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1. 发明授权

US08193493B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US08193493B2
公开(公告)日：2012-06-05
申请号：US13032050
申请日：2011-02-22
申请人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
发明人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
IPC分类号： G01N23/00 , G01N23/225
CPC分类号： G01N23/225 , H01J37/265 , H01J37/28
摘要： A charged particle beam apparatus that can achieve both high defect-detection sensitivity and high inspection speed for a sample with various properties in a multi-beam type semiconductor inspection apparatus. The allocation of the primary beam on the sample is made changeable, and furthermore, the beam allocation for performing the inspection at the optimum inspection specifications and at high speed is selected based on the property of the sample. In addition, many optical parameters and apparatus parameters are optimized. Furthermore, the properties of the selected primary beam are measured and adjusted.
摘要翻译：一种能够实现多光束型半导体检查装置中具有各种性质的样品的高缺陷检测灵敏度和高检测速度的带电粒子束装置。使样品上的一次光束的分配是可变的，此外，基于样品的性质选择用于以最佳检查规格和高速进行检查的光束分配。此外，优化了许多光学参数和设备参数。此外，测量和调整所选择的一次光束的性质。

2. 发明授权

US07906761B2 Charged particle beam apparatus 有权
标题翻译：带电粒子束装置
公开(公告)号：US07906761B2
公开(公告)日：2011-03-15
申请号：US12037623
申请日：2008-02-26
申请人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
发明人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
IPC分类号： G01N23/225 , H01J49/00
CPC分类号： G01N23/225 , H01J37/265 , H01J37/28
摘要： A charged particle beam apparatus that can achieve both high defect-detection sensitivity and high inspection speed for a sample with various properties in a multi-beam type semiconductor inspection apparatus. The allocation of the primary beam on the sample is made changeable, and furthermore, the beam allocation for performing the inspection at the optimum inspection specifications and at high speed is selected based on the property of the sample. In addition, many optical parameters and apparatus parameters are optimized. Furthermore, the properties of the selected primary beam are measured and adjusted.
摘要翻译：一种能够实现多光束型半导体检查装置中具有各种性质的样品的高缺陷检测灵敏度和高检测速度的带电粒子束装置。使样品上的一次光束的分配是可变的，此外，基于样品的性质选择用于以最佳检查规格和高速进行检查的光束分配。此外，优化了许多光学参数和设备参数。此外，测量和调整所选择的一次光束的性质。

3. 发明授权

US07880143B2 Electron beam apparatus 有权
标题翻译：电子束装置
公开(公告)号：US07880143B2
公开(公告)日：2011-02-01
申请号：US11958717
申请日：2007-12-18
申请人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
发明人： Sayaka Tanimoto , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
IPC分类号： H01J37/26
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/0435 , H01J2237/2448 , H01J2237/24564 , H01J2237/24592
摘要： A plurality of primary beams are formed from a single electron source, the surface charge of a sample is controlled by at least one primary beam, and at the same time, the inspection of the sample is conducted using a primary beam other than this. Also, for an exposure area of the primary beam for surface charge control and an exposure area of the primary beam for the inspection, the surface electric field strength is set individually. Also, the current of the primary beam for surface charge control and the interval between the primary beam for surface charge control and the primary beam for inspection are controlled.
摘要翻译：由单个电子源形成多个主光束，通过至少一个主光束来控制样品的表面电荷，同时使用除此之外的一次光束进行样品的检查。此外，对于用于表面电荷控制的一次光束的曝光区域和用于检查的主光束的曝光区域，单独设置表面电场强度。此外，控制用于表面电荷控制的主光束的电流以及用于表面电荷控制的主光束和用于检查的主光束之间的间隔。

