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    • 1. 发明授权
    • Contact electrode structure for semiconductor device
    • 半导体器件接触电极结构
    • US5302855A
    • 1994-04-12
    • US757480
    • 1991-09-10
    • Shigeyuki MatsumotoMasaru SakamotoYoshio Nakamura
    • Shigeyuki MatsumotoMasaru SakamotoYoshio Nakamura
    • H01L21/285H01L21/768H01L23/485H01L23/532H01L23/48H01L29/44
    • H01L23/53223H01L21/28562H01L21/76877H01L23/485H01L2924/0002
    • A semiconductor device and a manufacture method for the semiconductor device, the method comprising the steps of forming an insulating film on the surface of a semiconductor substrate, forming contact holes in the insulating layer to expose the surface of the semiconductor substrate, selectively depositing a metal film, which contains aluminum as a main ingredient, on the exposed surface to form an electrodes in each the contact hole, and forming a wiring made of a second metal, which contains as a principal ingredient an element other than aluminum, on both the insulating layer and the electrode. Preferably, the upper surface of each electrode is substantially flat in a connecting portion between the electrode and the wiring, and a relationship of A.gtoreq.C is established where A is a length of one side of the electrode's upper surface and C is a width of the wiring in the connecting portion therebetween. The metal film is produced at a high deposition rate and a high throughput while ensuring good reliability and presenting superior film characteristics such as step coverage and electro migration.
    • 一种半导体器件的半导体器件和制造方法,所述方法包括以下步骤:在半导体衬底的表面上形成绝缘膜,在所述绝缘层中形成接触孔以暴露所述半导体衬底的表面,选择性地沉积金属 在暴露的表面上形成在每个接触孔中的电极的膜,并且形成由第二金属制成的布线,该第二金属作为主要成分包含除了铝之外的元素,在绝缘 层和电极。 优选地,每个电极的上表面在电极和布线之间的连接部分中基本平坦,并且建立A> = C的关系,其中A是电极上表面的一侧的长度,C是宽度 在其间的连接部分中的布线。 金属膜以高沉积速率和高产量生产,同时确保良好的可靠性并呈现出优异的薄膜特性,如台阶覆盖和电迁移。
    • 5. 发明授权
    • Cylinder responsive vibratory noise control apparatus
    • 气缸响应振动噪声控制装置
    • US07620188B2
    • 2009-11-17
    • US10866986
    • 2004-06-15
    • Toshio InoueSatoru MinowaAkira TakahashiYoshio NakamuraMasahide Onishi
    • Toshio InoueSatoru MinowaAkira TakahashiYoshio NakamuraMasahide Onishi
    • G10K11/16
    • G10K11/178
    • An active vibratory noise control apparatus reduces vibratory noise which is produced in the passenger compartment of a vehicle based on vibratory noise generated by a variable-cylinder internal combustion engine that can selectively be operated in a full-cylinder operation mode in which all of the cylinders are operated and a partial-cylinder operation mode in which some of the cylinders are out of operation. The active vibratory noise control apparatus has a partial-cylinder operation mode determining circuit for determining whether the variable-cylinder internal combustion engine is in the partial-cylinder operation mode or not. Depending on a determined result from the partial-cylinder operation mode determining circuit, a transistor is turned on or off to switch an amplifying circuit which drives a speaker into and out of operation.
    • 主动振动噪声控制装置减少了基于由可变气缸内燃机产生的振动噪声而产生的振动噪声,该可变气缸内燃机可选择性地以全气缸操作模式操作,其中所有汽缸 并且其中一些气缸不工作的部分气缸操作模式。 主动振动噪声控制装置具有用于判定可变气缸内燃机是否处于部分气缸操作模式的部分气缸操作模式确定电路。 根据来自部分气缸操作模式确定电路的确定结果,晶体管导通或截止以切换驱动扬声器的放大电路进入和断开。
    • 6. 发明授权
    • Active noise cancellation system
    • 主动噪声消除系统
    • US07536018B2
    • 2009-05-19
    • US10936600
    • 2004-09-09
    • Masahide OnishiYoshio NakamuraToshio InoueAkira Takahashi
    • Masahide OnishiYoshio NakamuraToshio InoueAkira Takahashi
    • H03B29/00H04B15/00
    • G10K11/17883G10K2210/128G10K2210/3046
    • In an active noise cancellation system having an adaptive filter that outputs a control signal, first and second speakers that emit a canceling signal generated based on the control signal, a microphone that detects an error signal, a correction filter that corrects the base signal by a correction value to generate a reference signal and a filter coefficient updater that successively updates the adaptive filter coefficient based on the error signal and reference signal such that the error signal is minimized, the correction value of the correction filter is set to a sum obtained by adding the transfer characteristic from the first speaker to the microphone, and a product obtained by multiplying the transfer characteristic from the second speaker to the microphone by the prescribed value, thereby enabling to reduce the number of microphones and avoid the increase in parts, the amount of work to provide complicated wiring to the microphones, and the computational load involved in updating the adaptive filter coefficient, while enabling to maintain an area in which noise can be reduced to the same level as that obtained before reducing the number of microphones.
    • 在具有输出控制信号的自适应滤波器的有源噪声消除系统中,发射基于控制信号生成的消除信号的第一和第二扬声器,检测误差信号的麦克风,校正基本信号的校正滤波器, 用于产生参考信号的校正值和基于误差信号和参考信号连续更新自适应滤波器系数的滤波器系数更新器,使得误差信号最小化,校正滤波器的校正值被设置为通过加法获得的和 从第一扬声器到麦克风的传送特性,以及通过将来自第二扬声器的传送特性与麦克风相乘规定值获得的乘积,由此能够减少麦克风的数量并避免部件的增加, 努力为麦克风提供复杂的布线,以及更新中涉及的计算负荷 g的自适应滤波器系数,同时使得能够将噪声降低到与减少麦克风数量之前获得的相同水平的区域。