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1. 发明申请

US20060148129A1 Silicon direct bonding method 审中-公开
标题翻译：硅直接键合法
公开(公告)号：US20060148129A1
公开(公告)日：2006-07-06
申请号：US11325464
申请日：2006-01-05
申请人： Seung-mo Lim , Hwa-sun Lee , Jae-chang Lee , Jae-woo Chung , Woon-bae Kim
发明人： Seung-mo Lim , Hwa-sun Lee , Jae-chang Lee , Jae-woo Chung , Woon-bae Kim
IPC分类号： H01L21/50 , H01L21/30
CPC分类号： H01L21/187 , H01L21/78 , H01L24/26 , H01L24/83 , H01L2224/8385 , H01L2224/83894 , H01L2924/01006 , H01L2924/01033 , H01L2924/01059 , H01L2924/07802 , H01L2924/10253
摘要： A silicon direct bonding method including preparing two silicon substrates having corresponding bonding surfaces, forming a trench in at least one bonding surface of the two silicon substrates, and thermally bonding the two silicon substrates to one another. The trench may be along a dicing line. The trench may communicate with an outer edge of the bonded substrates.
摘要翻译：一种硅直接接合方法，包括制备具有相应接合表面的两个硅衬底，在两个硅衬底的至少一个接合表面中形成沟槽，并将两个硅衬底彼此热粘合。沟槽可以沿着切割线。沟槽可以与结合的衬底的外边缘连通。

2. 发明授权

US07603756B2 Method of forming piezoelectric actuator of inkjet head 失效
标题翻译：形成喷墨头压电致动器的方法
公开(公告)号：US07603756B2
公开(公告)日：2009-10-20
申请号：US11583798
申请日：2006-10-20
申请人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
发明人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
IPC分类号： H04R17/00 , H01L41/24
CPC分类号： B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , Y10T29/42 , Y10T29/435 , Y10T29/49401
摘要： A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
摘要翻译：提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

3. 发明申请

US20070195134A1 Piezoelectric actuator inkjet head and method of forming the same 失效
标题翻译：压电致动器喷墨头及其形成方法
公开(公告)号：US20070195134A1
公开(公告)日：2007-08-23
申请号：US11581333
申请日：2006-10-17
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

4. 发明授权

US08806727B2 Method of forming a piezoelectric actuator of an inkjet head 有权
标题翻译：形成喷墨头的压电致动器的方法
公开(公告)号：US08806727B2
公开(公告)日：2014-08-19
申请号：US12712442
申请日：2010-02-25
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： H04R17/00
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A method of forming a piezoelectric actuator on a vibration plate to provide a driving force to each of a plurality of pressure chambers includes forming a lower electrode on the vibration plate, forming a piezoelectric layer on the lower electrode at a position corresponding to each of the pressure chambers, forming a supporting pad on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, forming an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad, and bonding the upper electrode to a driving circuit above the supporting pad to receive a voltage from the driving circuit.
摘要翻译：在振动板上形成压电致动器以向多个压力室中的每一个提供驱动力的方法包括在振动板上形成下电极，在下电极上形成压电层，位于对应于在所述下电极上形成支撑垫，所述支撑垫接触所述压电层的一端并且远离所述压电层的一端延伸，形成从所述压电层的顶表面延伸到顶部的上电极并且将上电极连接到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。

5. 发明授权

US07682001B2 Piezoelectric actuator inkjet head and method of forming the same 失效
标题翻译：压电致动器喷墨头及其形成方法
公开(公告)号：US07682001B2
公开(公告)日：2010-03-23
申请号：US11581333
申请日：2006-10-17
申请人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung Lee , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： B41J2/045
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