4. 发明申请

US20100133433A1 ELECTRON BEAM APPARATUS 有权
标题翻译：电子束设备
公开(公告)号：US20100133433A1
公开(公告)日：2010-06-03
申请号：US11958717
申请日：2007-12-18
申请人： Sayaka TANIMOTO , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
发明人： Sayaka TANIMOTO , Hiroya Ohta , Hiroshi Makino , Ryuichi Funatsu
IPC分类号： G01N23/225
CPC分类号： H01J37/28 , H01J37/244 , H01J2237/0435 , H01J2237/2448 , H01J2237/24564 , H01J2237/24592
摘要： A plurality of primary beams are formed from a single electron source, the surface charge of a sample is controlled by at least one primary beam, and at the same time, the inspection of the sample is conducted using a primary beam other than this. Also, for an exposure area of the primary beam for surface charge control and an exposure area of the primary beam for the inspection, the surface electric field strength is set individually. Also, the current of the primary beam for surface charge control and the interval between the primary beam for surface charge control and the primary beam for inspection are controlled.
摘要翻译：由单个电子源形成多个主光束，通过至少一个主光束来控制样品的表面电荷，同时使用除此之外的一次光束进行样品的检查。此外，对于用于表面电荷控制的一次光束的曝光区域和用于检查的主光束的曝光区域，单独设置表面电场强度。此外，控制用于表面电荷控制的主光束的电流以及用于表面电荷控制的主光束和用于检查的主光束之间的间隔。

5. 发明申请

US20090309022A1 APPARATUS FOR INSPECTING A SUBSTRATE, A METHOD OF INSPECTING A SUBSTRATE, A SCANNING ELECTRON MICROSCOPE, AND A METHOD OF PRODUCING AN IMAGE USING A SCANNING ELECTRON MICROSCOPE 审中-公开
标题翻译：用于检查基板的装置，检查基板的方法，扫描电子显微镜以及使用扫描电子显微镜产生图像的方法
公开(公告)号：US20090309022A1
公开(公告)日：2009-12-17
申请号：US12480443
申请日：2009-06-08
申请人： Yasuhiro GUNJI , Akira Fujii , Hiroyuki Takahashi , Ryuichi Funatsu , Toshifumi Honda , Takashi Hiroi , Hiroshi Makino
发明人： Yasuhiro GUNJI , Akira Fujii , Hiroyuki Takahashi , Ryuichi Funatsu , Toshifumi Honda , Takashi Hiroi , Hiroshi Makino
IPC分类号： G01N23/00 , H01J3/14
CPC分类号： G01N23/2251 , G01N2223/646 , H01J37/265 , H01J37/28 , H01J2237/202 , H01J2237/216 , H01J2237/2482 , H01J2237/2817
摘要： An object of the present invention provides an inspection apparatus and an inspection method which use an electron beam image to accurately detect a defect that is difficult to detect in an optical image, the apparatus and method also enabling prevention of a possible decrease in focus accuracy of an inspection image which affect the defect detection. To accomplish the object, the present invention includes a height measurement section which measures height of the electron beam irradiation position on the substrate after the substrate is loaded onto a movable stage, a height correction processing section which corrects the measured height, and a control section which adjusts a focus of the electron beam according to the height corrected by the height correction processing section, wherein a stage position set when the height measurement section measures the height differs from a stage position set when the substrate is irradiated with the electron beam, and the height correction processing section corrects a possible deviation in height resulting from movement from the stage position for the height measurement to the stage position for the electron beam irradiation.
摘要翻译：本发明的目的是提供一种使用电子束图像来精确地检测光学图像中难以检测的缺陷的检查装置和检查方法，该装置和方法还能够防止可能降低聚焦精度影响缺陷检测的检查图像。为了实现该目的，本发明包括一个高度测量部分，其测量将基板装载到可移动平台上之后的基板上的电子束照射位置的高度，校正测量高度的高度校正处理部分，以及控制部分其根据由高度校正处理部校正的高度来调整电子束的焦点，其中当高度测量部分测量高度时设置的台阶位置与当基板被电子束照射时设定的台位置不同，以及高度校正处理部分校正由高度测量的台位置到用于电子束照射的台位置的运动导致的高度偏差。

