Haruko Tanaka , Isamu Yuito , Eiji Ashida , Hiroaki Koyanagi , Hideo Tanabe , Tetsuo Kobayashi
IPC分类号： G11B5/31 , G11B5/39 , B32B9/00
CPC分类号： G11B5/3906 , G11B5/3163 , G11B5/3903 , G11B5/3932
摘要： A magnetic domain controlling film for controlling the magnetic domain of a magnetoresistive film is formed by the patterning technique on a lower insulating film formed on a lower shield film. The magnetoresistive film is formed on the magnetic domain controlling film for converting a magnetic signal from a magnetic recording medium into an electrical signal using the magnetoresistive effect. A resist pattern is formed by the lift-off method on the magnetoresistive film in such a fashion as to leave a region of the magnetoresistive film corresponding to the tracks of the magnetic recording medium. A magnetoresistive element is formed by ion milling leaving only the portion of the magnetoresistive film corresponding to the tracks.
摘要翻译：通过在下屏蔽膜上形成的下绝缘膜上的图案化技术形成用于控制磁阻膜的磁畴的磁畴控制膜。磁阻膜形成在磁畴控制膜上，用于使用磁阻效应将来自磁记录介质的磁信号转换成电信号。通过剥离方法在磁阻膜上形成抗蚀剂图案，以便留下与磁记录介质的轨道相对应的磁阻膜的区域。通过离子铣削形成磁阻元件，仅留下对应于轨道的磁阻膜的部分。

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