6. 发明申请

US20070186397A1 Method of forming piezoelectric actuator of inkjet head 失效
标题翻译：形成喷墨头压电致动器的方法
公开(公告)号：US20070186397A1
公开(公告)日：2007-08-16
申请号：US11583798
申请日：2006-10-20
申请人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
发明人： Seung-mo Lim , Kyo-yeol Lee , Jae-woo Chung , Hwa-sun Lee , Jae-chang Lee
IPC分类号： H04R17/00
CPC分类号： B41J2/161 , B41J2/1631 , B41J2/1645 , B41J2/1646 , B41J2002/1425 , Y10T29/42 , Y10T29/435 , Y10T29/49401
摘要： A method of forming a piezoelectric actuator of an inkjet head formed on a vibrating plate to provide a driving power for ejecting ink to each of pressure chambers is provided. The method includes forming a lower electrode on a vibrating plate, forming a piezoelectric layer on the lower electrode to be located above each of pressure chambers, forming a protecting layer covering the lower electrode and the piezoelectric layer, exposing an upper surface of the piezoelectric layer by decreasing a thickness of the protecting layer and the piezoelectric layer, forming an upper electrode on the upper surface of the piezoelectric layer, removing the protecting layer. According to the present invention, since the piezoelectric layer having a flat upper surface is formed in uniform figure, area and thickness of the upper electrode formed thereon is uniformly controlled.
摘要翻译：提供一种形成在振动板上的喷墨头的压电致动器的方法，以提供用于将油墨喷射到每个压力室的驱动力。该方法包括在振动板上形成下电极，在下电极上形成压电层，位于每个压力室之上，形成覆盖下电极和压电层的保护层，暴露压电层的上表面通过减小保护层和压电层的厚度，在压电层的上表面上形成上电极，除去保护层。根据本发明，由于具有平坦的上表面的压电层形成均匀的图形，所以形成在其上的上电极的面积和厚度被均匀地控制。

7. 发明申请

US20100146756A1 PIEZOELECTRIC ACTUATOR INKJET HEAD AND METHOD OF FORMING THE SAME 有权
标题翻译：压电致动器喷嘴头及其形成方法
公开(公告)号：US20100146756A1
公开(公告)日：2010-06-17
申请号：US12712442
申请日：2010-02-25
申请人： Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
发明人： Tae-kyung LEE , Jae-woo Chung , Kyo-yeol Lee , Hwa-sun Lee , Seung-mo Lim , Jae-chang Lee
IPC分类号： H01L41/22
CPC分类号： B41J2/14233 , B41J2002/14491 , Y10T29/42 , Y10T29/49002 , Y10T29/49005 , Y10T29/4908
摘要： A piezoelectric actuator of an inkjet head and a method of forming the piezoelectric actuator. The piezoelectric actuator is formed on a vibration plate to provide a driving force to each of a plurality of pressure chambers. The piezoelectric actuator includes a lower electrode formed on the vibration plate, a piezoelectric layer formed on the lower electrode at a position corresponding to each of the pressure chambers, a supporting pad formed on the lower electrode, the supporting pad contacting one end of the piezoelectric layer and extending away from the one end of the piezoelectric layer, and an upper electrode extending from a top surface of the piezoelectric layer to a top surface of the supporting pad. The upper electrode is bonded to a driving circuit above the supporting pad to receive a voltage from the driving circuit. The piezoelectric layer may have substantially the same length as the pressure chamber. The supporting pad may be formed of a photosensitive polymer and may have substantially the same height as the piezoelectric layer. The upper electrode may include a first portion formed on the piezoelectric layer and a second portion formed on the supporting pad, and the second portion may be wider than the first portion.
摘要翻译：喷墨头的压电致动器和形成压电致动器的方法。压电致动器形成在振动板上以向多个压力室中的每一个提供驱动力。压电致动器包括形成在振动板上的下电极，形成在下电极上的与每个压力室对应的位置处的压电层，形成在下电极上的支撑焊盘，支撑焊盘接触压电体的一端并且离开压电层的一端延伸，以及从压电层的顶表面延伸到支撑衬垫的顶表面的上电极。上电极接合到支撑焊盘上方的驱动电路，以接收来自驱动电路的电压。压电层可以具有与压力室大致相同的长度。支撑垫可以由光敏聚合物形成，并且可以具有与压电层基本相同的高度。上部电极可以包括形成在压电层上的第一部分和形成在支撑垫上的第二部分，并且第二部分可以比第一部分更宽。