6. 发明授权

US08929049B2 Ion wind generator and ion wind generating device 有权
标题翻译：离子风发生器和离子风发生装置
公开(公告)号：US08929049B2
公开(公告)日：2015-01-06
申请号：US13811644
申请日：2011-10-27
申请人： Takashige Yagi , Tetsuya Tojyo , Hiroshi Makino
发明人： Takashige Yagi , Tetsuya Tojyo , Hiroshi Makino
IPC分类号： H01T23/00 , H01J27/02 , H05H1/24 , B03C3/38 , B03C3/62 , B03C3/64
CPC分类号： H01J27/022 , B03C3/38 , B03C3/62 , B03C3/64 , B03C2201/14 , H01T23/00 , H05H1/2406 , H05H2001/2412 , H05H2001/2418 , H05H2001/2437
摘要： Provided is an ion wind generator capable of diversifying either or both of the amount of wind or wind direction. An ion wind generator is provided with a first electrode, a second electrode having a downstream area which is arranged at a position in a plan view shifted from first electrode towards the positive side in the x direction, and a dielectric between the first electrode and the second electrode. In a plane view, the distance (d) in the x-direction from a downstream side edge of the first electrode to the downstream side edge of the downstream area differs in the y-direction which is perpendicular to the x-direction.
摘要翻译：提供了能够使风或风向的一方或两方多样化的离子风发生器。离子风发生器设置有第一电极，第二电极，其具有布置在从第一电极朝向x方向的正侧的平面图中的位置处的下游区域，以及第一电极和第二电极之间的电介质第二电极。在平面图中，从第一电极的下游侧边缘到下游侧的下游侧边缘的x方向上的距离（d）在与x方向垂直的y方向上不同。

7. 发明申请

US20140212879A1 METHOD FOR DETECTING TOXIN-PRODUCING CLOSTRIDIUM DIFFICILE 有权
标题翻译：检测产生毒素的方法
公开(公告)号：US20140212879A1
公开(公告)日：2014-07-31
申请号：US14239409
申请日：2012-08-31
申请人： Hiroyuki Kubota , Hiroshi Makino , Takafumi Sakai , Eiji Ishikawa , Kenji Oishi
发明人： Hiroyuki Kubota , Hiroshi Makino , Takafumi Sakai , Eiji Ishikawa , Kenji Oishi
IPC分类号： C12Q1/68
CPC分类号： C12Q1/689
摘要： Provided are an oligonucleotide which realizes specific and highly sensitive detection of toxigenic C. difficile, and a method for detecting toxigenic C. difficile, the method employing the oligonucleotide.1) A primer pair containing an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 1, and an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 2; or a primer pair having complementary sequences to the nucleotide sequences. 2) A primer pair containing an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 4, and an oligonucleotide having a nucleotide sequence represented by SEQ ID NO: 5; or a primer pair having complementary sequences to the nucleotide sequences.
摘要翻译：提供了实现特异性和高度灵敏的产生艰难梭菌的检测的寡核苷酸，以及使用该寡核苷酸的方法，用于检测致病性艰难梭菌的方法。 1）一种引物对，其含有具有由SEQ ID NO：1表示的核苷酸序列的寡核苷酸和具有由SEQ ID NO：2表示的核苷酸序列的寡核苷酸; 或与核苷酸序列具有互补序列的引物对。 2）含有具有SEQ ID NO：4所示的核苷酸序列的寡核苷酸的引物对和具有由SEQ ID NO：5表示的核苷酸序列的寡核苷酸; 或与核苷酸序列具有互补序列的引物对。

8. 发明申请

US20140117834A1 PLASMA GENERATOR AND PLASMA GENERATING DEVICE 有权
标题翻译：等离子体发生器和等离子体发生装置
公开(公告)号：US20140117834A1
公开(公告)日：2014-05-01
申请号：US14125799
申请日：2012-06-15
申请人： Takashige Yagi , Hiroshi Makino , Tetsuya Tojo , Takahito Hirata
发明人： Takashige Yagi , Hiroshi Makino , Tetsuya Tojo , Takahito Hirata
IPC分类号： H05H1/24
CPC分类号： H05H1/2406 , H01T23/00 , H05H2001/2418 , H05H2001/2437
摘要： The plasma generator has the dielectric having the inner circumferential surface, and a pair of electrodes which are arranged separated from each other in the direction along the inner circumferential surface and are isolated from each other by the dielectric and which are capable of generating plasma on the inner circumferential surface by application of voltage. In the inner circumferential surface, at the positions between the pair of electrodes in a plan view, recessed portions causing electric field concentration are formed.
摘要翻译：等离子体发生器具有内周面的电介质和一对电极，它们沿着内圆周表面的方向彼此分离，并且通过电介质彼此隔离，并且能够在内周面通过施加电压。在内周面上，在平面图的一对电极之间的位置形成有引起电场集中的凹部。

