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    • 5. 发明授权
    • Method of producing a thin film magnetic head
    • 薄膜磁头的制造方法
    • US4841624A
    • 1989-06-27
    • US142696
    • 1988-01-11
    • Eisei TogawaSaburo SuzukiKenji SugimotoShunichiro Kuwatsuka
    • Eisei TogawaSaburo SuzukiKenji SugimotoShunichiro Kuwatsuka
    • G11B5/31
    • G11B5/3163Y10T29/49044Y10T29/49064
    • A method of producing a thin film magnetic head by successively depositing on a substrate a first magnetic material, a gap material, an electrically conductive material consisting of a coil, an insulating film, a second magnetic material and a protecting film, wherein the improvement comprises a step for forming a recessed portion in the insulating film at a portion corresponding to a gap portion on the air bearing surface side, the bottom surface of said recessed portion serving as an exposed portion on the upper surface of the gap material and the side surfaces of said recessed portion being tapered, a step for forming a recessed portion in the gap material by etching using the insulating film with the recessed portion as a mask and making the thickness thereof equal to the gap length, and a step for depositing a second magnetic material on the whole surface, so that the recessed portion formed in the gap material will have a rectangular shape with its one side being equal to a gap depth and its another side being equal to a track width. Unlike the conventional art, no thick photoresist film is used in a step for determining the gap depth and the track width, making it possible to obtain a thin film magnetic head having a small gap depth and a narrow track width maintaining high precision.
    • 一种通过在基板上依次沉积第一磁性材料,间隙材料,由线圈,绝缘膜,第二磁性材料和保护膜组成的导电材料制造薄膜磁头的方法,其中改进包括 在与空气轴承面侧的间隙部对应的部分,在绝缘膜上形成凹部的工序,作为上述间隙材料的上表面的露出部的上述凹部的底面, 所述凹陷部分是锥形的,通过使用具有凹陷部分作为掩模的绝缘膜进行蚀刻并使其厚度等于间隙长度来形成间隙材料中的凹陷部分的步骤,以及用于沉积第二磁体 材料在整个表面上,使得形成在间隙材料中的凹陷部分将具有矩形形状,其一侧等于间隙d epth,另一边等于轨道宽度。 与传统技术不同,在用于确定间隙深度和轨道宽度的步骤中不使用厚的光致抗蚀剂膜,使得可以获得具有小间隙深度和窄轨道宽度的薄膜磁头,从而保持高精度。
    • 7. 发明授权
    • Thin-film magnetic head and method for fabricating the same
    • 薄膜磁头及其制造方法
    • US4550353A
    • 1985-10-29
    • US559083
    • 1983-12-07
    • Osamu HiraiTetsuo KobayashiShunichiro KuwatsukaSaburo Suzuki
    • Osamu HiraiTetsuo KobayashiShunichiro KuwatsukaSaburo Suzuki
    • G11B5/31G11B5/12
    • G11B5/3153G11B5/3116G11B5/3163Y10T29/49044Y10T29/49046
    • A thin-film magnetic head having a magnetic core of double step structure and a method of fabricating it. A first magnetic core is formed on a substrate, which has a predetermined thickness at a pole chip region thereof and a thickness larger than the predetermined thickness at a back region thereof; a magnetic gap is formed thereon, a conductor coil is formed on the magnetic gap, which is encircled by an inter-layer, insulating film; a first magnetic film is formed thereon, which constitutes one layer of a second magnetic core and is connected with the first magnetic core at the back region; and a second magnetic film is formed thereon through an inorganic insulating film, which constitutes another layer of the second magnetic core and is removed at the pole chip region. When the second magnetic film is removed, the inorganic insulating film serves to protect the first magnetic film, and hence the thickness of the first magnetic film is maintained unvaried. Thus, there is obtained the thin-film magnetic head having a magnetic film which is of a predetermined thickness at the pole chip region and a thickness larger than the predetermined thickness at the back region.This structure enhances the conversion efficiency of the head as well as boosts the resolution for reproduction and relaxes the magnetization saturation for recording.
    • 一种具有双层结构的磁芯的薄膜磁头及其制造方法。 第一磁芯形成在基板上,该基板在其极片区域具有预定厚度,并且在其后部区域具有大于预定厚度的厚度; 在其上形成磁隙,在由间隔绝缘膜包围的磁隙上形成导体线圈; 在其上形成第一磁性膜,其构成一层第二磁芯并且在后部区域处与第一磁芯连接; 并且通过无机绝缘膜在其上形成第二磁性膜,该无机绝缘膜构成第二磁芯的另一层,并在极性芯片区域被去除。 当除去第二磁性膜时,无机绝缘膜用于保护第一磁性膜,因此第一磁性膜的厚度保持不变。 因此,获得了在磁极片区域具有预定厚度的磁性膜,并且在后部区域具有大于预定厚度的厚度的薄膜磁头。 这种结构提高了磁头的转换效率,并提高了再现的分辨率,并且放松了用于记录的磁化饱和度。