8. 发明申请

US20070155056A1 Silicon direct bonding method 有权
标题翻译：硅直接键合法
公开(公告)号：US20070155056A1
公开(公告)日：2007-07-05
申请号：US11505420
申请日：2006-08-17
申请人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
发明人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
IPC分类号： H01L21/00
CPC分类号： H01L21/187 , H01L21/2007
摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.
摘要翻译：抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

9. 发明授权

US07442622B2 Silicon direct bonding method 有权
标题翻译：硅直接键合法
公开(公告)号：US07442622B2
公开(公告)日：2008-10-28
申请号：US11505420
申请日：2006-08-17
申请人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
发明人： Sung-gyu Kang , Seung-mo Lim , Jae-chang Lee , Woon-bae Kim
IPC分类号： H01L21/30
CPC分类号： H01L21/187 , H01L21/2007
摘要： A silicon direct bonding (SDB) method by which void formation caused by gases is suppressed. The SDB method includes: preparing two silicon substrates having corresponding bonding surfaces; forming trenches having a predetermined depth in at least one bonding surface of the two silicon substrates; forming gas discharge outlets connected to the trenches on at least one of the two silicon substrates to vertically penetrate the bonding surface; cleaning the two silicon substrates; closely contacting the two silicon substrates to each other; and thermally treating the two substrates to bond them to each other. The trenches are formed along at least a part of a plurality of dicing lines, and both ends of the trenches are clogged. Gases generated during a thermal treatment process can be smoothly and easily discharged through the trenches and the gas discharge outlet such that a void is prevented from being formed in the junctions of the two silicon substrates due to the gases.
摘要翻译：抑制由气体引起的空隙形成的硅直接接合（SDB）方法。 SDB方法包括：制备具有相应粘合表面的两个硅衬底; 在所述两个硅衬底的至少一个接合表面中形成具有预定深度的沟槽; 形成连接到所述两个硅衬底中的至少一个上的沟槽的气体放电出口，以垂直地穿透所述接合表面; 清洁两个硅衬底; 使两个硅衬底彼此紧密接触; 并对两个基板进行热处理以将它们彼此粘合。沟槽沿着多个切割线的至少一部分形成，并且沟槽的两端被堵塞。在热处理过程中产生的气体可以通过沟槽和气体排出口平滑且容易地排出，从而防止由于气体而在两个硅衬底的接合处形成空隙。

10. 发明申请

US20060150408A1 Method of forming symmetric nozzles in an inkjet printhead 审中-公开
标题翻译：在喷墨打印头中形成对称喷嘴的方法
公开(公告)号：US20060150408A1
公开(公告)日：2006-07-13
申请号：US11327367
申请日：2006-01-09
申请人： Seung-gyu Kang , Jae-woo Chung , Seung-mo Lim , Jae-chang Lee
发明人： Seung-gyu Kang , Jae-woo Chung , Seung-mo Lim , Jae-chang Lee
IPC分类号： B21D53/76
CPC分类号： B41J2/1642 , B41J2/162 , B41J2/1628 , B41J2/1629 , B41J2/1632 , Y10T29/49401
摘要： A method of forming nozzles in an inkjet printhead including forming ink inlets in a first surface of a substrate, polishing a second surface of the substrate after the forming of the ink inlets, and forming ink outlets in the second surface of the substrate after the polishing of the second surface, the ink outlets communicating with the ink inlets.
摘要翻译：一种在喷墨打印头中形成喷嘴的方法，包括在基板的第一表面中形成墨入口，在形成墨入口之后抛光基板的第二表面，以及在抛光之后在基板的第二表面中形成墨出口的墨水出口与墨水入口连通。

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