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    • 5. 发明授权
    • Handler and part inspecting apparatus
    • 处理器和零件检查装置
    • US09074728B2
    • 2015-07-07
    • US13765026
    • 2013-02-12
    • Seiko Epson Corporation
    • Masami MaedaToshioki Shimojima
    • F17C7/04F17C9/02
    • F17C9/02G01R31/2867G01R31/2877
    • A handler includes a storage tank which stores liquid nitrogen, supply channels which supply refrigerant from the storage tank to inner passages of a first shuttle, a valve which opens and closes the supply channel, and a heat exchanger which has vaporization chambers with larger flow path cross-sectional areas than those of the supply channels to vaporize liquid nitrogen within the vaporization chambers. According to this structure, the respective vaporization chambers are filled with nitrogen gas produced by preceding vaporization. Thus, pressure fluctuations produced by successive vaporization of liquid nitrogen can be reduced. Moreover, nitrogen gas is supplied to the respective inner passages. Accordingly, excessive cooling for part housing pockets can be prevented.
    • 处理机包括存储液氮的储罐,将储罐中的制冷剂供给到第一梭子的内部通道的供应通道,打开和关闭供应通道的阀以及具有较大流路的蒸发室的热交换器 横截面积大于供应通道的横截面面积,以蒸发蒸发室内的液氮。 根据该结构,在各汽化室中填充有先前蒸发的氮气。 因此,可以减少由液氮的连续汽化产生的压力波动。 此外,氮气被供给到各个内部通道。 因此,可以防止部件壳体袋的过度冷却。