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    • 6. 发明授权
    • Electron-beam excited plasma generator with side orifices in the
discharge chamber
    • 电子束激发等离子体发生器,具有放电室中的侧孔
    • US5942854A
    • 1999-08-24
    • US90402
    • 1998-06-04
    • Makoto RyojiMasakuni TokaiYukitaka MoriTakeshi HasegawaMasahito Ban
    • Makoto RyojiMasakuni TokaiYukitaka MoriTakeshi HasegawaMasahito Ban
    • H05H1/46C23C14/32C23F4/00H01J27/20H01J37/32H01L21/203H01L21/205H01L21/302H05H1/24H01J27/02
    • H01J37/32009H01J37/3233H01J37/32357
    • The present invention provides an electron-beam excited plasma generator which can effectively form samples of larger areas.The electron-beam excited plasma generator according to the present invention comprises a cathode (11) for emitting thermions; a discharge electrode (23) for gas discharge between the cathode and the same; an intermediate electrode (13) positioned coaxially with the discharge electrode in an axial direction; a discharge chamber (2) to be filled with discharge gas plasma generated by the gas discharge between the cathode and the discharge electrode; a plasma processing chamber (3) formed adjacent to the discharge chamber with a partition wall (21) disposed therebetween and positioned so that a surface-to-be-processed of a workpiece-to-be-processed (35) is positioned perpendicular to the axial direction; a plurality of orifices (22) for pulling out electrons in the discharge gas plasma in the discharge chamber into the plasma processing chamber, each being formed in the partition wall substantially perpendicular to the axial line and distributed radially with respect to the axial direction; and an accelerating electrode (31) disposed in the plasma processing chamber for pulling out and accelerating the electrons through the orifices.
    • 本发明提供一种电子束激发等离子体发生器,能够有效地形成较大面积的样品。 根据本发明的电子束激发等离子体发生器包括用于发射热量的阴极(11) 用于在阴极与其之间进行气体放电的放电电极(23); 与所述放电电极在轴向同轴配置的中间电极(13) 放电室(2),其被填充有由阴极和放电电极之间的气体放电产生的放电气体等离子体; 等离子体处理室(3),其与排放室相邻形成有分隔壁(21),其间设置有被处理工件(35)的待处理表面与垂直于 轴向; 多个用于将放电室中的放电气体等离子体中的电子抽出到等离子体处理室中的多个孔,每个孔分别形成在基本上垂直于轴线并且相对于轴向方向径向分布的分隔壁中; 以及设置在等离子体处理室中的加速电极(31),用于拉出和加速电子通过孔。