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    • 2. 发明授权
    • X-ray mask with a micro-actuator
    • 具有微执行器的X射线掩模
    • US06501824B1
    • 2002-12-31
    • US10046170
    • 2002-01-16
    • Seung Seob LeeKwang-Cheol LeeSang Jun Moon
    • Seung Seob LeeKwang-Cheol LeeSang Jun Moon
    • G21K500
    • G03F7/707G03F7/70783
    • An X-ray mask is integrated with a micro-actuator. The X-ray mask includes a mask portion, a mask holder portion, at least one elasticized supporter and a micro-actuator unit. The mask portion has a thin shuttle mass and an X-ray absorber attached on the shuttle mass. The mask holder portion is formed around the mask portion with a predetermined distance maintained therebetween. The elasticized supporter connects the mask portion and the mask holder portion elastically. The micro-actuator unit is prepared between the mask portion and the mask holder portion to precisely control a position of the mask portion when a voltage is applied.
    • X射线掩模与微致动器集成。 X射线掩模包括掩模部分,掩模保持器部分,至少一个弹性支撑件和微致动器单元。 掩模部分具有薄的穿梭质量和附着在梭体上的X射线吸收体。 掩模保持器部分围绕掩模部分形成,其间保持预定距离。 弹性支撑件弹性地连接面罩部分和面罩支架部分。 微致动器单元在掩模部分和掩模保持器部分之间制备,以在施加电压时精确地控制掩模部分的位置。