9. 发明申请

US20140001360A1 Charged Particle Ray Apparatus and Pattern Measurement Method 有权
标题翻译：带电粒子装置和图案测量方法
公开(公告)号：US20140001360A1
公开(公告)日：2014-01-02
申请号：US14002275
申请日：2012-01-27
申请人： Yuji Kasai , Makoto Suzuki , Hiroshi Makino
发明人： Yuji Kasai , Makoto Suzuki , Hiroshi Makino
IPC分类号： H01J37/05
CPC分类号： H01J37/05 , G01N23/2251 , G06T1/00 , H01J37/244 , H01J37/28 , H01J2237/24475 , H01J2237/24485 , H01J2237/2449 , H01J2237/24495
摘要： Provided is a technique to automatize a synthesis function of signal charged particles having different energies. A charged particle beam apparatus includes: a charged particle source configured to irradiate a sample with a primary charged particle ray; a first detector configured to detect a first signal electron having first energy from signal charged particles generated from the sample; a second detector configured to detect a second signal electron having second energy from signal charged particles generated from the sample; a first operation part configured to change a synthesis ratio of a signal intensity of the first signal electron and a signal intensity of the second signal electron and to generate a detected image corresponding to each synthesis ratio; a second operation part configured to calculate a ratio of signal intensities corresponding to predetermined two areas of the detected image generated for each synthesis ratio; and a third operation part configured to determine a mixture ratio to be used for acquisition of the detected image on a basis of a change of the ratio of signal intensities.
摘要翻译：提供了一种使具有不同能量的信号带电粒子的合成功能自动化的技术。带电粒子束装置包括：带电粒子源，被配置为用一次带电粒子射线照射样品; 第一检测器，被配置为检测从所述样品产生的信号带电粒子的具有第一能量的第一信号电子; 第二检测器，被配置为检测从样品产生的信号带电粒子的具有第二能量的第二信号电子; 第一操作部，被配置为改变第一信号电子的信号强度和第二信号电子的信号强度的合成比，并且生成与每个合成比相对应的检测图像; 第二操作部，被配置为计算与针对每个合成比生成的检测图像的预定的两个区域相对应的信号强度的比率; 以及第三操作部件，被配置为基于信号强度比的变化来确定用于获取检测到的图像的混合比率。

10. 发明申请

US20130083446A1 Ion Wind Generator, Ion Wind Generating Apparatus, and Ion Wind Generating Method 审中-公开
标题翻译：离子风发生器，离子风发生装置和离子风生成方法
公开(公告)号：US20130083446A1
公开(公告)日：2013-04-04
申请号：US13638540
申请日：2011-03-17
申请人： Takashige Yagi , Tetsuya Tojo , Hiroshi Makino
发明人： Takashige Yagi , Tetsuya Tojo , Hiroshi Makino
IPC分类号： H01T23/00
CPC分类号： H01T23/00 , H01T19/00
摘要： Provided is an ion wind generator which is able to raise the speed of the ion wind. An ion wind generator (3) has: a first electrode (9) and a second electrode (11) which are supplied with voltage and induce an ion wind by electric discharge, and a third electrode (13) which forms an electric field for accelerating the ion wind in a downstream region of the ion wind relative to the first electrode (9) and the second electrode (11).
摘要翻译：提供了能够提高离子风速度的离子风发生器。离子风发生器（3）具有：通过放电而被供给电压并引起离子风的第一电极（9）和第二电极（11），以及形成用于加速的电场的第三电极（13）离子风相对于第一电极（9）和第二电极（11）在离子风的下游区域中的离子风。

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