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    • 1. 发明授权
    • Apparatus for conveying strip material
    • 用于输送带材的设备
    • US4480777A
    • 1984-11-06
    • US388297
    • 1982-06-14
    • Seiji SuzukiKenji KawateHiroshi Tawara
    • Seiji SuzukiKenji KawateHiroshi Tawara
    • B65H23/032C21D9/63F26B13/20B65H17/32B65H25/26
    • B65H23/032C21D9/63F26B13/104
    • Apparatus for conveying strip materials while floating them whereby a strip is allowed to pass between a pair of plenum chambers vertically spaced apart from each other and provided with blowoff openings through which gases are blown against the strip to float it as well as heat or cool the same. After the gases have been blown against the strip, a portion of them streams in one direction crossing the predetermined conveyance course of the strip, while the other portion thereof streams in the opposite direction. A pair of flow-rate control means are provided in conjunction with the plenum chambers and in opposite positions so as to vary the amount of gases streaming in said one direction in relation to that of those streaming in the other direction, when the strip has taken a winding course during conveyance, so that the strip is restored to its predetermined course of conveyance.
    • 用于在浮动它们时输送带状材料的装置,从而允许条带在彼此垂直间隔开的一对增压室之间通过,并且设置有吹气口,通过该吹出开口将气体吹向条带以使其浮动并且加热或冷却 相同。 在将气体吹向条带之后,其一部分沿与条带的预定输送路线交叉的一个方向流动,而另一部分则沿相反方向流动。 一对流量控制装置与集气室连通并在相对的位置提供,以便当条带已经被采取时,改变在所述一个方向上流动的气体相对于在另一个方向流动的气体量 在输送期间的卷绕路线,使得条带恢复到其预定的运送过程。
    • 2. 发明授权
    • Method of making semiconductor wafers
    • 制造半导体晶圆的方法
    • US6043156A
    • 2000-03-28
    • US960000
    • 1997-10-29
    • Fumitaka KaiMasahiko MaedaKenji Kawate
    • Fumitaka KaiMasahiko MaedaKenji Kawate
    • H01L21/304C30B33/00H01L21/306H01L21/302
    • H01L21/02008C30B33/00
    • It is an object of the present invention to provide a method for efficiently making semiconductor wafers that prevents the production of metal pollution. It is another object of the present invention to provide a method where the back side of the wafer does not influence the front side, thereof, and where the front and back sides of the wafer can be distinguished are polishing.This invention provides a method for efficiently making semiconductor wafers having uniform thickness where the thickness of the back side does not influence the front side and where the front side of the wafer is capable of being distinguished from the back side. A semiconductor ingot is sliced to obtain wafers. The sliced surfaces of the wafers are flattened. The flattened wafer is etched in alkaline etching solution. Both the front and back sides of the etched wafer are polished using a double sided polishing apparatus so that the front side is a mirror surface and an unevenness remains on the back side to distinguish the front and back sides, thereof. The polished wafer is cleaned.
    • 本发明的目的是提供一种有效地制造防止金属污染的半导体晶片的方法。 本发明的另一个目的是提供一种方法,其中晶片的背面不影响其前侧,并且可以区分晶片的正面和背面正在进行抛光。 本发明提供了一种有效地制造具有均匀厚度的半导体晶片的方法,其中背面的厚度不影响前侧,并且晶片的前侧能够与背面区分开。 将半导体锭切片以获得晶片。 晶片的切片表面变平。 在碱性蚀刻溶液中蚀刻扁平晶片。 使用双面抛光装置对被蚀刻的晶片的正面和背面进行抛光,使得前侧是镜面,并且在背面保留凹凸以区分其正面和背面。 抛光的晶圆被清洁。