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    • 9. 发明授权
    • Process for manufacturing multi-layer glass ceramic substrate
    • 制造多层玻璃陶瓷基板的工艺
    • US5458709A
    • 1995-10-17
    • US867513
    • 1992-04-13
    • Hiroshi KamezakiMasato WakamuraKishio YokouchiNobuo Kamehara
    • Hiroshi KamezakiMasato WakamuraKishio YokouchiNobuo Kamehara
    • H05K1/03H01L21/48H01L23/15H05K3/46B32B18/00
    • H01L23/15H01L21/4807H01L2924/0002H01L2924/09701
    • A process for manufacturing a multi-layer glass ceramic substrate which includes the steps of forming green sheets containing ceramic powders and glass powders as main ingredients, laminating the green sheets, and firing the laminated green sheets to form a multi-layer glass ceramic substrate, wherein at least one green sheet containing porous glass powders as a part of the glass powders, is provided to control the shrinkage of the green sheets and prevent cracks or delamination. The preferred process includes the steps of forming a single layer by i) forming first green sheets containing ceramic powders, glass powders, hollow glass spheres and porous glass powders as main ingredients, ii) forming an interconnection layer on each of the first green sheets, and iii) laminating the first green sheets with the interconnection layer; sandwiching the signal layer between upper and lower green sheets containing ceramic powders and glass powders as main ingredients; and firing the sandwiched signal layer to form the multi-layer glass ceramic substrate.
    • 一种多层玻璃陶瓷基板的制造方法,其特征在于,包括以下工序:形成含有陶瓷粉末和玻璃粉末的生片,作为主要成分,层叠生片,烧成层叠的生片以形成多层玻璃陶瓷基板, 其中提供至少一个含有多孔玻璃粉末作为玻璃粉末的一部分的生片,以控制生片的收缩并防止裂纹或分层。 优选的方法包括以下步骤:i)形成包含陶瓷粉末,玻璃粉末,中空玻璃球和多孔玻璃粉末的第一生坯作为主要成分,ii)在每个第一生坯上形成互连层, 以及iii)将所述第一生片与所述互连层层叠; 将信号层夹在含有陶瓷粉末和玻璃粉末的上下生片之间作为主要成分; 并且对夹层信号层进行烧成以形成多层玻璃陶瓷基板。